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研究生:葉旭鈞
研究生(外文):Hsu-Chun Yeh
論文名稱:三維斜口電鑄微針陣列之研製
論文名稱(外文):Design and fabrication of 3-D electroplated oblique micro-needles arrays
指導教授:曾繁根曾繁根引用關係錢景常
指導教授(外文):Fan-Gang TsengChing-Chang Chieng
學位類別:碩士
校院名稱:國立清華大學
系所名稱:工程與系統科學系
學門:工程學門
學類:核子工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
論文頁數:71
中文關鍵詞:微針陣列SU-8電鍍THB-430N
外文關鍵詞:micro-needles arraysSU-8electroplateTHB-430N
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在近代的醫學治療上,病患服藥的方式大致分為三種:口服藥物式、皮下注射式、皮膚貼附式。口服藥物式會使藥物經過人體體內的循環系統而消耗,使藥物效用降低;皮下注射式會使皮膚造成疼痛、留下疤痕;皮膚貼附式的藥物輸送效率太低。為了改進上述缺點,本研究利用微機電製程技術研製三維斜口電鑄微針陣列。所製造的微針陣列將可改善以往藥物輸送方式之缺點,並提供一個更有效率更舒適的藥物輸送方式。
在經過幾代微針陣列製程設計的演進之後,本研究確定了最佳的製程參數及材料。因為厚膜負光阻(THB-430N)具有高深寬比的特性,可擔任微針陣列中微針頭的母模,再經過蒸鍍及電鍍等製程,便可完成平口的微針陣列。本研究更可利用製作平口微針陣列得到的經驗,設計出下一代的斜口微針陣列製程。
本研究所研製的微針頭由於是電鑄金屬所製造的所以結構強韌,並且具有傾斜角的針尖使微針可輕易穿刺進皮膚內進行輸送藥物及檢測的功用。

In the medical treatment at present time, we have three kinds of drug delivery ways which are taking medicines, hypodermic injection and pasting herbs on the skin. The effectiveness of drugs may decayed by taking medicines because of the circulatory system in human body. Hypodermic injection will hurt skin and be very painful. And the efficiency of pasting herbs on the skin is too slow. So we bring up a new idea about novel drug delivery system to overcome these disadvantages.
The novel drug delivery system is a three dimensional electroplated oblique micro-needles arrays that fabricated by Micro Electric- Mechanical Systems (MEMS) technology. The micro-needles arrays we designed and fabricated could improve traditional needles disadvantages that are mentioned above. And provide a drug delivery system which is more comfortable and efficiency.
After several generations micro-needles arrays, we make sure the best parameters and materials in the process. Because of the thick negative photoresist (e.g. THB-430N) can reach very high aspect ratio, so it can serve as mold of our micro-needles arrays. And then we can use evaporation and electroplate to finish our flat micro-needles arrays. We can also make use of experiences in fabricating flat micro-needles arrays to design next generation oblique micro-needles arrays process.
The micro-needles we design and fabricated are made of metal such as nickel (Ni). The metal is electroplated and stronger than silicon (Si). Furthermore, the arrays with oblique needles can be inserted across skin easily and painless. This advantage may improve the efficiency of drug delivery systems.

第一章 緒論
1-1 前言………………………………………………………………..1
1-2 目前藥物輸送方式………………………………………………..1
1-3 文獻回顧…………………………………………………………..3
1-3-1 圓柱型微針頭………………………………..……………..3
1-3-2 斜口型微針頭……………..………………………………..5
1-3-3 尖錐型微針頭………………………………………………..8
第二章 第一代微針陣列的設計與製程結果討論
2-1 微針陣列的設計概念…………………………………………...15
2-2 第一代微針陣列的設計..……………………………………….16
2-3 第一代微針陣列的製程步驟.…………………………………..18
2-4 第一代微針陣列的製程流程圖………………………………...22
2-5 第一代微針陣列結果與討論…………………………………...24
第三章 第二代微針陣列的設計與製程結果討論
3-1 第二代微針陣列的設計…………………………………….…..27
3-2 第二代微針陣列的製程步驟……………………………….…..28
3-3 第二代微針陣列的製程流程圖………………………………...34
3-4 第二代微針陣列結果與討論…………………………………...36
第四章 第三代微針陣列的設計與製程結果討論
4-1 第三代微針陣列的設計………………………………………...42
4-2 第三代微針陣列的製程步驟…………………………………...43
4-3 第三代微針陣列的製程流程圖…….…………………………..46
4-4 第三代微針陣列結果與討論…………………………………...48
第五章 第四代微針陣列的設計與製程結果討論
5-1 第四代微針陣列的設計………………………………………...57
5-2 第四代微針陣列的製程步驟…………………………………...58
5-3 第四代微針陣列的製程流程圖………………………………...61
5-4 第四代微針陣列結果與討論…………………………………...63
第六章 結論與未來工作方向
6-1 結論……………………………………………………………...67
6-2 未來工作方向…………………………………………………...69
參考文獻………………………………………………………………...70

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