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研究生(外文):Huihsuan Chen
論文名稱(外文):A Novel Zoom Concave Grating
指導教授(外文):Jenq-Yang Chang
外文關鍵詞:MEMSConcave gratingBlazed grating
  • 被引用被引用:2
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  • 下載下載:20
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光纖通訊為了追求提升單一光纖之通道流量,會將一定範圍內之頻寬加以切割成更多頻道,而要將多項訊號混合分離到光纖,必須使用波長多工器(WDM)或是時間多工器(TDM)的觀念,鑑於目前波長多工器資料傳輸能力越來越強,而一般接收端並不需如此龐大的資料流,於是許多研究試圖整合波長多工器與時間多工器,假如光纖傳輸資料經過波長多工器分光之後,擁有M個頻道,欲將資料流按時間分配給N個接收端。則相當於幫每個頻道裝 的光學開關元件,因此需要裝 個光學開關元件,以經濟效益來看相當不經濟,因此本論文將針對如何將分光與光學開關整合在同一個元件上進行探討,由於凹面型光柵同時具有角色散能力與成像聚焦在焦點上的功能,因此不需在額外增加透鏡,並且由凹面型光柵的折射元件特性可以知道,如果改變凹面鏡曲率中心則聚焦點也會隨之改變,因此本論文將討論如何以微機電技術設計、製造、測試一變焦凹面型光柵來同時達成分光與光學開關功能。
With the continuous advance in optical technology, Wavelength division multiplexing (WDM) network will play an important role in wide area backbone networks. Optical wavelength switching, compared with optical packet switching, is a more mature and more cost-effective choice for optical switching technologies. Besides, the technology of time division multiplexing (TDM) in optical communication networks has been working smoothly for a long time.
WDM system can full utilize fiber bandwidth and increase transmission capacity that is the most acceptable structure in recent years. In this thesis, we present improved system performance using zoom concave grating. There are two classes of important research issues. The first class focuses on the concave grating can supply WDM with dispersion compensation and focusing image. The N-order diffracted signal light by the blazed grating is directed to the fiber of output and focused on spot size. The second class of problems focuses on the radius of curvature zoom. The change of curvature was made over to the focus point. The effect equals to a channel switch.
This study is important since the performance of existing networks can be improved by distribution of data flow rate properties of WDM technologies.
第1章 緒論 1
1-1 前言 1
1-2 文獻回顧與研究目的 4
1-3 本論文內容與架構 8
第2章 光學相關原理與設計 10
2-1 光柵介紹 10
2-2 火焰式光柵 16
2-3 凹面型光柵的特性 20
2-4 凹面型光柵曲率半徑改變之特性 25
2-5 入射波長與入射角、繞射角、聚焦點關係 29
第3章 致動器相關理論與設計分析 33
3-1 各類致動器比較 34
3-2 平移式靜電梳狀致動器理論分析 38
3-3 Smart製程與SOI製程探討 47
3-4 有限元素分析法分析 52
第4章 元件製程與量測 60
4-1 元件製程技術 60
4-2 元件驅動電路架設 60
4-3 變焦凹面型光柵力學特性量測與討論 60
4-4 凹面型光柵光學量測與討論 60
第5章 結論與未來展望 60
5-1 結論 60
5-2 未來展望 60
參考文獻….. 60
[1] Minowa, J, and Fujii, Y, ”Dielectric multilayer thin-film filters for WDM transmission systems”, Lightwave Technology, Journal of , Volume: 1 , Issue: 1 , Mar 1983 Pages:116 – 121
[2] Liu, K, and Wang, W.K, ”Misalignment distortion penalty in moderate-speed directly modulated WDM systems and its reduction using fiber Bragg grating lasers”, Photonics Technology Letters, IEEE , Volume: 9 , Issue: 12 , Dec. 1997 Pages:1649 - 1651
[3] Kawai, T, and Obara, H, ”Crosstalk reduction in N×N WDM multi/demultiplexers by cascading small arrayed waveguide gratings (AWG's)”, Lightwave Technology, Journal of , Volume: 15 , Issue: 10 , Oct. 1997 Pages:1929 – 1937
[4] Bayvel, P, and Gambini, “3000 km transmission of densely-spaced, 2.5 Gbit/s directly-modulated channels demultiplexed with a free-space concave grating”, Integrated Optics and Optical Fibre Communications, 11th International Conference on, and 23rd European Conference on Optical Communications (Conf. Publ. No.: 448) , Volume: 1 , 22-25 Sept. 1997 Pages:146 - 149 vol.1
[5] Yeung, K.L, “Efficient time slot assignment algorithms for TDM hierarchical and nonhierarchical switching systems”, Communications, IEEE Transactions on , Volume: 49 , Issue: 2 , Feb 2001 Pages:351 – 359
[6] Hutley, M. C, “Diffraction gratings”, London : Academic Press, 1982
[7] Tang, W.C, and Lim, M.G,” Electrostatic Comb Drive Levitation And Control Method”, Microelectromechanical Systems, Journal of , December 1992 Pages:170 – 178
[8] Zara, J. M, and Smith, S. W,”A micromachine high frequency ultrasound scanner using photolithographic fabrication”, Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on , Volume: 49 , Issue: 7 , July 2002 Pages:947 – 958
[9] W. H. Chu, and M. Mehregany, “Microfabricated Tweezers with a Large Gripping Force and a Large Range of Motion”, Solid-state Sensor and Actuator Workshop., Hilton Head, CA, Jun, 1994, pp 84 107-110.
[10] G. Greitmann, and R. A. Buser, “Tactile microgripper for automated handling of microparts,” Sensors and Actuators, A53, pp 410-415, 1996.
[11] L.Que, and J.S. Park, and Y.B. Gianchandani “Bent-beam electro-thermal actuators for highforce Applicators” , Micro Electro Mechanical Systems, MEMS ‘99. Twelfth IEEE International Conference on, pp. 17 –21, Jan. 1999
[12] J. Ok, and M. Chu, and C. J. Kim, ”Pneumatically driven microcage formicro - objects in biological liquid”, Micro Electro Mechanical Systems, 1999. MEMS '99, Orlando, FL, Jan, 1999, pp 459 –463.
[13] S. Bütefisch, V. Seidemann, and S. Büttgenbach, “Novel micro-pneumatic actuator for MEMS”, Sensors and Actuators A97-98, pp. 638-645, 2002.
[14] M. Kohl, E. Just, W. Pfleging, and S. Miyazaki, “SMA microgripper with integrated antagonism” , Sensors and Actuators., A83, pp 208-213, May 2000.
[15] Hirano, T, and Furuhata,”Design, fabrication, and operation of submicron gap comb-drive microactuators”, Microelectromechanical Systems, Journal of , Volume: 1 , Issue: 1 , March 1992
[16] Collins, J. G, and Giardini, W. J,” The influence of Young's modulus on roundness in silicon sphere fabrication”, Instrumentation and Measurement, IEEE Transactions on , Volume: 46 , Issue: 2 , April 1997 Pages:572 – 575
[17] Sharpe, W. N, and Jr, Bin Yuan,” Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon”, Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on , 26-30 Jan. 1997 Pages:424 – 429
[18]探微科技, SmartTM製程範例, 2003
[19] J.Y. Kim, and C. J. Kim,”Comparative study of various release methods for polysilicon surface micromachining”, Micro Electro Mechanical Systems, MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop (1997)
[20] Y. Fukuta, H. Fujita, and H. Toshiyoshi, “Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware”, Journal of Applied Physics, Vol.42, p.3690-3694 (2003)
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