(3.234.221.162) 您好!臺灣時間:2021/04/14 15:15
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

我願授權國圖
: 
twitterline
研究生:吳銘仁
研究生(外文):Ming-jen Wu
論文名稱:建立在矽基板之單模態埋藏式高分子波導
論文名稱(外文):Single Mode Buried Polymer Waveguides on Silicon Substrate
指導教授:朱安國
指導教授(外文):An-Kuo Chu
學位類別:碩士
校院名稱:國立中山大學
系所名稱:光電工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
論文頁數:36
中文關鍵詞:二氧化矽高分子波導
外文關鍵詞:polymer.sio2waveguide
相關次數:
  • 被引用被引用:4
  • 點閱點閱:156
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:22
  • 收藏至我的研究室書目清單書目收藏:0
本論文的目的是在長好二氧化矽(SiO2)厚膜的矽基板上製作單模態埋藏式高分子波導(Single mode buried polymer waveguides)。首先我們以BPM CAD光場模擬軟體計算此波導之光場分佈,並確定為單模波導,再將其結構製作在已成長二氧化矽的矽基板上。接著,我們以乾蝕刻的方式在二氧化矽中蝕刻出槽溝(trench),在其中填入苯環丁烯(Benezocy-clobutene, BCB),當作波導的導光層(guiding layer),槽溝底部的SiO2當作底披覆層(bottom cladding layer),再以回蝕法(etching back method)將BCB層蝕刻到與槽溝等高,最後塗鋪上一層sol-gel混合型材料,當作頂披覆層(top cladding layer)同時使波導表面平坦化。在量測上,我們利用回切法(cut back method)來量得波導的傳輸損耗(propagation loss)及耦合損耗(coupling loss)此波導的傳輸損耗為:TE波0.91dB/cm 和TM波0.97dB/cm,極化相依損耗為0.06dB/cm,而耦合損耗為1.78dB ◦
In this paper, a single mode buried polymer waveguide on silicon dioxide layer on silicon substrate is presented. The waveguide was completed by first obtaining the optical field distribution using a beam propagation method. The waveguide structure is carefully designed to ensure a single-mode operation of this device. The waveguide was fabricated by first etching a trench on SiO2 layer. Then Benezocy-clobutene (BCB) polymer was deposited onto the layer and cured in proper conditions. Finally, a thin hybrid sol-gel layer was used as the top cladding layer after the BCB polymer etch-back process. The propagation losses are 0.91dB/cm and 0.97dB/cm for TE and TM polarized lights. The polarization dependent loss is 0.06dB/cm. The coupling loss of the waveguide is 1.78dB.
第一章 序論 1
第二章 埋藏式高分子波導特性與理論模擬 6
2-1.埋藏式高分子波導之結構特性與分析 6
2-2.高分子材料的特性分析及應用 9
2-3.波導理論模擬 13
第三章 埋藏式高分子波導元件製作 16
3-1.製程流程圖 16
3-2.埋藏式高分子波導製程說明 17
3-3.實驗結果與討論 27
第四章 高分子埋藏式波導量測與分析 30
4-1.埋藏式高分子波導封裝及研磨 30
4-2.高分子埋藏式波導切割及研磨 30
4-3.光學量測系統架設 33
第五章 實驗結果與討論 36
1.A. Kilian, J. Kirchof, G. Przyrembel, W. Wischmann, ″Birefringence free planar optical waveguide made by flame hydrolysis deposition (FHD) through tailoring of the overcladding, ″ Journal of Lightwave Technology, , Vol. 18 , 0 pp. 193 -198,Feb 200

2.B.L. Booth,″Low loss channel waveguides in polymers, ″ Journal of Lightwave Technology, Vol. 7, pp. 1445 -1453, Feb 1989

3.C.F. Kane, R.R. Krchnavek, ″Benzocyclobutene optical waveguides, ″
IEEE Photonics Technology Letters , Vol. 7 , pp. 535 -537 , May 1995

4.C.W. Phelps, T.S. Barry, D.L. Rode, R.R. Krchnavek, ″ Low-loss, single-mode, organic polymer waveguides utilizing refractive index tailoring ,″ Journal of Lightwave Technology, , Vol. 15 , pp. 1900 -1905, Oct 1997

5.L. Robitaille, C.L. Callender, J.P. Noad, ″Design and fabrication of low-loss polymer waveguide components for on-chip optical interconnection, ″IEEE Photonics Technology Letters ,Vol. 8 , pp. 1647 -1649, Dec 1996

6.M. Usui, M. Hikita, T. Watanabe, M. Amano, S. Sugawara, S. Hayashida, S. Imamura, ″Low-loss passive polymer optical waveguides with high environmental stability, ″ Journal of Lightwave Technology, , Vol.14 , pp. 2338 -2343, Oct 1996

7.A.J.Beuhler, D.A. Wargowski, K.D. Singer, T. Kowalczyk, ″Fabrication of low loss polyimide optical waveguides using thin-film multichipmodule process technology, ″ 44th Electronic Components and Technology Conference, pp. 618 -620, May 1994

8.黃亦德 "應用佛列斯涅折射原理建構偏折之埋藏式高分子複合波導, " 國立中山大學光電工程研究所碩士論文,2001

9.J.Y. Lin, I.C. Yang, P.C. Lee and A.K.Chu, ″Compact 1x2 Optical Couplers base on Buried Optical Waveguides,″ Institute of Electro-optical Engineering , National Sun Yat-sen University

10.G.T. Reed, ″Methods of measurement of passive integrated optical waveguides, ″ Measurements on Optical Devices, IEE Colloquium on , pp. 2/1 -2/7,Nov 199

11.A. Moujoud , Z. Saddiki, T.T. ouam AND S.I. Najafi, ″Measurement of the refractive-index variations with temperature of hybrid sol–gel glasses″, Thin Solid Films , pp. 161–165, July 2002

12.李沛宸"1X2 Y-branch之大角度偏折波導分光器 “,國立中山大學光電工程研究所碩士論文,2002
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
無相關期刊
 
系統版面圖檔 系統版面圖檔