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研究生:薛文鳳
研究生(外文):Hsueh Wen Feng
論文名稱:摻銅之鍶钇釕氧化物(2116)薄膜之製作與物性量測
論文名稱(外文):Fabrication and physical Property of Cu-doped Sr2YRuO6 (2116) thin film
指導教授:齊正中
指導教授(外文):Chi Cheng Chung
學位類別:碩士
校院名稱:國立清華大學
系所名稱:物理學系
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:英文
論文頁數:74
中文關鍵詞:薄膜結構霍爾係數磁性XPS拉曼散射
外文關鍵詞:thin filmstructureHall coefficientmagnetic propertyXPSRaman
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Sr2YRu1-xCuxO6 薄膜已被成功鍍在SrTiO3 (100)基板。Sr2YRu1-xCuxO6 薄膜呈現C軸方向垂直基板排列。低掠角X光繞射、小角度散射和拉曼光譜都顯示薄膜是整齊晶格排列、無雜相、有良好的晶格結構。
磁性量測顯示薄膜在5~8 K有超導轉變;在Auger電子能譜發現銅分布不均勻的問題;同時,Hall量測推論Sr2YRu0.9Cu0.2O6的載子是電洞,且在低溫時,Hall係數明顯變大。
藉銅離子佈植來改善薄膜。意外發現,電阻與溫度的關係和磁性有特別的現象。值得未來更多探討、研究。

We have successfully deposited Sr2YRu1-xCuxO6 films. Sr2YRu1-xCuxO6 films on SrTiO3 (100) have c-axis orientation perpendicular to substrate. All measurement results ”in-plane gazing incident X-ray diffraction figures, small angle grazing incident X-ray diffraction figures and Raman spectra” indicate Sr2YRu0.9CuxO6 films have good epitaxy, pure phase and good crystal structures.
Magnetic measurements indicate films superconduct at 5 ~ 8 K. Non-uniform distribution of Cu is discovered in EDS, Auger electron spectra and ESCA analyses. SEM and AFM images of films show films have flat surfaces. Sr2YRu0.9CuxO6 films’ carriers are hole-like and Hall coefficients become larger at low temperature.
Ion-implantation with Cu is expected to improve the superconductivity of films. The resistivity and magnetic property are strange. Further work is needed.

Abstract …………………………………………………………………I
Figure list ………………………………………………………………II
Table list……………………………………………………………IV
1. Introduction
1.1 Motivation…………………………………………………………… 1
1.2 Review of Sr2YRu1-xCuxO6………………………………… 1
2. Thin film fabrication process
2.1 Target preparation ………………………………………………6
2.2 Thin films fabrication ………………………………………9
3.Characteristic of Physical properties
3.1 Structure -X ray spectrum…………………………………13
3.2 Surface structure
3.2.1 Atomic force microscopy ( AFM ) …………………17
3.2.2 Scanning electron microscopy ( SEM ) ……………20
3.2.3 Auger electron microscopy.………………………………27
3.3 Transport property
3.3.1 Hall effect ……………………………………………………31
3.3.2 Rresistive property ………………………………………34
3.4 Magnetic property …………………………………………44
3.5 Ion implantation ………………………………………………49
3.6 Element analysis-X-ray photoelectron spectroscopy (XPS), (electron spectroscopy for chemical analysis, ESCA)………60
3.7 Optical property-Raman scattering study …………68
4. Conclusion……………………………………………………………72
5. Reference………………………………………………………………73

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