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研究生:葉宜貞
研究生(外文):Yi Jen Ye
論文名稱:均勻鐵原子團在氮化矽薄膜上自凝聚現象之研究
論文名稱(外文):Study on self-organized monodispersion of supported Iron nanoclusters on Si3N4(0001)/Si(111)
指導教授:果尚志
學位類別:碩士
校院名稱:國立清華大學
系所名稱:物理學系
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:英文
論文頁數:77
中文關鍵詞:鐵原子團氮化矽薄膜
外文關鍵詞:Fe clustersilicon nitrde
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在本篇論文中,在室溫的條件下我們在單晶氮化矽介電薄膜上成長鐵、鎳、鈷、銅以及金的奈米原子團。鐵、鎳及鈷奈米原子團會呈現大小侷限且單一分佈的現象,而銅及金奈米原子團則無此現象。另外,每個鐵、鎳、鈷原子團的平均大小不會隨著蒸鍍厚度的多寡而改變,且原子團的面密度與蒸鍍厚度成線性關係。根據實驗數據的計算結果,我們以古典成核理論為基礎提出:具有較大表面自由能的金屬才能呈現此新奇現象,另外我們亦提出電子殼層模型來粗略解釋金屬原子團的魔幻原子數之特性。最後,根據pair 分布方程式的計算結果,我們認為鐵原子團之間並無相關性,即原子團之間並無交互作用力存在。

In this thesis, we report the self-organized formation of monodispersed Fe, Ni, and Co nanoclusters on a single-crystal Si3N4 dielectric thin film at room temperature. Fe, Ni, and Co nanoclusters display size-limiting monodispersion behavior and have a very narrow size distribution. We have confirmed that the average sizes of Fe, Ni, and Co nanoclusters are independent of the adatom coverage and the areal density of the clusters is linearly proportional to the deposition coverage. We have also concluded that the atomic number distribution of Fe nanoclusters deduced from the experimental result is consistent with the new nucleation model proposed by us. In this model, this novel phenomenon of self-limiting size distribution originates from the large surface free energy and the quantum size effect of the metal nanoclusters in the ultrasmall size regime. Further, according to the pair distribution function, we found that no correlation relationship exists or mutual interactions among the Fe nanoclusters.

摘要 1
Abstract 2
Contents 3
1. Introduction 4
2. Basic concepts 10
2.1 Si(111)-77 surface 10
2.2 Single-crystal Si3N4(0001)-44 surface 14
2.3 Classical nucleation theory 18
2.4 Theory of pair distribution function 24
3. Experiment apparatus and theory 28
3.1 Theory of Scanning Tunneling Microscopy (STM) 28
3.2 Ultra-high vacuum (UHV) system 31
3.3 Sample preparing method 33
3.4 Electron-beam evaporator 35
3.5 Data analysis 37
4. Results 41
4.1 The behavior of Fe nanoclusters on Si3N4 thin film 41
4.2 The behavior of Ni and Co nanoclusters on Si3N4 thin film 49
4.3 The behavior of Cu and Au nanoclusters on Si3N4 thin film 53
5. Discussion 56
5.1 Analysis with classical nucleation theory 56
5.2 Shell model for metal clusters 60
5.3 Pair distribution function of Fe nanoclusters 65
6. Conclusion 73
7. References 75

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