摘要
在本論文中，是利用近場光學能夠提高解析程度的方法來觀察面射型半導體雷射元件的發光模態變化。使用近場光學顯微術，可以幫助我們瞭解在細微結構下的發光變化情形，同時還可以用來偵測區域性發光光譜。面射型半導體雷射元件是近年來受到重視的通訊用發光光源。因此在實驗中，將針對離子佈植與氧化限制型不同製程的面射型半導體雷射元件，分別量測和觀察其近場發光情形與模態的變化。同時還將以近場光譜解析量測來探討在近場下的發光影像與元件結構特性的關係。

Abstract
In this thesis, the lasing modes of the surface emitting laser diode have been investigated by using near-field optics (NFO) to improve the resolution. NFO microscopy not only could help us realize the subtle distinction between different lasing patterns, but also could detect the local emitting spectra. Surface emitting laser diode is the light source which recently becomes vitally important for optocommunication. Therefore, the different types devices fabricated by ion-implanted and oxide-confinement VCSELs in our experiments were observed their lasing conditions and mode variations in the near field respectively. Moreover, we also discuss about the relations between near-field optical images and architecture of the two devices by spectrally-resolved near-field investigation.

目錄
Acknowledge…………………………………………………………….I
英文摘要…………………………………………………………………II
中文摘要………………......................................................……….III
目錄…………………………………………………………………….IV
第一章 近場光學特性介紹
1-1 掃描式探針顯微技術之發展………………………….…….. 1
1-2光學顯微鏡簡介….….………………………………………..3
1-3 光學繞射極限..……………….……………………...…..….. 5
1-4 近場光學原理……….….……………………..………….......8
1-5消散波(Evanescent Wave)…………………………………10
1-6 近場光學顯微儀..….………………………………………..12
參考資料………………………………………………………….15
第二章 垂直共振腔面射型雷射元件
2-1 半導體雷射二極體簡介.…………………………………17
2-2 雷射二極體的發光原理.…………………….……………19
2-3 VCSEL元件.………………………….………………….. 21
2-4 Laser Rate Equation………………………………………25
2-5 光功率與電流(L-I)的基本特性….………………………28
2-6 VCSEL製作.………………………………………………30
參考資料……………………………….………………………..32
第三章 近場光學實驗系統架設
3-1 近場光學系統簡介…………………………………………33
3-2 石英音叉震盪器……………………………………………34
3-3光纖探針織製作…………………………………………37
3-4 實驗儀器及架構……………………………………………41
3-4-1 近場光學送光模式……………………………………41
3-4-2 近場光學收光模式.…………………………………42
參考資料………………………………………………………. 44
第四章 實驗結果與討論
4-1光通訊元件……………………………………………….…45
4-2 VCSEL近場發光量測(一)………………………………….49
4-3 VCSEL近場發光量測(二)….………………………………54
4-4 光譜解析(Spectral-resolved)之近場光學影像實驗……59
4-5 近場光誘導電流量測.…………….………………....…….61
參考資料………………….………….………………..………64
第五章 總結…………………………………….……………………65
附錄A……………………………….………………………………..A-1

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