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研究生:范振國
研究生(外文):Cheng-Kuo Fan
論文名稱:光纖光柵式振動感測器之研製與應用
論文名稱(外文):Fabrication and Application of the Fiber Grating Vibration Sensors
指導教授:蔡五湖
指導教授(外文):Prof. Woo-Hu Tasi
學位類別:碩士
校院名稱:大同大學
系所名稱:光電工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:英文
論文頁數:62
中文關鍵詞:
外文關鍵詞:Fiber SensorGratingSide-Polished FiberICP RIEFrequency ResponseVibration
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A novel type of the long period fiber grating (LPFG) vibration sensor is presented. For increasing the sensitivity of the sensor, we polish the fiber into the core region, then etch a long period grating into the side-polished surface by virtue of ICP RIE. This structure not only increases the sensitivity of the sensor, but also makes the sensing frequency up to 46 KHz. In addition, small size, easy fabrication, and cheaper all are the advantages of the LPFG vibration sensors. Several frequency measurements are carried out, and the experimental results have very good frequency response from low to high frequency region.

CONTENTS I
LIST OF FIBURES III
LIST OF TABLES VI
CHAPTER 1 INTRODUCTION 1
INTRODUCTION…..…………………………………………... 1
CHAPTER 2 THEORY 6
2.1 THEORY OF SIDE-POLISHED FIBERS ………..……. 6
2.2 ATTENUATION LOSS OF SIDE-POLISHED FIBERS … 9
2.3 THEORY OF FIBER GRATING ….……...…….…….... 13
2.3.1 Mode-Matching Method …….……………….… 13
2.3.2 The Simulating Results of Periodic Gratings …15
CHAPTER 3 FABRICATION OF SIDE-POLISHED AND OF GRATING OF FIBER DEVICES 18
3.1 INTRODUCTION ..…………..………..……………..… 18
3.2 THE FABRICATION OF A HOLDER FOR SIDE-POLI-SHED FIBER 18
3.2.1 Fabrication of A Holder for Side Polishing 19
3.2.2 The Process of side-Polished Techniques 22
3.2.3 Measurement Layout …..….…………………… 24
3.3 FABRICATION OF A FIBER GRATING .…………….. 28
3.3.1 Photolithography Technique ………..…………28
3.3.2 ICP RIE Dry Etching Technique ………..…….31
CHAPTER 4 RESULTS AND CONCLUSIONS 33
4.1 STRETCHED STRING AT DIFFERENT RESONANTFREQUNCIES 33
4.1.1 The Set-up of Experimental System …… 34
4.1.2 Results of The Side-Polished Fiber Sensor 35
4.1.3 Results of The Fiber Grating Sensor …… 41
4.2 THE FREQUENCY RESPONSE IN VIBRATION ….… 44
4.3 THE FREQUENCY RESPONSE AT SUPERSONIC WAVE VIBRATION 47
4.4 THE ELECTRO CARDIGRAM ON WRIST …………. 50
CHAPER 5 FEATURE WORK 52
REFERENCE 55

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