臺灣博碩士論文加值系統

摘要

柴式單晶生長法是目前生長塊狀單晶最快速、最經濟且大尺寸的單晶生長法之一，也是光電及半導體產業最常使用的單晶生長法。而鈮酸鋰晶體也是目前光電晶體中最常使用的光電材料之一，已有多年的研究歷史。本實驗設計一套柴式生長爐生長塊狀氧化物單晶，我們選擇以鈮酸鋰為題，來達成柴式系統生長品質佳且等直徑之氧化物晶體，為實驗的目標。
研究過程中，我們使用Femlab軟體及實驗量測來分析高溫爐體內部的熱流場特性；在晶體生長的過程中，我們利用坩堝上推的機制抑制熔湯液面的溫度擾動，以及坩堝稱重裝置來達成晶體等直徑生長的效果，過程中也針對溫度參數以及晶體轉速上對於晶體生長的影響作系統的整理及改善，並且成功地生長出等直徑且品質佳的鈮酸鋰晶體，並以此套系統生長出摻雜RuO2及MgO的鈮酸鋰單晶。

目錄

摘要 Ⅰ
誌謝 Ⅱ
目錄 Ⅲ
圖表目錄 Ⅴ
符號說明 Ⅷ
第1章 緒論 1
1.1 前言 1
1.2 鈮酸鋰性質與結構 2
1.2.1 鈮酸鋰性質 2
1.2.2 鈮酸鋰結構 3
1.3 柴式單晶生長法 4
1.3.1 晶體直徑控制 5
1.3.2 熱場與晶體生長 6
1.3.3 流場與晶體生長 7
1.4研究動機與目的 8
第2章 生長設備及流程 10
2.1 前言 10
2.2 實驗設備 10
2.2.1 高溫爐 10
2.2.2 電源控制器 11
2.2.3 溫控裝置 11
2.2.4馬達控制系統 11
2.2.5 控制電腦 12
2.2.6 白金坩堝 12
2.2.7拉晶桿 13
2.2.8 稱重裝置 13
2.3 實驗流程 13
2.3.1 爐體溫度場 13
2.3.2 晶體生長 16
2.3.2.1 晶體生長前製程 16
2.3.2.2 晶體生長流程 18
2.3.3 晶體檢測 19
第3章 結果與討論 21
3.1 爐體溫度場與流場 21
3.1.1 溫度梯度量測 21
3.1.2 溫度場與流場之數值模擬 23
3.1.3 溫度梯度量測與數值模擬 23
3.2 晶體直徑控制 25
3.2.1 液面高度與坩堝內溫度場對於長晶的影響 25
3.2.2 空心問題 26
3.2.3 坩堝上推之晶體生長 27
3.2.4 坩堝稱重之晶體生長 29
3.2.5 坩堝上推與坩堝稱重之晶體生長 30
3.2.6溫度曲線對於晶體直徑的影響 32
3.3 晶冠放肩速率對於晶體生長之影響 33
3.4 晶體轉速對於生長界面的影響 34
3.5 鈮酸鋰摻雜RuO2與MgO之晶體生長 34
3.6晶體檢測 35
3.6.1 XRD檢測 35
3.6.2 X光單晶繞射檢測35
3.6.3 傅立葉轉換紅外線光譜儀(FTIR)檢測 36
第4章 結論 37
參考文獻 39

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