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研究生:陳雲霜
研究生(外文):Yun-Shuang Chen
論文名稱:半導體環形濾波器之研製
論文名稱(外文):Fabrication of Semiconductor filters
指導教授:賴聰賢
指導教授(外文):Tsong-Sheng Lay
學位類別:碩士
校院名稱:國立中山大學
系所名稱:光電工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
畢業學年度:91
語文別:中文
論文頁數:60
中文關鍵詞:環形共振腔多模干涉耦合器
外文關鍵詞:MMI couplerring resonator
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本論文為研製環型共振濾波器,也包括了對多模干涉耦合器及彎曲波導做一些探討。
在環型濾波器計算設計上,單環部分FSR有33.3GHz、40GHz及50GHz,串聯雙環的部分FSR分別有100GHz及200GHz;在2×2 MMI的部分,9�慆的MMI模擬設計了50:50及0:100分光比率,8�慆的MMI模擬設計了15:85及50:50分光比率;在S型波導方面,包括了四組不同曲率半徑與彎曲角度設計。
在元件的製程上,先利用乾蝕刻技術將波導蝕刻至深度約1.6�慆後,再利用選擇性化學蝕刻溶液精準地控制蝕刻至所需的蝕刻層。另外,以高分子材料把波導兩邊平坦化,並將電極的pad鍍在高分子材料上。
在量測上,已初步量測出S-bend彎曲波導的損耗,從結果驗證以彎曲半徑100 �慆在連接處No Offset彎曲損耗為8.168 dB/900,有 Offset的結果損耗為0.731dB/900,明顯的有效降低7.347 dB/900。
In this thesis, S-bend waveguides and ring resonant filters with multimode interference (MMI) couplers have been designed and fabricated.
The single-ring filters are designed to have free spectral ranges ( FSR''s) of 33.3GHz, 40GHz and 50GHz. The FSR''s of double-ring filters are 100GHz and 200GHz. The splitting ratios of the 9-�慆 wide MMI couplers are 50:50 and 0:100. Those of 8-μm wide MMI''s are 15:85 and 50:50. In the S-bend waveguide section, test structures with four different curve radii and angles are included.
In the fabrication process, the sides of the waveguides are firstly dry- etched to a depth of about 1.6μm. This is followed by a selective wet chemical etch to stop at the top of the i-region. Finally, we use polyimide to planarize the sides of the waveguide and evaporate Cr-Au electrode over the polyimide.
In device measurements, the preliminary measurement of the S-bend waveguide losses has been completed. The loss in waveguides with offset at the curved junctions is found to be lower than in those without offset. The best condition is 0.731dB/900 at R=100�慆.
目錄
第一章 簡介
1-1. 前言.........................................1
1-2. 光波濾波器的介紹.............................1
1-3. 元件的應用...................................2
1-4. 論文架構.....................................3

第四章 原理
2-1. 環型濾波器簡介...............................4
2-1-1.單環濾波器之分析.........................6
2-1-2.雙環濾波器之分析........................10
2-2.多模干涉耦合.................................12
2-2.1 多模干涉耦合器模態分析..................13
2-3. 彎曲波導....................................16

第三章 元件設計與模擬
    3-1. 前言........................................20
3-2. 環型濾波器
3-2-1. 單環濾波器之模擬計算....................23
3-2-2. 雙環濾波器之模擬計算....................25
3-3. 多模干涉耦合器..............................29
3-4. S型波導.....................................32
3-5. 光罩的設計..................................34

第四章 元件製程步驟
4-1. 製作流程示意圖..............................35
4-2. 製程示意圖..................................36
4-3. 製程步驟及實驗結果..........................39

第五章 量測與結果
5-1. 量測系統架構................................52
5-2. 量測結果....................................53

第六章 結論.............................................58

參考文獻.................................................59
[1]. Kazuhiro Oda, Norio Takato, and Hiromu Toba, ”A Wide-FSR Waveguide Double-Ring Resonator Optical FDM Transmission System,” Journal of lightwave echnology, Vol.9, No.6, pp.728-736, April 1991

[2]. U.Troppenz, M.Hamacher, D.G.Rabus, H.Heidrich, ”All-active GaInAsP/InP ring cavities for widespread functionalities in the wavelength domain,” in Proceed.Internat.Conf.On indium Phosphide and Related Marerial(IPRM’02), Stockholm,Sweden, pp475-478, 12.16.05.2002.

[3]. Dominik G.Rabus, ”Realization of optical filter using ring resonators with integrated semiconductor optical amplifier in GaInAsP/InP” Ph.D. der Technischen Universität Berlin. pp.25-30, 05.07.02002.

[4]. Dominik G.Rabus, ”Realization of optical filter using ring resonators with integrated semiconductor optical amplifier in GaInAsP/InP” Ph.D. der Technischen Universität Berlin. pp.33, 05.07.02002.


[5]. D.G. Rabus, M. Troppenz, ”MMI-Coupled Ring Resonator in GaInAsP-InP,” IEEE Photonics Technology Letter. Vol. 13, No.8, pp. 812-814.2001.

[6]. Lucas B. Soldano, Erik C. M Penning, ”Optical Multi-mode Interference Devices Based on self-Imaging: Principle and Applications,” Journal of Lightwave technology , Vol.13, No.4, pp. 615-627, April 1995.

[7]. M. Bachmann, P. A. Besse, and H. Melchior, ”General self-imaging properties in N × N multimode interference couplers including phase relations,” Applied Optics, Vol.33, No.30, pp. 3905-3911, June 1994.

[8]. M. Bachmann, P. A. Besse, and H. Melchior, ”Overlapping-image multimode interference coupler with a reduced number of self-images for uniform and nonuniform power splitting,” Applied Optics, Vol 34, No.30, pp. 6898-6910, October 1995.

[9]. Meint K. Smit, Erik C. K. Pennings, Hans Blok, ”A Normalized Approach to the Design of Low-Loss Optical Waveguide Bends,” Journal of Lightwave technology, Vol.11, No.11, pp. 1737-1742, November 1993

[10]. L.H.Splekman, Y.S.Oei, E.G.Metaal,F.H.Groen, P.Demeester, M.K.Smit, ’’Ultrasmall waveguide bends:the corner mirrors of the future,” IEE Optoelectron, Vol.142, No.1, pp. 61-65, February 1995.

[11]. Vijaya Subramaniam, Gregory N.De Brabander,David H. Naghski and Joseph T.Boyd, ”Measurement of Mode Field Profiles and Bending and Transition Losses in curved Optical Channel Waveguides,” Jounal of lightwave technology, Vol.15, NO.6, pp. 990-997, June 1997.

[12]. N.J.Sauer and K.B.Chough, ”A Selective Etch for InAlAs over InGaAs and for Different InGaAlAs Quaternaries,” J.Electrochem.Soc, Vol.139, No.1, pp. L11-L12, January 1992.

[13]. Yan He, B.W.Liang, N.C.Tien and C.W.Tu, ”Selective Chemical Etching of InP Over InAlAs,” J.Electrochem. Soc, Vol.139. No.7, pp. 2046-2048, July 1992.
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