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研究生:劉鴻儒
研究生(外文):Hung-Ru Liu
論文名稱:壓電驅動之多通道光開關之設計與製作
論文名稱(外文):Design and Fabrication of Multi-Channel Optical Switch Actuated by Piezoelectric
指導教授:王國禎
指導教授(外文):Gou-Jen Wang
學位類別:碩士
校院名稱:國立中興大學
系所名稱:機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:55
中文關鍵詞:光開關壓電驅動多通道
外文關鍵詞:Optical SwitchPiezoelectricMulti-Channel
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本研究主要目的乃是希望發展一製程簡單之多通道光開關元件,藉由光學軟體模擬整體光學系統的效率。關於光開關元件的製作,本研究先進行致動角度與光線水平位移關係之理論分析,接著利用UV-LIGA的技術搭配SU-8厚膜光阻製作微結構。 在致動機制方面,本研究以DSP控制板結合電壓放大器來驅動壓電塊材,透過壓電塊材的位移輸出推動鏡面結構。由於壓電致動具有小範圍精度高且轉換速度快的優點,因此控制輸入電壓便可精準改變其致動角度,使光線經反射後有數個不同位置,於此些位置上架設光纖便可作多通道的切換,當致動器位移越大或是距轉軸越近,鏡面偏轉角度與光線水平位移可進一步擴大,適合1×N的光路切換。

The main goal of this research is develop a novel concept for the multi-channel optical switch that can be fabricated by a relatively simple process. Theoretical analysis regarding the dependency of the horizontal displacement of the reflective light on the rotating angle of the switch body was conducted first. The UV-LIGA technique was then implemented to make the mirror structure on SU-8 photoresist. The mirror structure was actuated by a PZT actuator that was controlled by a digital signal processor (DSP) based controller such that precise displacement can be conducted. Since the PZT actuator possesses advantages such as precise positioning and fast response, the rotating angle of the mirror structure can be actually controlled. It turns that the reflective light can be placed at multi-positions. The proposed novel device can be implemented as an 1×N optical switch.

目錄
摘要……………………………………………………………………….I
目錄…………………………………………………………………....III
圖目錄…………………………………………………………………...V
表目錄………………………………………………………………....VIII
第一章 緒論……………………………………………………………..1
1.1前言……………………………………………………………......1
1.2論文大綱………………………………………………………......11
第二章 光開關設計原理………………………………………………..12
2.1 致動原理……………………………………………………….....12
2.2 多通道光開關設計原理……………………………………….....13
2.3 光開關元件製作原理………………………………………….....16
2.3.1 UV-LIGA技術…………………………………………..........17
2.3.2 SU-8厚膜光阻………………………………………….........17
第三章 實驗製作方法…………………………………………………..20
3.1 光開關鏡面結構製作………………………………………….....21
3.2 轉軸製作……………………………………………………….....30
第四章 光開關元件與性能量測.........................................................33
4.1 元件外型量測………………………………………………….....33
4.2 致動機制……………………………………………………….....35
4.3多通道光開關系統整合………………………………………......37
第五章 光學模擬………………………………………………………..41
5.1 模擬架構……………………………………………………….....41
5.2 模擬步驟……………………………………………………….....41
5.3模擬結果與討論………………………………………………......49
第六章 結論……………………………………………………………..50
6.1 結論…………………………………………………………….....50
6.2 未來發展……………………………………………………….....51
參考文獻………………………………………………………………...52
附錄A…………………………………………………………………....55

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