本研究主要目的乃是希望發展一製程簡單之多通道光開關元件，藉由光學軟體模擬整體光學系統的效率。關於光開關元件的製作，本研究先進行致動角度與光線水平位移關係之理論分析，接著利用UV-LIGA的技術搭配SU-8厚膜光阻製作微結構。 在致動機制方面，本研究以DSP控制板結合電壓放大器來驅動壓電塊材，透過壓電塊材的位移輸出推動鏡面結構。由於壓電致動具有小範圍精度高且轉換速度快的優點，因此控制輸入電壓便可精準改變其致動角度，使光線經反射後有數個不同位置，於此些位置上架設光纖便可作多通道的切換，當致動器位移越大或是距轉軸越近，鏡面偏轉角度與光線水平位移可進一步擴大，適合1×N的光路切換。

The main goal of this research is develop a novel concept for the multi-channel optical switch that can be fabricated by a relatively simple process. Theoretical analysis regarding the dependency of the horizontal displacement of the reflective light on the rotating angle of the switch body was conducted first. The UV-LIGA technique was then implemented to make the mirror structure on SU-8 photoresist. The mirror structure was actuated by a PZT actuator that was controlled by a digital signal processor (DSP) based controller such that precise displacement can be conducted. Since the PZT actuator possesses advantages such as precise positioning and fast response, the rotating angle of the mirror structure can be actually controlled. It turns that the reflective light can be placed at multi-positions. The proposed novel device can be implemented as an 1×N optical switch.

目錄
摘要……………………………………………………………………….I
目錄…………………………………………………………………....III
圖目錄…………………………………………………………………...V
表目錄………………………………………………………………....VIII
第一章 緒論……………………………………………………………..1
1.1前言……………………………………………………………......1
1.2論文大綱………………………………………………………......11
第二章 光開關設計原理………………………………………………..12
2.1 致動原理……………………………………………………….....12
2.2 多通道光開關設計原理……………………………………….....13
2.3 光開關元件製作原理………………………………………….....16
2.3.1 UV-LIGA技術…………………………………………..........17
2.3.2 SU-8厚膜光阻………………………………………….........17
第三章 實驗製作方法…………………………………………………..20
3.1 光開關鏡面結構製作………………………………………….....21
3.2 轉軸製作……………………………………………………….....30
第四章 光開關元件與性能量測.........................................................33
4.1 元件外型量測………………………………………………….....33
4.2 致動機制……………………………………………………….....35
4.3多通道光開關系統整合………………………………………......37
第五章 光學模擬………………………………………………………..41
5.1 模擬架構……………………………………………………….....41
5.2 模擬步驟……………………………………………………….....41
5.3模擬結果與討論………………………………………………......49
第六章 結論……………………………………………………………..50
6.1 結論…………………………………………………………….....50
6.2 未來發展……………………………………………………….....51
參考文獻………………………………………………………………...52
附錄A…………………………………………………………………....55

[1] C. Marxer, C. Thio, M. A. Gretillat, N. F. de Rooij, R. Battig, O. Anthamatten, B. Valk and P. Vogel, “Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications”, Journal of Microelectromechanical Systems, vol. 6, no. 3,pp. 277-285 (1997)
[2] C. Marxer and N. F. de Rooij, “Micro-opto-mechanical 2×2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation”, Journal of lightwave Technology, vol. 17, no. 1, pp. 2-6 (1999)
[3] A. A. Yasseen, J. N. Mitchell, J. F. Klemic, D. A. Smith and M. Mehregany, “A rotary electrostatic micromotor 1×8 optical switch”, IEEE Journal of Selected Topics in Quantum electronics, vol. 5, no. 1, pp. 26-32 (1999)
[4] Y. W. Yi and C. Liu, “Magnetic actuation of hinged microstructures”, IEEE Journal of Microelectromechanical Systems, vol. 8, no. 1, pp. 10-17 (1999)
[5] H. Toshiyoshi and H. Fujita, “Electrostatic micro torsion mirrors for an optical switch matrix”, Journal of Microelectromechanical Systems, vol. 5, no. 4, pp. 231-237 (1996)
[6] M. Hoffmann, D. Nusse and E. Voges, “Electrostatically actuated moving-fibre switch”, 2002 IEEE/LEOS International Conference, pp. 111-112 ( 2002)
[7] R. T. Chen, H. Nguyen and M. C. Wu, “A low voltage micromachined optical switch by stress-induced bending”, Micro Electro Mechanical Systems,1999. MEMS '99. Twelfth IEEE International Conference, pp. 17-21 (1999)
[8] http://www.bell-labs.com/news/1999/february/23/1.html
[9] L. Y. Lin, E. L. Goldstein and R. W. Tkach, “ Free-space micromachined optical switches for optical networking”, IEEE Journal of Selected Topics in Quantum electronics, vol. 5, no. 1, pp. 4-9 (1999)
[10] H. Toshiyoshi, D. Miyauchi and H. Fujita, “Electromagnetic torsion mirrors for self-aligned fiber-optics crossconnectors by silicon micromachining”, IEEE Journal of Selected Topics in Quantum electronics, vol. 5, no. 1, pp. 10-17 (1999)
[11] 沈聖智， “微型高強度磁驅式致動器及關鍵光學元件之研製”，國立清華大學工程與系統科學研究所博士論文 (2002)
[12] M. Hoffmann, P. Kopka and E. Voges, “Bistable micromechanical fiber-optic switches on silicon”, 1998 IEEE/LEOS Summer Topical Meeting, pp. 31-32 (1998)
[13] S .J. Kim, Y. H. Cho, H. J. Nam and J. U. Bu, “ Piezoelectrically pushed rotational micromirrors for wide-angle optical switch applications”, Micro Electro Mechanical Systems, IEEE The 16th Annual International Conference, pp. 263-266 (2003)
[14] M. Makihara, M. Sato, F. Shimokawa and Y. Nishida, “Micromechanical optical switches based on thermocapillary integrated in waveguide substrate”, Journal of lightwave Technology, vol. 17, no. 1, pp. 14-18 (1999)
[15] J. Skinner and C. H. R. Lane, “A low-crosstalk microoptic liquid crystal switch”, IEEE Journal of Selected Areas in Communications, vol. 6, no. 7, pp. 1178-1185 (1988)
[16] L. T. Romankiw, “A path: from electroplating through lithographic masks in electronics to LIGA in MEMS”, Electrochimica Acta, vol. 42, pp. 2985-3005 (1997)
[17] 池田拓郎著， 陳世春譯著， “基本壓電材料學”， 復漢出版社(1985)