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研究生:鄭維金
研究生(外文):Jeng Wei Jin
論文名稱:半導體製程排氣風管細水霧防火效能評估之研究
論文名稱(外文):Assessment of Fire Protection Performance of Water Mist Applied in Exhaust Ducts of Semiconductor Fabrication Process
指導教授:雷明遠雷明遠引用關係陳俊勳陳俊勳引用關係
指導教授(外文):Alec M.-Y. LeiChen Chun Hsun
學位類別:碩士
校院名稱:國立交通大學
系所名稱:產業安全與防災學程碩士班
學門:環境保護學門
學類:環境防災學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:100
中文關鍵詞:製程排氣風管性能式設計細水霧系統滅火效能
外文關鍵詞:Process Exhaust PipePerformance-Based DesignWater Mist SystemFire Protection Performance
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隨著半導體工業的持續發展、製程設備技術不斷推陳出新,以及國際化競爭壓力。如何使高投資且密集的半導體廠房更安全、穩定、效率高、又兼具環保設計功能?誠然是各公司風險控制上重要思索的課題。環顧世界先進國家逐漸採用新技術新觀念的性能式設計(Performance-Based Design,簡稱PBD),來強化本身防火安全工程(FSE)等預防概念,評估防火設施的性能,確保防火設施的有效運作,於火災發生時提供足夠生命財產保障。基於此,半導體業者也從不吝於防災及防火安全上硬體設備做投資,並持續加強廠房內潛藏火災危害防制改善,彌補條件不足,進而透過效能評估、模擬驗證..,期能找出最適化的設計,供半導體廠房擇其應用,亦提供解決問題的途徑。
本論文研究針對為國內某半導體廠公司製程排氣風管設置細水霧系統做滅火效能評估研究,以實務案例分析,進行電腦模擬情境、滅火效能比較,實場測試試驗…,檢視細水霧滅火系統之有效性,找出最佳效能的組合(如水量或噴頭間距調整)及滅火時機,以提昇系統達到應有的滅火效能。研究發現,實際與滅火相關的水量分佈、水滴粒徑、噴頭間距與排氣速度、可燃物熱釋率之空間分佈、阻礙物、迴風狀況,確實都會影響火場燃燒之變化。細水霧系統設計需依火場、特定場合、及目的而做調整。也顯示了它可應用於排氣風管中確實足以達到防火抑制上安全需求,有效降低危害風險,達到滅火效能。不管實場測試或電腦模擬方面驗證,(條件:風管流速2m/s、水壓100bar,與撒水相較),結果均指向肯定風管細水霧系統能瞬時降溫、抑制管路溫度的效果,防止排氣風管火災持續蔓延。詳情請參閱,論文研究結果。
As facing the pressures from the continuous development of semiconductor industry, renew of process tool technology, and the trend of international competition, how to make the high cost semiconductor fabrication plant be safer, stable, efficient, and environmental friendly designed is an issue of importance in risk control for every semiconductor company. As being seen that advanced countries have gradually adopted the new technologies and new thoughts about the Performance-Based Design (PBD) to enhance the prevention concept of fire safety engineering (FSE), to evaluate the performance of fire protection facilities, to ensure that the fire protection utility can work effectively to provide life and property protection in case of fire. Therefore, the semiconductor companies never hesitate on investing fire protection hardware and improving the control of potential fire hazard in the fab and Furtherance they have been trying to identify the most appropriate design for existing fab through the performance evaluation and modeling methods that paving the any for resolving the problems.
This research studies the fire suppression efficiency of water mist system on the process exhaust pipe of one semiconductor manufacturing company. The research was done through case study, computer modeling, fire fighting efficiency comparison, and field test to review the validity of water mist fire suppression system, the combination (such as amount of water and spacing between sprinkler heads) for best performance, and the suitable timing for extinguishing the fire to improve the system to the required fire suppression efficiency. The research found that the water distribution, droplet diameter, distance in between and exhaust speed, layout of combustibles’ heat release rate, obstructions, return air condition will all affect the fire burning. The design of water mist system should be adjusted with the scene of a fire, specific occasion and purpose. This research also shows how it can be applied in the exhaust pipe to actually meet the safety requirement of fire suppression, to effectively reduce the hazardous risk, and meet the fire fighting performance.Both field tests and computer modeling proved that the exhaust water mist system can immediately cool and control the temperature of the pipe and prevent the exhaust pipe fire from spreading. Please see chapter for detail research result.
中文摘要I
AbstractII
誌謝IV
目錄V
表目錄VII
圖目錄VIII
第一章 緒 論1
1.1 前言1
1.2 研究動機及目的1
1.3 研究範圍4
1.4 研究方法與步驟4
第二章 文獻探討10
2.1 細水霧系統之發展與研究10
2.1.1 細水霧發展的歷史和演進10
2.1.2 細水霧系統之應用技術介紹12
2.2 現行半導體廠排氣風管防火規範檢討19
2.3 國內外排氣系統火災發生災害案例22
第三章 使用工具介紹25
3.1 重大潛在危害風險評估分析方式(PHA+HAZOP)25
3.1.1半導體業相對危害等級分析(PHA)25
3.1.2危害及可操作性分析(HAZOP,Hazard and Operability Studies)27
3.2 電腦模擬平台FDS & Firedass軟體介紹30
第四章 性能設計案例分析34
4.1性能設計(Performance-Based Design,簡稱PBD)34
4.2性能設計案例分析38
4.2.1定義計劃範圍38
4.2.2確立目標39
4.2.3定義目標39
4.2.4發展性能要求40
4.2.5發展火災情境及設計火災40
4.2.6發展試驗設計41
4.2.7a評估試驗設計44
4.2.7b選擇符合性能要求的設計、c.修改設計或目的46
4.2.7d選擇最終設計46
4.2.8準備性能設計文件及報告47
第五章 實場測試與驗證48
5.1細水霧系統基本試驗48
5.2風管火災全尺寸實驗51
5.3細水霧與傳統式撒水防火效能比較60
5.4 Firedass分析與驗證62
5.5實場測試與電腦模擬之比較與分析91
第六章 結論與建議93
6.1結論93
6.2建議94
參考文獻96
附錄一 細水霧噴頭測試報告98
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