臺灣博碩士論文加值系統

本研究係探討顯微電子斑點干涉術，將一般之電子斑點干涉術架設增加一顯微取像設備，使電子斑點干涉術能量測到物體微觀表面之三維位移場，以適合於微小物品之表面局部區域變形量測。文中將以五步相移法分別做平面內位移場和平面外位移場之量測實驗，然後討論決定此干涉術成敗之各項重要因素。本研究並由光偏極性的觀點出發，探討物體表面的散射光與入射光之間的線偏極性相似程度，期能提高干涉條紋之對比。

This paper researches on the micro-field electronic speckle pattern interferometry, derived with assembling the conventional electronic speckle pattern interferometry and a microscopic setup. The micro-field electronic speckle pattern interferometry can measure the three-dimensional displacement of micro surface, so it is suited for measuring the deformation of local surface on a small object. The paper includes the five-step phase-shifting methods to measure in-plane and out-of-plane displacement. Then some important key points for the micro-field electronic speckle pattern interferometry are discussed. For increasing the fringe contrast, this paper analyzes the polarization relationship between lights scattered by object surfaces and their incident light.

目錄
中文摘要……………………………………………………………………i
英文摘要……………………………………………………………………ii
誌謝…………………………………………………………………………iii
目錄…………………………………………………………………………iv
圖目錄………………………………………………………………………vii
第一章 緒論 ………………………………………………………………1
1.1 前言……………………………………………………………………1
1.2 研究動機………………………………………………………………2
1.3 文獻回顧………………………………………………………………3
1.4 論文架構………………………………………………………………5
第二章 基本原理 …………………………………………………………7
2.1 平面內位移場之量測原理……………………………………………7
2.1.1 斑點場相加…………………………………………………………11
2.1.2 斑點場相減…………………………………………………………12
2.2 平面外位移場之量測原理……………………………………………13
2.2.1 斑點場相加…………………………………………………………16
2.2.2 斑點場相減…………………………………………………………17
2.3 相移干涉術……………………………………………………………18
2.3.1 三步相移法…………………………………………………………19
2.3.2 四步相移法…………………………………………………………20
2.3.3 五步相移法…………………………………………………………22
2.3.4 相移法之誤差………………………………………………………26
2.4 亮度平均處理…………………………………………………………26
2.5 相位展開………………………………………………………………26
2.5.1 路徑相依型相位展開技術…………………………………………27
2.5.2 路徑獨立型相位展開技術…………………………………………28
2.5.3 相位展開前之濾波…………………………………………………28
2.6 提高干涉條紋對比之物光之偏極性要求……………………………29
第三章 實驗架設與結果 …………………………………………………31
3.1 平面內位移場之量測實驗……………………………………………31
3.2 平面外位移場之量測實驗……………………………………………35
第四章 實驗結果討論 ……………………………………………………40
4.1 斑點在平面上成像之尺寸……………………………………………40
4.2 相移圖中之無效資料點產生的原因…………………………………40
4.3 影像平面式全像干涉術之特點………………………………………40
4.4 斑點於物表之局部亮暗分佈造成的影響……………………………42
4.5 兩道光良好干涉之條件………………………………………………42
4.5.1 同調性………………………………………………………………42
4.5.2 光強比………………………………………………………………43
4.5.3 偏極性………………………………………………………………44
第五章 物光之偏極性探討 ………………………………………………45
5.1 物光為多方向漫射……………………………………………………45
5.2 物光為多方向反射……………………………………………………46
5.2.1 介電物質的多方向反射……………………………………………46
5.2.2 金屬物質的多方向反射……………………………………………48
5.3 物光為多方向繞射……………………………………………………50
5.3.1 介電物質的多方向繞射……………………………………………50
5.3.2 金屬物質的多方向繞射……………………………………………53
第六章 結論與展望 ………………………………………………………56
6.1 結論……………………………………………………………………56
6.2 未來展望………………………………………………………………57
參考文獻……………………………………………………………………58

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