臺灣博碩士論文加值系統

雙穩態元件僅需要藉外力在兩個穩定位置間切換，因此具有減少元件維持穩定位置所需消耗的能量及避免外界干擾的優點。本文提出一組以機械方式傳送能量得到直線運動並可同時完成定位功能的微進給系統。文中所設計的微進給系統將整合雙穩態機構組成之定位元件，此雙穩態定位元件所具有之無需供給能量的制動功能與抗干擾是此微進給系統最重要之特性。本研究所提之微元件均可由面型微加工製造並且由實驗結果顯示此一設計具相當之可行性。此外，從實作及實驗結果得知，本文所提之微進給給系統成功立起並在無外加能量的情況下定位組裝一面鏡系統，與傳統微鏡面組裝相比，由於雙穩態定位元件所具有之重複使用特性，初步可驗證此微進給系統在微組裝上的應用價值。

The bistable devices need external forces only when switching the stationary positions, and therefore such devices need less power and can avoid external disturbances. A micro feeding system that integrates energy conversion device with mechanical transmission for obtaining planar linear positioning motions is proposed. The design of the proposed micro feeding system will be incorporated with the positioning device with bistable mechanism. The positioning device, with bistable mechanism with the function of un-powered locking and anti-disturbance will be the most important characteristic of the micro feeding system. All micro devices are fabricated through the surface micro machining and the experiment results demonstrate that the proposed micro feeding system is practicable initially. Furthermore, the proposed application of the micro feeding system is also implemented. The micro feeding system successfully lifts up a mirror and hold in place without external power. More importantly, the positioning device can work repeatedly so that the micro feeding system can hold the mirror in place with various tilting angles.

CONTENTS
LIST OF FIGURES
LIST OF TABLES
CHAPTER 1 INTRODUCTION
1.1 Background
1.2 Literature Review
1.2.1 Micro Bistable Devices
1.2.2 Micro Feeding Device
1.3 The Contents of this Research
CHAPTER 2 DESIGN OF THE MICRO FEEDING SYSTEM
2.1 (a) Tether
2.2 (b) Bistable Mechanism
2.3 (c) Spring
2.4 (d) SDA
CHAPTER 3 FABRICATION OF DEVICES
3.1 Introduction to MUMPs™ Process
3.2 Function of All Parts
3.3 Fabrication Process Flow
3.3.1 Fabrication ofBbistable Device with SDA arrays
3.3.2 Post Process
CHAPTER 4 EXPERIMENTS ON DEVICES
4.1 Experimental Instruments
4.2 Experiments on the Positioning Device
4.2.1 Bistable Mechanism
4.2.2 Successful Engagement of Tether
4.2.3 The Griping Force of the Micro Positioning Device
4.3 Experiments on the Micro Feeding Device
4.3.1 Driving of SDA
4.3.2 Uni-directional SDA Array
4.4 Application of the Micro Feeding System —
Mirror Assembly
4.5 Sensor for Planar Motion
4.6 Design Defects of the Micro Feeding System
CHAPTER 5 IMPROVEMENT AND APPLICATION OFTHE MICRO FEEDING SYSTEM
5.1 Design Improvement of Micro Positioning Device
5.1.1 The Stiffness of the Bistable Mechanism
5.1.2 The Double-bistable Mechanism
5.2 Improve the Coupling Response
5.3 Application of the Micro Feeding System
5.3.1 Micro Optical Component Assembly
5.3.2 Position with Anti-disturbance
CHAPTER 6 CONCLUSIONS AND FUTURE WORK
6.1 Conclusions
6.2 Future work
REFERENCES

REFRENCES
1.Ikuta, K., Maruo, S. and Kojima, S., 1998, “New Micro Stereo Lithography for Freely Movable 3D Micro Structure,” Micro Electro Mechanical Systems, Proceedings of MEMS 98, pp. 290-295.
2.Zhao-ying Zhou, ”微型機電系統技術”, 科儀新知, Vol.18 ,NO.3, 1996, pp.26-40
3.Jensen, B. D., Howell, L. L. and Salmon, L. G., 1999, ”Deign of Two-Link, In-Plane, Bistable Compliant Mechanism, “ASME Journal of Mechanical Design, Vol. 121, No.3, pp.416-423.
4.Halg, B., 1990, “On a Nonvolatile Memory Cell Based on Micro-electro-mechanics,” Proceedings IEEE Workshop on MEMS, pp. 172-176.
5.Parkinson, M. B., Jensen, B. D. and Roach, G. M., 2000, “Optimization-Based Design of a Fully-Compliant Bistable Micromechanism,” ASME Proceedings of Design Engineering Technical Conferences and Computer Information in Engineering Conference, DETC2000/MECH-14119.
6.Sun, X., Farmer, K. R. and Carr, M. N., 1998, “A Bistable Microrelay Based on Two-segment Multimorph Cantilever Actuators,” Proceedings IEEE Workshop on MEMS, pp. 154-159.
7.Ernest J. Garcia and Jeffery j. Sniegowski, “Surface Micromachined Microengine As the Driver for Micromechanical Gears” TRANSDUCERS’95, International Conference on Solid-State Sensors and Actuators, Sweden, 1995
8.John H. Comtois, victor M. Bright, “Application for Surface Micromachined Polysilicon Thermal Actuators and Arrays”, Sensors and Actuators, 1997
9.J. S. Park, L. L. Chu, Andrew D. Oliver, and Yogesh B, gianchandani, “Bent-Beam Electrothermal Actuators-Part Ⅱ: Linear and Rotary Microengines, Journal of Microelectromechanical Systems, Vol. 10, No.2, 2001
10.Abraham P. Lee and Albert P. Pisano, 1992, “Polysilicon Angular Microvibromotors” Journal of Microelectromechanical Systems, Vol. 1, No.2
11.Minfan Pai, Norman C. Tien, “Low Voltage Electrothermal Vibromotor for Silicon Optical bench application”, Sensors and Actuators, 1999
12.Shin-An Chang, 2001, “Design of a Bistable Compliant Micro-Mechanism Applied to Optical Switch,” Master thesis of National Tsing Hua University.
13.Yu-Ran Wang, 2001, “Design and Fabrication of Thermal Driven Micro Bistable Device Applied to Optical Switch,” Master thesis of National Tsing Hua University.
14.P. Langlet, D. Collard, T. Akiyama, H. Fujita, “A qualitative analysis of scratch Drive Actuation for integrated X/Y motion system.” 1997 international Conference on Solid-State Sensors and Actuators.
15.Teruobu AKIYAMA and Katsufusa SHONO, “ A New Step Motion of Polysilicon Microstructures”, 1993, IEEE.
16.MUMPs™ Design Handbook, Web Site: www.memsrus.com/cronos/CIMSmain2ie.html
17.Emmanuel Quevy, Lionel Buchaillot, and Dominique Collard, 2001, “3-D self-Assembling and Actuation of Electrostatic Micro Structure” IEEE Transactions on Elector Device, August 2001
18.Richard S. Muller, Kam Y. Lau,” Surface-Micromachined Microoptical Elements and Systems”, Proceeding of the IEEE, VOL. 86, NO. 8, August 1998
19.Li-Fan and M. C. Wu, “Two Dimension Optical Scanner with Large Angular Rotation Realized by Self-Assembled Micro Elevator” IEEE, 1998
20.S. S. Lee, L. Y. Lin, and M. C. Wu, ”Surface-micromachined free-space micro-optical systems containing three-dimensional microgratings”, American Institute of Physics, 1995
21.R. A. Busher, N. F. de Rooij, H. Tischhauser, A.Dommann and G. Staufert, “Biaxial Scanning Mirror Activated by Bimorph Structures for Medical Applications,” Sensors and Actuators A, Vol. 31, pp. 29-34.