在本實驗中我們成功的製作金屬/鐵電薄膜（PZT）/絕緣體（HfO2）/半導體（p-type）電晶體，並對其電性作分析。在基本的電性量測方面，我們得到臨界電壓為1.51 V，次臨界斜率是346 mV/decade以及電子遷移率為20 cm2/V-sec，已顯現出電晶體的基本特性。但是次臨界斜率太大，表示電晶體的開關能力不理想，以及電子遷移率過低。
這兩個問題則需要更進一步的探討。另外我們也得到在閘極電場強度500 kV/cm時，閘極的電流密度為3x10-5 A/cm2。
在電晶體的記憶體效應方面，由IDS-VGS特性曲線的量測結果，我們可發現IDS-VGS曲線走向在掃瞄振幅電壓小於5.5 V時為逆時針走向，而在掃瞄振幅電壓大於5.5 V時為順時針走向，這表示在當外加電壓小於5.5 V時，IDS-VGS走向是鐵電極化在主導；當外加電壓大於5.5 V時，電荷注入的影響大於鐵電極化，因此IDS-VGS走向是電荷注入在主導。同時，在鐵電極化的主導下，記憶窗於掃瞄電壓振幅5 V時最大，為0.25 V，在載子注入效應的主導下，掃瞄電壓振幅15 V時記憶窗為3.83 V。在排除載子注入的效應之後，我們可以得到1.7 V的記憶窗。這與 PZT 薄膜極化效應最大理論飽和值相等。另外，我們也經由IDS-VDS的量測得到分別以PZT和HfO2為鐵電層和絕緣層的MFIS結構電晶體的 ION和 IOFF 電流，Ion電流為26μA，Ioff電流為0.25μA，ION和IOFF比值大約為10，作為一個 FRAM 應該已足夠。

Metal-ferroelectric-insulator-semiconductor field effect transistors (MFISFETs) using an Al/Pb(Zr0.53,Ti0.47)O3 (PZT)/HfO2/Si structure were successfully fabricated. The threshold voltage is 1.51 V and the electron mobility is 20 cm2/V-s. The gate current density is 3x10-5 A/cm2 at 500 kV/cm. The IDS-VGS characteristics depend on both the polarization of the PZT layer and the injected charges into the insulator layer. When the polarization effect is dominant, the memory window is 0.25 V at an applied gate voltage of 4 V. The drain current can be controlled by a poling voltage indicating memory effect.

目 錄
第一章 緒論
1.1 動態隨機存取記憶體的發展趨勢………………………1 1.2 鐵電材料的電性…………………………………………1
1.3 鐵電材料鋯鈦酸鉛在記憶體上的應用…………………2 1.4 鐵電材料於FRAM的發展現況…………………………3
1.5 MFIS結構的應用…………………………………………5
第二章 鋯鈦酸鉛（PZT）的理論
2.1 鐵電材料的結構…………………………………………6
2.2 鐵電材料的特徵…………………………………………7
2.3 鐵電材料的開關理論……………………………………8
2.4 鐵電材料的可靠度………………………………………9
第三章 金屬/鐵電薄膜PZT/絕緣體/半導體 電晶體及電容的製備
3.1 設備與製程…………………………………..…………11
3.2射頻磁控濺鍍法的簡介………………………...………11
3.3 HfO2薄膜電容器的製備………………………….……12
3.3.1基板及絕緣層的製作…………………...…………..12
3.3.2 HfO2薄膜的成長……………………………………12
3.3.3 PZT 薄膜的製作………………...…………………13
3.3.4上下電極的製作………………….…………………14
第四章 M(Al)/F(PZT)/I(HfO2)/Si 場效電晶體的特性量測
4.1 電晶體的基本電性分析………………………………22
4.1.1 IDS-VDS Curve的特性…………………………….…22
4.1.2 臨界電壓（Threshold Voltage VT）…………………22
4.1.3 次臨界斜率（Sub-threshold Slope）……………...…23
4.1.4 遷移率的探討（Mobility）……………………….…25
4.1.5 漏電流 (Leakage Current) ……………………...…28
4.2 電晶體的記憶體效應…………………………………29
4.2.1 IDS-VGS 曲線飄移與走向的探討………….…….…29
4.2.2 ION 與 IOFF 電流…………………….………..………34
第五章 結論

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