臺灣博碩士論文加值系統

本研究以雷射沈積聚苯胺薄膜欲提升其導電度為目標。使用了兩種不同的靶材：(1)聚苯胺粉末溶於THF中所製得之靶材(2)以CSA摻雜聚苯胺粉末溶於THF中所製得之靶材；並以三種不同的沈積方式來做比較：第一種是以旋轉塗佈來製作聚苯胺薄膜，第二種是以準分子雷射沈積製作聚苯胺薄膜，第三種是以熱蒸鍍來沈積聚苯胺薄膜。以三種不同的沈積方式，並配合使用不同的基板及改變沈積溫度作一系列的探討，並以四點探針、紫外-可見光光譜及傅立葉紅外光轉換光譜證明並試著瞭解其所造成的原因。
其實驗結果顯示三種方式中：旋轉塗佈所得之薄膜電導值僅受其溶液的電導值影響，基板並不影響其所得之值；而雷射沈積聚苯胺薄膜於矽(111)則能提升電導值約2~4個冪次，其餘基板則較無明顯的增加；而熱蒸鍍所得之薄膜其電導值並無大幅度的增加，但相較於雷射沈積所得之薄膜其分子結構較近似於原分子。

目錄
摘要……………….………………………………………………………….I
謝誌………………………………………………………………………….II
目錄……………….…………………………………………….……….III
表目錄……………...………………………………………………...VI
圖目錄……………..…………………………………………………...VII
第一章 序論………………………………………………………………….1
1.1 前言……………………………………………………….……….1
1.2 薄膜沈積之簡介…………………………………………………..2
1.2.1 物理氣相沈積……………………………………………….2
1.2.2 化學氣相沈積……………………………………………….4
1.3 研究動機與目的…………………………………………………..6
第二章 文獻回顧與研究重點……………………………………………….7
2.1 導電性高分子……………………………………………………..7
2.1.1 導電高分子簡介…………………………………………….7
2.1.2 導電原理…………………………………………………...10
2.1.3 導電高分子聚苯胺………………………………………...11
2.1.4 聚苯胺的摻雜……………………………………………...13
2.2 準分子雷射光化學作用………………………………………….14
2.2.1 雷射之基本架構…………………………………………...14
2.2.2 準分子雷射之基本架構…………………………………...15
2.2.3 準分子雷射加工…………………………………………..16
2.2.4 準分子雷射光分解機制…………………………………..18
2.3 薄膜沈積─熱蒸鍍及雷射沈積………………………………….20
2.3.1 薄膜沈積原理……………………………………………..20
2.3.2 高分子薄膜製程…………………………………………...23
2.3.3熱蒸鍍沈積薄膜……………………………………………25
2.3.4 雷射沈積薄膜……………………………………………...25
2.3.5 影響薄膜沈積及導電度的因素…………………………...27
2.4 聚苯胺薄膜的應用……………………………………………….29
2.5 本文之傳承與創新……………………………………………….31
第三章 實驗架構、流程及量測原理………………………………………33
3.1 實驗設計…………………………………………………………33
3.2 實驗架構…………………………………………………………34
3.3 實驗流程…………………………………………………………36
3.3.1 實驗藥品…………………………………………………...36
3.3.2 實驗儀器…………………………………………………...37
3.3.3 基板清潔…………………………………………………...42
3.3.4 靶材製作…………………………………………………...42
3.3.5 薄膜沈積…………………………………………………...44
3.4 量測原理 ………………………………………………………..45
3.4.1 四點探針…………………………………………………..45
3.4.2 紫外光／可見光吸收光譜………………………………..46
3.4.3 傅立葉轉換紅外光譜……………………………………...47
第四章 實驗結果與討論……………………………………………………49
4.1 薄膜沈積之變數與電導值的關係……………………………….50
4.1.1 膜厚與電導值的關係……………………………………..50
4.1.2 薄膜製程與電導值的關係………………………………...52
4.1.3 沈積溫度與電導值的關係………………………………...54
4.2 紫外光-可見光光譜……………………………………………...55
4.3 傅立葉轉換紅外光譜分析……………………………………….59
4.4 分子量量測…………………………………………….…………64
第五章 結論與建議…………………………………………………………81
5.1結論………………………………………………………………...81
5.2未來建議…………………………………………………………...82
參考文獻…………………………………………………………………….84

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