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研究生:謝長浩
研究生(外文):Chang-Haw Hsieh
論文名稱:奈米定位控制系統之研究
論文名稱(外文):Study of Nanometer Positioning System
指導教授:余國瑞余國瑞引用關係
指導教授(外文):Gwo-Ruey Yu Dr.
學位類別:碩士
校院名稱:義守大學
系所名稱:電機工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:66
中文關鍵詞:奈米定位控制系統之研究
外文關鍵詞:Study of Nanometer Positioning System
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本文提出以基因演算法設計PID控制器,應用於奈米定位控制系統之研究。由於目前奈米技術在高精度定位控制應用上頗受重視,而壓電材料具有奈米級之精度、剛性和快速響應之特性,因此本研究以其作為奈米定位系統之致動器。PID控制器是目前工業界廣泛使用之控制器,而傳統PID控制器參數需透過專家經驗或利用試誤法、實驗法等調整。本文應用基因演算法之原理與運算模式,經由基因擇優複製、交配與突變之程序,搜尋PID控制器最佳參數,抑制壓電致動器磁滯效應影響,使系統步級響應達到奈米精度。

In this paper,the PID controller is designed using GAs and applied to the study of nanometer positioning system . Recently,the nanometer technique has been quite valued for high precision positioning system . The characteristics of piezoelectric materials are the nanometer precision,rigidity and high speed response . Therefore,the piezoelectric materials are utilized to be the actuator of nanometer positioning system . The PID controller is widely used in the industry. The parameters of traditional PID controller are regulated by the trail-and error method based on the expert’s experience. In this paper it uses the principle and operation of genetic algorithms to search the optimal parameters of PID controller Via the process of multiplication,crossover and mutation. Thus the Hysteresic effects of piezoelectric actuator are constrained such that the step response will reach nanometer precision.

目 錄
誌謝..……………………………………………………………………….ii
中文摘要………………………………………………………………I
英文摘要…………………………………………………………………..II
目錄……………………………………………………………………III
圖目錄…………………………………………………………………V
表目錄…………………………………………………………………VIII
第一章 緒論……………………………………………………………1
1.1前言 ………………………………………………………………1
1.2研究背景與動機 …………………………………………………1
1.3文獻回顧與探討 …………………………………………………3
1.4研究方法與步驟 …………………………………………………4
1.5論文架構 …………………………………………………………5
第二章 壓電致動器與PID控制系統 …………………………………6
2.1壓電效應原理 ……………………………………………….6
2.1.1 壓電材料的發現與應用 ………………………………………6
2.1.2 壓電致動器的分類與基本特性 ………………………………7
2.2壓電磁滯效應 ……………………………………………8
2.2.1 壓電致動平台 …………………………………………………8
2.2.2 壓電致動器的磁滯響應探討 ……………………………….10
2.3 PID控制器………………………………………………………17
第三章 最佳奈米定位控制系統………………………………………20
3.1基因演算法…………………………………………………………20
3.1.1基因演算法流程……………………………………………….20
3.1.2演算法原理……………………………………………………..21
3.2基於GA之最佳PID奈米定位控制………………………………..23
第四章電腦模擬………………………………………………………..25
4.1族群數目與世代的影響……………………………………………25
4.2交配率與突變率的影響……………………………………………33
4.2.1交配率對GAPID系統的影響…………………………………..33
4.2.2突變率對GAPID系統的影響…………………………………..37
4.2.3交配率與突變率對 GAPID系統的影響…………………….....41
4.2.4突變率與交配率對 GAPID系統的影響 ………………………44
4.3強健性之探討………………………………………………………48
第五章 結論…………………………………………………………..54
參考文獻……………………………………………………………….55

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