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研究生:張晏蓉
論文名稱:不確定環境下半導體機台產能規劃分析
論文名稱(外文):Tool Capacity Planning Analysis Under Uncertain Environment in Semiconductor Manufacturing
指導教授:溫于平溫于平引用關係
指導教授(外文):Ue-Pyng Wen
學位類別:碩士
校院名稱:國立清華大學
系所名稱:工業工程與工程管理學系
學門:工程學門
學類:工業工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:英文
論文頁數:47
中文關鍵詞:需求不確定性半導體製造產能規劃機台產能規劃
外文關鍵詞:Demand uncertaintySemiconductor manufacturingTool capacity planning
相關次數:
  • 被引用被引用:6
  • 點閱點閱:202
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
半導體產業中機台設備的採購需要耗費龐大的資本,因此半導體廠商在採購新機台設備時面臨重大的投資決策。為了滿足顧客的需求,廠商必須進一步擴充產能添購機台設備。由於技術與產品快速的變化,要有效率地採購機台設備實在是件艱鉅的任務。本研究主要針對半導體產業機台設備管理問題,透過不同機台、產能限制進行產能擴充計畫。在考慮需求不確定環境下,加入COO成本模式作為單位生產成本、並考量產能不足成本與產能過剩成本,在多期數的條件下建立一套機台設備投資計畫。最後,我們針對產品種類、預算分配方式及需求的機率進行實驗,藉以觀察參數對於模式績效的影響。
In the semiconductor industry, machine tools purchases require an enormous amount of capital, which is approximate 60-70% of initial fab expenses for machine tools. Therefore the semiconductor manufacturing companies are faced on important capital investment decisions for the procurement of new types of machine tools for their facilities. In order to meet the forecast demand, the manufacturer may need to procure additional machine tools. In fact, it is a challenging task to procure machine tools efficiently because of rapid changes in technology and products. The thesis focuses on a machine tool management problem of semiconductor industry to determine tool planning using multiple types of machine tools producing various products. We will take into consideration the COO model as a unit cost, the capacity shortages, and capacity overflows simultaneously. In order to present investment decisions on procuring new machine tools and to examine the problem over multiple time periods within a single wafer facility, we analyze the tool capacity planning problem under uncertainty in demand and formulate the problem as a mixed integer problem to minimize the expected capacity shortage costs, capacity overflow costs, and production costs. Finally, we study the performance during different time periods to discuss different situation.
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16. Hood, S.J., Bermon, S., and Barahona, F., “Capacity Planning under Demand Uncertainty for Semiconductor Manufacturing,” IEEE Transactions on Semiconductor Manufacturing, 16(2), 273-280 (2003).
17. Hughes, R.A., and Shott, J.D., “The Future of Automation for High-Volumn Wafer Fabrication and ASIC Manufacturing,” Proceedings of IEEE, 74(12), 1775-1793 (1986).
18. Kotcher, R., and Chance, F., “Capacity Planning in the Face of Product-Mix Uncertainty,” Proceedings of the IEEE International Symposium on Semiconductor Manufacturing Conference, Santa Clara, California, 73-76 (1999).
19. Ku, C.K., “Research to Relationship of Global Capacity Constraints Resource and Single Product Capacity Constraints Resource,” Industrial Engineering, Chung Yuan Christian University, Chung-Li, Taiwan, R.O.C., Master Thesis (2001).
20. Lin, C.C., “Tool Requirements Analysis under Uncertain Environment in Semiconductor Manufacturing,” Graduate Institute of Industrial Engineering, National Taiwan University, Taipei, Taiwan, R.O.C., Master Thesis (2003).
21. Occhino, T.J., “Capacity Planning Model: The Important Inputs, Formulas, and Benefits,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference (2000).
22. Sohn, S.Y., and Moon, H.U., “Cost of Ownership Model for Inspection of Multiple Quality Attributes,” IEEE Transactions on Semiconductor Manufacturing, 16(3), 565-571 (2003).
23. Stafford, M., “A Product-Mix Capacity Model,” Technical Report ORP97-03, Graduate Program in Operations Research Technical Report Series, The University of Texas at Austin (1997).
24. Swaminathan, J.M., “Tool Capacity Planning for Semiconductor Fabrication Facilities under Demand Uncertainty,” European Journal of Operational Research, 120(3), 545-558 (2000).
25. Swaminathan, J.M., “Tool Procurement Planning for Wafer Fabrication Facilities: a Scenario-Based Approach,” IIE Transactions, 34, 145-155 (2002).
26. Uzsoy, R., Lee, C.Y., and Martin-Vega, L.A., “A Review of Production Planning and Scheduling Models in the Semiconductor Industry Part I: System Characteristics, Performance Evaluation and Production Planning,” IIE Transactions, 24(4), 47-60 (1992).
27. Wang, K.J., and Lin, S.H., “Capacity Expansion and Allocation for a Semiconductor Testing Facility under Constrained Budget,” Production Planning and Control, 13(5), 429-437 (2002).
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