臺灣博碩士論文加值系統

在微機電系統中，由於製程上的誤差或是溫度、氣候等外界不確定因素的影響，導致元件性能往往不如預期所設計，因此就必須由回授控制來確保或增進其性能。
本論文以微光機電系統中最常用的元件之一微掃瞄鏡作為回授控制的對象。驅動方面是採用靜電驅動，感測方面是藉著量測微掃瞄鏡下方兩電極板間的電容差，由電容差而知道微掃瞄鏡目前的角度，再經由控制器決定輸出到微掃瞄鏡的訊號。本文的目是希望藉由迴授控制使微掃瞄鏡有精準的角度定位。

第一章 緒論 1
1.1 研究背景與動機 1
1.2文獻回顧 1
1.3 本文大綱 3
第二章 系統架構與元件分析 4
2.1系統架構 4
2.2微掃瞄鏡動態分析和結構設計 4
2.2電容量測電路設計 11
2.2.1 電容量測電路一 11
2.2.2 電容量測電路二 13
2.3控制器設計 21
第三章 結果與討論 25
3.1 微掃瞄鏡電容差與轉動角度模擬結果 25
3.2 電容量測電路模擬結果 25
3.2.1 電容量測電路一 26
3.2.2 電容感測電路二 31
3.2.3 電容感測電路比較 34
3.4 鏡面製程結果 34
3.5 電容量測電路實測結果 36
3.6 干涉儀(WYKO)量測結果 44
3.7 微掃瞄鏡動態量測 44
3.8 利用迴授控制控制鏡面 49
第四章 結論 51
參考文獻 52

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