臺灣博碩士論文加值系統

因為AlGaInN/AlGaN多重量子井結構之發光二極體的發光涵蓋從紫外光到紅外線的範圍，並且Ⅲ-N族的發光二極體有很好的發光效率，若是將三原色之發光二極體合併起來便可得到白光之發光二極體，但是氮化鎵之多重量子井結構的發光性質對於成長條件非常的敏感，例如改變成長溫度、氣體比例…等。本論文中之樣品為於一生長在兩吋之藍寶石基板上的四元量子井結構之發光二極體，且於同一樣品其發光範圍從黃光至藍光，本論文為藉由穿透式電子顯微鏡(TEM)，Ｘ光成份分析能譜(EDS)及陰極螢光(CL)來分析此多重量子井發光二極體之發光機制。由TEM以及EDS分析得知藍色螢光樣品相較黃色螢光樣品中量子井寬較寬，銦的濃度較高。由文獻資料相比較可推論為在成長AlGaInN樣品時，由於有溫度不均之原因導致在溫度晰度低之處，銦的沉積較多而量子井成長較寬之故。

The spectral range of quaternary AlGaInN/AlGaN MQWs extends from UV to IR. Nitride-based green and blue LEDs reveal a high efficiency for the further application. Integrating LEDs of three element colors can perform white light. The optical properties of GaN MQWs are very sensitive to the growth conditions of MQWs. The ununiformity is not fabrication desired but needs to prevent, which is necessary to understand and to precisely control through its growth condition for manufacture the LED. In this work the sample has a luminescence varied from orange to purple across the whole wafer. In this work, the correlations between optical and structural properties in these samples have been studied by means of Transmission Electron Microscopy (TEM), energy dispersive X-ray spectrometry (EDS), and cathodoluminescence (CL) measurements.

1.Introduction 1
2.Experiments 5
2-1 Sample Description 5
2-2The Preparing of TEM (Transmission Electron Microscope) Sample 6
2-3 Transmission Electron Microscopy (TEM) 8
2-4 High Resolution Transmission Electron Microscopy (HRTEM) 9
2-5 Energy Dispersive X-ray Analysis System (TEM EDS) 10
2-6 Cathodoluminescence (SEM CL 11
3.Results and Discussion 12
3-1 TEM & EDS characterization of sample V2 and V3 12
3-2 CL characterization of sample V2 and V3 15
3-3 HRTEM analysis of sample V2-3(blue) and V3-4(orange) 16
4.Conclusion 18
5.References 19
6.Appendix 23
7.Figure & Table Captions 24

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