臺灣博碩士論文加值系統

摘要
本文主要在於研究如何將120W Nd:YAG 的短脈衝雷射來做金屬模具之微結構精密加工與雷射拋光技術之研究，在精密微結構加工的部份，為了改善精密加工部份的精度，故探討多加入了輔助氣體Ar氣對微加工之影響，並且針對表面再鑄造現象作表面的雷射拋光動作。
本雷射其加工線寬解析度可以小於0.1mm，但因本雷射加工系統在加工時有表面再鑄造現象產生，而造成工件表面粗糙度之無法精確控制，因此本研究利用雷射進行工件表面加工時，多加入輔助氣體Ar氣，利用不同的氣體壓力來探討善表面再鑄造現象變化，與加工線寬的改善情形。本研究另一重點發現，可以利用雷射來進行工件表面之雷射拋光，因雷射加工所造成表面的再鑄造現象造成表面的粗糙不平，做一改善，其中利用了田口式品質法來找出雷射拋光的速度、離焦位子點、拋光層數等參數因子與水準，並再精確的單一改變拋光參數，找出最佳的拋光參數水準，最後並且將雷射微結構加工與雷射拋光技術作一整合。
經由實驗證明，加入輔助氣體Ar氣，能幫助改善再鑄造現象，再鑄造的高度約可下降8-17 um，加工線寬也有變細的情況，而拋光的新技術則可以將表面粗糙度Ra值從5 um降到 0.4 um左右的水準。

Abstract
One of the trends on developing Precision Metallic Mold Manufacture Technology in past ten years was to use high-speed turning to process hard milling of harden steel, but it was restricted to the diameter of the milling head. For instance, when we work on the minimal marks, which are below 0.1mm, all of manufacture accuracy and efficiency cannot be reached; therefore, we often use Precision Electrical Discharge Machining during the follow up process.
In short, the purpose of this paper is to apply Nd:YAG laser to laser mirco-structure manufacture and laser polishing technology, and to integrate the both as well. If we apply high power density to ablation 3D structure instead of traditional Precision Electrical Discharge Machining technology by setting up Nd:YAG laser setting on the Manufacturing Machinery, and integrate the laser polishing technology into the manufacture technology, we can reduce the following structure surface polishing and human resources as well. Accordingly, no matter the micro-machining, manufacture accuracy, the cost, or the delivery date are all making much more progress than those of the traditional process on metallic mold. Finally, the importance and particularity of this research was manifested through this 3D mirco material removing by laser ablation and laser polishing.
Be confirmed by the experiments, the height of Recasting could be reduced by 8-17 m through adding Ar gas as an auxiliary, and the groove width could be also attenuated as well. Moreover, the new technology of polishing could reduce Ra from 5 m to 0.4 m.

目錄
中文摘要
英文摘要
目錄……………………………………………………………………I
圖目錄…………………………………………………………………V
表目錄…………………………………………………..………………IX
第一章 緒論
1-1 前言…………………………………………………………1
1-2 研究主題動機與目標………………………………………2
1-3 文獻回顧……………………………………………………4
第二章 雷射微結構加工與雷射拋光原理
2-1雷射微結構加工原理………………………………………11
2-2雷射拋光原理
2-2-1 表面粗糙度與recasting產生和探討……………14
2-2-2 雷射表面拋光原理…………………………………15
2-3 加工參數
2-3-1 聚焦系統參數………………………………………18
2-3-2 雷射光束能量參數…………………………………21
2-3-3 材料特性參數………………………………………21
2-3-4 掃描速度與機構參數………………………………22
2-3-5 輔助氣體與環境因素………………………………24
第三章 雷射微結構加工與Ar氣之研究與實驗驗證
3-1 前言…………………………………………………………25
3-2 Nd:YAG雷射加工作業系統(Ar氣， A,B,Z軸平台)
3-2-1 Nd:YAG 雷射加工系統……………………………27
3-2-2 量測儀器……………………………………………30
3-3輔助氣體Ar氣
3-3-1加入Ar氣之優點……………………………………32
3-3-2噴出氣流密度分佈對光束聚焦之影響…………… 33
3-4 Nd:YAG雷射與輔助氣體Ar氣之實驗
3-4-1材料參數…………………………………………… 35
3-4-2實驗流程…………………………………………… 36
3-5 加入輔助氣體Ar氣後改善加工溝槽表面之實驗數據與成果
3-5-1 CCD拍攝比較有無添加Ar氣的雷射加工實驗……38
3-5-2 SEM下有無加入Ar氣輔助加工的比較……………39
3-5-3 表面輪廓儀做量測在不同雷射脈衝重複率下有無加入Ar氣輔助加工的比較……………………………43
3-5-4 探討最佳的輔助氣體Ar氣壓力……………………47
第四章 雷射拋光之研究與實驗驗證
4-1前言………………………………………………………55
4-2田口式品質法……………………………………………56
4-3實驗架構流程圖…………………………………………57
4-4雷射拋光參數因子與水準之設定………………………58
4-5使用田口式品質法找出初步雷射拋光參數值
4-5-1 田口式品質法之實驗數據………………………60
4-5-2 找出初步雷射拋光水準值………………………62
4-6進一步的單一改變雷射拋光參數找出最佳拋光參數
4-6-1單一改變工件拋光時離焦高度…………………63
4-6-2單一改變雷射拋光速度…………………………67
4-6-3單一改變雷射拋光層數…………………………68
4-7結論………………………………………………………70
第五章 雷射微結構加工與拋光之整合
5-1前言………………………………………………………71
5-2雷射三維加工……………………………………………71
5-3雷射三微雕刻應用與雷射拋光之加工於實物範例……73
第六章 結論與未來研究方向
6-1 結論 ……………………………………………………79
6-2未來研究方向與建議……………………………………81
附錄…………………………………………………………………82

附錄:
【1】Liu, J. S., Li, L. J., & Jin, X. Z., ” Accuracy Control of Three-dimensional Nd:YAG Laser Shaping by Ablation”, Optics & Laser Technology 31, pp.419-423 , 1999
【2】Slocombe. A, Li, L., “Laser ablation machining of metal/polymer composite materials”, Applied Surface Science 154-155,
pp. 617-621, 2000
【3】Kautek, W. et al., “Laser Micromachining of Barium Aluminium Borosilicate Glass with Pulse Durations between 20 fs and 3 ps”, Applied Surface Science 127-129, pp.892-898, 1998
【4】Dauer, S., Ehlert, A. & Buttgenbach, S. , “Rapid Prototyping of Micromechanical Devices using a Q-switched Nd:YAG Laser with Optional Frequency Doubling”, Sensors and Actuators 76, pp.381-385, 1999
【5】Cabalin, L. M. & Laserna, L. M. , “Experimental Determination of Laser Induced Breakdown Thresholds of Metals Under Nanosecond Q-switched Laser operation”, Spectrochimica Acta Part B 53, pp.723-730, 1998
【6】Nishimura, R. et al., “Yag Laser Welding of Neutron Irradiated Stainless Steels”, Journal of Nuclear Materials, 258-263, pp.2002-2007, 1998
【7】Chen, H. W., “Laser Fracture Milling and Cutting Techniques for Thick Ceramic Substrate”, 2001
【8】Tokarev ,V. N., et al., “Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films”, Diamond and related materials . pp.169-176, 1995
【9】Townsend, Peter.,& Olivares, jose., “Laser Processing Of Insulator Surface. Applied Surface Science”, pp.257-282,1997
【10】Pham, D. T. Dimov, S. S. Petkov, P. V. and Petkov, S. P., “Laser milling”, Proceedings of the Institution of Mechanical Engineers -- Part B -- Engineering Manufacture, pp.657~666, 2002
【11】Willian, M. S., “Laser Material Processing”, second edition
【12】Silvain.J.F., “ Nucleation and Groth of Surface mircostructures on Nd:YAG Laser Ablation Carbon Composite”.Composite: Part A,
pp. 469-478, 2000
【13】Joseph McGeough., “Micromachining of Engineering Materials”
【14】Dirac, J. W. Mullenborn, M. H., “Three-dimensional nanostructures by Direct Laser Etching of Si”, Applied Surface Science, pp.568-576, 1995
【15】Zayhowski, J. J., “Passively Q-switched Nd: YAG Microchip Lasers and Applications”, Journal of alloys and Compounds 303-304, pp.393-400, 2000
【16】Lewis, Gary K. Eric Schlienger., “Practical Considerations and Capabilities for Laser Assisted Direct Metal Deposition”, Materials and Design 21, pp.417-423, 2000
【17】Marjoribanks, P. R., Oettl, K. K., & Ness, I. S., “Laser Shaping of Photonic Materials: Deep-ultraviolet and Ultrafast lasers”, Applied Surface Science 154-155, pp.577-586, 2000
【18】Wehner. M, et al., “ Direct Writing of Gold and Copper Lines from Solutions”, Applied Surface Science 106, pp.406-411
【19】Kordas. K., et al., “Laser Direct Writing of Copper on Polyimide Surfaces from Solution” , Applied Surface Science 154-155, pp.399-404, 2000
【20】Stauter, C. ,Fontaine, J.& Engel, T., “Real-time Determination of the Amount of Removed Material during Short Pulses Laser Micromachining”, Applied Surface Science 96-98, pp.522-527, 1996
【21】Kordas, K, et al., “Laser direct writing of palladium on polyimide surfaces from solution”, Applied Surface Science 152, pp.149-155, 1999
【22】Sun, J., J. Longtin, P. & Norris, P. M., “Ultrafast Laser Micromachining of Silica Aerogels”, Journal of Non-Crystalline Solids 281, pp.39-47, 2001
【23】Bahnisch, R. et al., “Femtosecond Laser-based Technology for Fast Development of Micromechanical Devices”, Sensors and Actuators 74, pp.31-34, 1999
【24】 Tunna, C., J. Kearns, L. & Neill, A. W., “Micromachining of Copper Using Nd —YAG Laser Radiation at 1064, 532, and 355 nm Wavelengths”, Optics & laser Technology 33, pp.135-143, 2001
【25】Bhalla, K. et al., “Fire During the Use of Nd:YAG Laser”,
International Journal of Pediatric Otorhinolaryngology, pp.239-242, 2001
【26】Tan, B. et al., “Laser Drilling of Thick Material Using Femtosecond Pulse with a Focus of Dual-frequency Beam”, Optics & Laser Technology 35,pp.199-202, 2003
【27】Tokarev, V.N. et al., “Modeling of self-limiting Laser Ablation of Rough Surface: Application to the polishing of diamond films”, Diamond and Related Materials 4, pp.169-176, 1995
【28】Townsend, Peter and Olivares, jose., “Laser Processing Of Insulator Surface”, Applied Surface Science, pp.257-282, 1997
【29】Ozkan, A.M. et al., “Sequential multiple-laser-assisted Polishing of free-standing CVD diamond Structures”, Diamond and Related Materials 6, pp.1789-1798, 1997
【30】Shen, J. et al., “Surface Polish Characterization of Industrial Ti: Sapphire Laser Crystal Rods by Photopyroelectric Scanning Imaging”, Optical Materials 4, pp.823-831, 1995
【31】鄭劭家，高功率棒型Nd:YAG 雷射熱效應非敏共振腔之研究。中央大學，民國89。。
【32】丁勝懋，雷射工程導論 第四版，中央圖書出版社。
【33】楊國輝，黃宏彥，雷射原理與量測概論，民國91。。
【34】馬英俊譯，雷射，徐氏基金會，民國80。
【35】李有錚，田口式品質工程。科建管理顧問股份有限公司。
【36】邱彥錕，脈衝雷射之誘發電漿塵爆，民90。。
【37】張永順，Nd: YAG 脈衝雷射於三維微結構之研究，中正大學機械所，民國92。