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研究生:林盛偉
研究生(外文):Sheng-Wei Lin
論文名稱:以鍍鈦奈米碳管來製備碳化鈦奈米線
論文名稱(外文):Synthesis of TiC nanowires using Ti-coated carbon nanotubes
指導教授:陳建忠陳建忠引用關係
指導教授(外文):Chien-Chong Chen
學位類別:碩士
校院名稱:國立中正大學
系所名稱:化學工程研究所
學門:工程學門
學類:化學工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:80
中文關鍵詞:燃燒合成濺鍍碳化鈦化學氣相沉積法
外文關鍵詞:combustion synthesissputtertitanium carbideCVD
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摘要
本研究主要包含三個部份:亦即金屬的濺鍍、利用高溫爐進行CVD成長碳管、及鍍鈦碳管的燃燒合成反應。濺鍍所使用的靶材分別為成長碳管所用之觸媒的鎳金屬,和沉積在碳管上用以合成TiC所用的鈦靶。而碳管的製備方面,主要是以水平式管型高溫爐為反應器,利用化學氣相沉積法之方法,進料碳源為丙酮,觸媒為鎳金屬,於氬氣常壓之下,在固定的溫度700℃之下成長出所需的碳管。其成長出奈米碳管用以鍍上所需之鈦金屬膜,將此鍍有鈦金屬膜之奈米碳管,置入方型反應器進行燃燒合成反應。藉由改變加熱電源大小及持溫時間等實驗參數,反應出各階段不一樣的產物型態。將所合成出之產物,以掃瞄式電子顯微鏡、場發射掃瞄式電子顯微鏡、穿透式電子顯微鏡、及元素分析儀、和選擇區域電子繞射等作結構上及元素上等之分析。實驗分析結果顯示,於碳管成長方面,所成長之碳管數量極多;而濺鍍上,也已成功將鈦金屬沉積於碳管外表;至於燃燒合成反應方面,明顯合成出了節狀的碳化鈦產物。而且在更長的持溫時間下所獲得之產物,以其更高倍率之顯微鏡觀察,皆可容易發現其碳化鈦產物。

Abstract
This research contains three parts: the sputtering of the metal,CNTs growthing in the furnace by CVD,and the combustion reaction
of Ti-coated CNTs. A sputter is used to deposite Ni, which is used as
catalyst for growing CNTs, and deposite titanium on CNTs in order to
synthesize TiC. For CNTs preparation, acetone was chosen as carbon
source, and Ni chosen as catalyst. A CVD method used to grow CNTs at 700℃under Ar atmosphere in the horizontal tube furnace. CNTs prepared were used to deposite titanium film. Ti-coated CNTs were
placed in the rectangular reactor and carried out the combustion reaction.
By varying heating power and sustaining time to gain the different
morphologyies for each step. Products were analyzed by SEM, FESEM,
TEM, EDS, and SAED. For CNTs growth, a lot of CNTs were
developed; for sputtering, titanium deposited on CNTs successfully, and
for combustion reaction, node-like TiC synthesized apparently. We also
find TiC from products easily obtained under longer sustaining time observed by higher magnificent microscope.

目錄
誌謝.............................................................................................................i
中文摘要…………………………………………………………………ii
英文摘要...................................................................................................iii
目錄...........................................................................................................iv
表目錄………………………………………………………………….vi
圖目錄…………………………………………………………………vii
1. 簡介…………………………………………………………………...1
1.1 濺鍍系統介紹……………………………………………………1
1.2 奈米碳管製備介紹………………………………………………3
2. 研究動機……………………………………………………………...5
3. 文獻回顧……………………………………………………………...7
4. 實驗方法……………………………………………………………...9
4.1 儀器設備…………………………………………………………9
4.2 實驗步驟………………………………………………………..11
4.3 分析方法………………………………………………………..14
5. 結果與討論………………………………………………………….17
5.1 以鎳奈米金屬為觸媒成長碳管………………………………..17
5.2 碳管鍍膜之探討………………………………………………..18
5.3 反應參數對鍍鈦碳管燃燒合成之型態影響…………………..20
5. 3. 1 持溫時間固定及改變電源供應下的影響………………..20
5. 3. 2電源供應固定及改變持溫時間下的影響…………………22
5. 3. 3持溫時間變化對產物最終型態之影響……………………25
5.4 顏色深淺對應其反應物生成順序之變化……………………...27
6. 結論………………………………………………………………….29
7. 未來展望…………………………………………………………….30
參考文獻………………………………………………………………..31
附錄……………………………………………………………………..76
附錄A ……………………………………………………………..78
附錄B ……………………………………………………………..79
附錄C ……………………………………………………………..80

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