(3.237.20.246) 您好!臺灣時間:2021/04/16 08:16
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

我願授權國圖
: 
twitterline
研究生:游淑晴
研究生(外文):Shu-Ching Yu-
論文名稱:黃光區關鍵層機台限制機台指派投料與派工法則探討
論文名稱(外文):Machine Assignment, Order Releasing and Dispatching Policies in Photolithographic Area Under Critical Layer Constraints
指導教授:許棟樑許棟樑引用關係
指導教授(外文):D. Daniel Sheu
學位類別:碩士
校院名稱:國立清華大學
系所名稱:工業工程與工程管理學系
學門:工程學門
學類:工業工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
論文頁數:82
中文關鍵詞:派工法則黃光區投料法則機台指派關鍵層機台
外文關鍵詞:Dispatching RulesCritical LayerOrder Releasing PolicyLithographyMachine assingment
相關次數:
  • 被引用被引用:12
  • 點閱點閱:288
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:2
關鍵層,半導體製造黃光區經常有分關鍵層與非關鍵層,為了要減少層跟層之間的偏移,會要求在同一台機台上加工;關鍵層機台限制,即產品在下線投料時,第一層關鍵層是在某一機台加工,則以後所有的相關關鍵層皆要在同一台機台上生產,不得轉至其他機台;非關鍵層則無此限制;關鍵層機台限制可增加品質的穩定度,但其限制會使原本已是瓶頸機台的微影機台,在生產管制作業更困難和複雜。
本研究以提出一個黃光區在關鍵層限制下的機台指派法則,考慮產品的迴流性及微影機台當機情況,使其達到機台負荷平均、總產出增加、縮短平均生產週期。當產品到達第一關鍵層時,計算可用機台的未來關鍵層負荷,則此產品所有關鍵層皆必須在此機台上加工;當產品到達非關鍵層時,依照機台目前負荷大小投入。經由模擬結果可知,本研究所發展方法,確實可有效平衡機台負荷、提升總產出與縮短平均生產週期時間。本研究並將所提之機台指派,配合常用的投料與派工找出在各個不同的績效值下的最佳組合。
In semiconductor manufacturing, critical layers of a wafer lot often required to be processed at the same photolithographic machine in order to meet stringent cross-layer registration requirement. Non-critical layers do not have such requirement.
In this thesis, an algorithm was developed to balance the machine loading for photolithographic area considering the mixture of critical vs. non-critical layers constraints, the re-entrant nature in a fab, and the individual machine break down probabilities. The algorithm assigns the machines for critical layers based on the loading for the machines with respect to the critical layer’s remaining life-cycle loading and assigns the machine’s for non-critical layers based on relative dynamic loading of the available machines.
Simulation results indicated better overall local balance, throughput, and in fab cycle time of this approach compare to random machine assignments and intuitive dynamic loads balancing approach. The research continued to test various common order releasing and dispatching combinations. Best machine combinations of order releasing and dispatching methods were identified.
目錄
摘要......................................... Ⅰ
英文摘要..................................... Ⅱ
致謝......................................... Ⅲ
目錄......................................... Ⅳ
圖目錄....................................... Ⅵ
表目錄....................................... Ⅶ
第一章 、緒論................................ 1
1.1 研究動機與背景:......................... 1
1.2 研究目的................................. 2
1.3 研究範圍與限制........................... 2
1.4 研究方法與步驟........................... 4
第二章 、文獻探討............................ 6
2.1 半導體製程簡介........................... 6
2.2 生產作業控制(投料與派工法則)............. 8
2.2.1 投料法則............................... 8
2.2.2 派工法則探討........................... 13
2.3 相關文獻探討............................. 15
2.4 模型建構與模擬........................... 15
2.4.1 模擬的定義............................. 16
2.4.2 模擬的角色............................. 16
第三章 、研究方法與理論分析.................. 17
3.1 衡量晶圓廠績效之指標..................... 17
3.1.1 整廠性的績效指標....................... 17
3.1.2 黃光區績效指標......................... 19
3.1.3 黃光機台關鍵指標....................... 19
3.1.4 指標的選擇............................. 20
3.2 關鍵層機台限制模式構建................... 21
3.2.1 工作站情境說明......................... 21
3.2.2 參數定義............................... 22
3.2.3 模式建構步驟........................... 22
3.3 模擬架構................................. 23
3.4 投料法則與派工法則的選擇................. 24
3.4.1 投料法則的選擇......................... 24
3.4.2 派工法則的選擇......................... 25
第四章 、模擬驗證............................ 26
4.1 系統環境說明............................. 26
4.1.1 產品基本資料........................... 26
4.1.2 工作站基本資料......................... 27
4.1.3 交期的設定............................. 28
4.1.4 投料法則與派工法則參數之設定........... 28
4.2 模擬模式與分析........................... 31
4.2.1 模擬系統的建構......................... 31
4.2.2 決定模擬穩態時間....................... 32
4.2.3 模式名稱設定........................... 32
4.2.4 群組模式下各機台負荷值實例............. 33
4.3 分析實施後的具體成效..................... 34
4.3.1 群組機台模式比較....................... 34
4.3.2 機台群組下投料與派工的搭配分析......... 40
4.3.3 分析結果彙整........................... 51
第五章 、結論與未來研究方向.................. 53
5.1 結論..................................... 53
5.2 未來研究方向............................. 53
第六章 、參考文獻............................ 54
第七章 、附錄................................ 57
附錄A........................................ 57
附錄B........................................ 80
[1] Bechte, W., “theory and Practice of Load-Oriented Manufacturing Control”, International journal of Production Research. Vol. 26,pp. 375- 395, 1998
[2] Betche, W. “Load-Oriented Manufacturing Control Just-In-Time Production for Job Shop”, Journal of Production Planning and Control, Vol. 5,No.3, pp 292- 307, 1994
[3] Blackstone, J. H. , D. T. Phillips, and G. L. Hogg, “A state-of-The Art Survey of Dispatching Rules for Manufacturing Job Shop Operations” , International Journal of Production Research, Vol. 20, pp. 27- 45, 1982
[4] Chang, Y., T. Sueyoshi and R.S. Sullivan, “Ranking Dispatching Rules by Data Envelopment Analysis in a Job Shop Environment” , IIE Transactions, Vol.28, pp. 631- 642, 1996
[5] Conway, R. W., “Priority Dispatching and Work-in-process Invetory in A Job Shop”, Journal of Industrial Engineering, Vol. 16, pp. 228-236, 1965
[6] Elif Akcalt and Kazunori nemoto, “Cycle-Time Improvements For Photolithography Process in Semiconductor Manufacturing”, IEEE Transaction on Semiconductor Manufacturing, Vol4, No.1, pp. 48-56, 2001
[7] Forgarty, A. W., J. H. Blackstone and T. R. Hoffman, Production & Inventory Management, South-Western Publishing Co., 1991
[8] French, S., Sequencing and Scheduling: An Introduction to the Mathematics of the Job Ship,Ellis Worwood, Chichester, UK, 1982
[9] Garrett V. R., Sheldon X. C. L. and Stanley B. G, “ Production Control For A Tandem Two-Machine System”, IIE Transactions, Vol. 25, No. 5, 1993
[10] Glassey, C. R and M. G.. C. Resende, “Closed-loop Job Shop Release Control for VLSI Circuit Manufacturing”, IEEE Transaction on Semiconductor Manufacturing, Vol.1, No.1, pp. 26- 46, 1988
[11] Glassey, C. R. and M. G.. C. Resende, “A scheduling Rule For Job Release in Semiconductor Fabrication”, Operation Research Letters, Vol.7 No.5, pp 213- 217, 1988.
[12] Hsieh, B. W., C. H. Chen and S. C. Chang, “Fast Fab Scheduling Rule Selection By Ordinal Comparison-Based Simulation”, IEEE international symposium on semiconductor manufacturing conference proceedings, pp3 53-56, 1999
[13] Jackson., J. R., “Simulation Research on Job Shop Production”, Naval Research Logistic Quarterly, Vol.4 , No.4,pp 287- 295, 1957
[14] Kim, Y. D., J. U. Kim, S. K. Lim and H. B. Jun, “Due-Date Based Scheduling and Control Policies In a Multiproduction Semiconductor Wafer Facility”, IEEE transaction on semiconductor manufacturing, Vol. 11. Bo. 1, pp. 155- 164, February 1998
[15] Levitt, M. E. and J. A. Abraham, “Just-In-Time Methods for Semiconductor Manufacturing”, IEEE/ SEMI Advanced Semiconductor Manufacturing Conference, pp. 3- 9, 1990
[16] Lou., S. and P. W.Kager, “A Robust Production Control Policy for VLSI Wafer Fabrication”, IEEE Transactions on Semiconductor Manufacturing, Vol.2, No.4, pp 159-164, 1989
[17] Monden, Y., and D. W. Pentico, Heuristic Scheduling Systems, Wiley, New York, 1993
[18] Pieerbal, H. and N. Mebarki, “Dynamic Selection of Dispatching Rules for manufacturing System Scheduling”, International Journal of Production Research, Vol 35, No.6, pp. 1575- 1591, 1997.
[19] Schragemheim, E. and B. Ronen “Drum-Buffer-Rope Shop Floor Control”, Production and Inventory Management Journal, Third Quarter, pp.18- 22, 1990
[20] Schragenheim, E., and B. Ronen “Buffer Management:A Diagnostic Tool for Production Control”, Production and Inventory Management Journal, Third Quarter, pp.74- 79, 1990
[21] Sha, D. Y. , Cho-Yang Liu, “A Simulated Annealing Algorithm for Integration of Shop floor Control Strategies In Semiconductor Wafer Fabrication”, 國立交通大學工業工程與管理學系博士論文, 2002
[22] Sheu, D. Daniel and Shi- Zong Luo, “A Time-Weighted, Hit rate-based dispatching Method”, Submitted to IEEE Transactions on semiconductor Manufacturing, 2002
[23] Spearman, M. L. Dabid L. Woodruff and Wallace J. Hopp, “CONWIP:A Pull Alternative to Kanban”, International journal of Production Research, Vol. 28, No. 5, pp879- 894, 1990
[24] Steve, C. H. Lu, Deepa Ramaswamy, and P. R. Kumar, “Efficient Scheduling policies to Reduce Mean and Variance of Cycle-Time in Semiconductor Manufacturing Plants”, IEEE Transactions semiconductor manufacturing, Vol. 7, No. 3, pp. 374- 388, August 1994
[25] Steven, A. M. and L. C. Philip, Production Activity Control, Richard D. Irwin, Inc, 1987
[26] Wien, L. M., “Scheduling Semiconductor Wafer Fabrication”, IEEE Transaction on Semiconductor Manufacturing, Vol. 1, pp.115- 130, 1988
[27] Wroblewski, K. and R. Krawczynski, “Priority Rules in Production Flow Control”, Material Flow, Vol. 2, pp. 167- 177, 1985
[28] Yan, H, S. Lou, S. Sethi, A. Gardel, and P. Deosthali,, “Testing the Robustnesss of Various Production Control Policies in Semiconductor Manufacturing”, IEEE Transactions on Semiconductor Manufacturing, Vol.9, No. 2, pp.285- 289, 1996
[29] 大野耐一,豐田生產方式與現場管理,日本能率協會,中華企業管理發展中心,1981
[30] 林則孟,系統模擬理論與應用,滄海書局,2001
[31] 周煜智,指導教授鍾淑馨,“晶圓製造廠因應產品組合更動之快速規劃機制”,國立交通大學工業工程與管理學系碩士論文,1999
[32] 莊達人編著, VLSI製造技術, 高立圖書有限公司, 1997
[33] 曾子晃,指導教授 許棟樑,“台灣半導體前段製程管理成熟度分析:微影製程”, 國立清華大學碩士論文, 1997
[34] 黃宏文,指導教授 鍾淑馨,“晶圓製造廠生產活動控制策略之構建”,國立交通大學工業工程與管理學系論文,1995
[35] 徐光宏,指導教授 李慶恩, “晶圓製造廠黃光區派工法則之探討”, 國立交通大學工業工程與管理學系論文,1995
[36] 邱偉雄,指導教授 李慶恩,“半導體晶圓廠黃光區即時派工策略之構建”, 國立交通大學工業工程與管理學系論文,1996
[37] 麥昭仁,指導教授 鍾淑馨,“晶圓製造廠主要機種派工法則之設計”,國立交通大學工業工程與管理學系論文,1996
[38] 黎翠綾,指導教授 李榮貴,“在機台群組限制下的黃光區投料派工模式”,國立交通大學工業工程與管理學系論文,1999
[39] 郭奕桓,指導教授 許棟樑,“台灣半導體廠設備管理標竿:黃光區設備”,國立清華大學工業工程與管理學系論文,2001
[40] http://www.eas.asu.edu/~masmlab/ftp.htm
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
無相關期刊
 
系統版面圖檔 系統版面圖檔