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研究生:吳美慧
論文名稱:電場調諧鋯酸鉛鋇薄膜
指導教授:吳振名
學位類別:碩士
校院名稱:國立清華大學
系所名稱:材料科學工程學系
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:87
中文關鍵詞:微波調諧鋯酸鉛鋇鐵電薄膜
相關次數:
  • 被引用被引用:0
  • 點閱點閱:238
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本實驗利用化學液相沈積法(chemical solution deposition,CSD)在Pt/Ti/SiO2/Si基板上鍍製鋯酸鉛鋇(Pb1-xBaxZrO3,PBZ)順電相薄膜,就以下幾種參數去探討其對薄膜電性的影響:(1)改變鉛鋇比例:以x = 0.8、0.6、0.4成分去探討不同鉛鋇比例對電性有何影響,由結果得知其介電常數、調變值和優異值(FoM)隨著Ba含量的增加而降低,而x = 0.4 的PBZ薄膜,在熱處理溫度750℃有最佳的電性:在頻率100kHz下,介電常數約150,在頻率1MHz、外加電場475kV/cm下,調變值約45%, FoM值約60;(2)熱處理溫度:以x=0.4成分的PBZ薄膜,探討熱處理溫度從650~750℃對電性有何影響,由結果得知其介電常數、調變值和FoM值隨著熱處理溫度增加而增加,顯示薄膜結晶性越好,其電性也越佳;(3)不同膜厚:以鍍覆2、4、6、8層來改變薄膜厚度來探討其對介電常數和調變值有何影響,其薄膜厚度分別為0.12、0.21、0.3、0.4μm,由結果得知其介電常數和調變值大致上隨著膜厚增加而增加,FoM值卻降低,;(4)改變熱處理方式:以分層RTA,之後再進行爐管熱處理,探討不同的熱處理方式對介電常數和調變值有何影響,由結果得知其介電常數、調變值和FoM值隨著爐管熱處理溫度增加而增加,但其幅度比一般熱處理方式來得小,顯示影響電性的主要因素為RTA的溫度。
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