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研究生:曾子桄
研究生(外文):Tseng Tzu-Kuang
論文名稱:化學液相法(Chemicalsolutiondeposition)製備之BaPbO3氧化物薄膜電極
論文名稱(外文):BaPbO3 thin film prepared by Chemical solution deposition method
指導教授:吳振名
學位類別:碩士
校院名稱:國立清華大學
系所名稱:材料科學工程學系
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:93
中文關鍵詞:BaPbO3薄膜化學液相鍍膜法Pb1.05(Zr0.53Ti0.47)O3電阻率氧化物電極鐵電性
外文關鍵詞:BaPbO3 thin filmChemical solution depositionPb1.05(Zr0.53Ti0.47)O3electric resistivityoxide electrodeferroelectricity
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摘要

本研究利用化學液相鍍膜法(Chemical solution deposition),以醋酸為溶劑,製備BaPbO3薄膜(簡稱BPO),旋鍍在各種基板上,探討其高溫穩定性、表面微結構之差異:在SiO2/Si基板上,650oC以上BPO相消失。在Pt/Ti/SiO2/Si基板上,750oC以上BPO相消失。在Pt/TiN/Ti/SiO2/Si基板上,會有BaCO3雜相,750oC以上BPO相消失。在Pt/Ta/Si3N4/Si上,在高溫時BPO會與Ta反應成Ba2Ta2O7。除此之外,藉著鉛過量及添加其它元素,改善BPO薄膜之性質,發現鉛過量30%在白金鉭基板上,有助於BPO成相,對於白金鈦基板則否;添加Zn或Bi則可改善BPO薄膜微結構的緻密度及平整度。BPO薄膜的電阻率大約在2.5~3.5*10-5Ω.cm左右。

利用研究的BaPbO3薄膜作為Pb1.05(Zr0.53Ti0.47)O3的氧化物電極,與使用白金作為下電極的PZT比較兩者電性之差異。實驗結果顯示,以BPO作為PZT的氧化物電極,可降低PZT的結晶溫度,減少rosette微結構產生,提高殘存極化值和抗疲勞性。我們認為化學液相鍍膜法所製備的BPO薄膜,在鐵電材料的氧化物電極應用上,有極大的潛力。
表目錄
圖目錄
第一章 緒論…………………………………………………………….1
1-1 簡介…………………………………………………………………1
1-2 研究動機……………………………………………………………2
第二章 文獻回顧……………………………………………………….4
2-1 電極…………………………………………………………………4
2-1-1金屬電極……………………………………………………..4
2-1-2氧化物電極…………………………………………………..6
2-2 鉛酸鋇(BaPbO3)陶瓷……………………………………………….7
2-2-1 鉛酸鋇薄膜電極…………………………………………….7
2-2-2 鉛酸鋇電極於PZT鐵電材料的應用………………………11
2-3 其他氧化物薄膜電極之應用……………………………………...12
2-4 鐵電材料…………………………………………………………...15
2-4-1 鈣鈦礦結構………………………………………………...16
2-4-2 鋯鈦酸鉛的晶體結構及性質……………………………...17


第三章 實驗程序…………………………………………………….24
3-1 基板的準備………………………………………………………24
3-1-1 Pt/Ti/SiO2/Si 基板的準備………………………………...24
3-1-2 Pt/Ta/Si3N4/Si基板的準備………………………………..24
3-2 BaPbO3薄膜的製備………………………………………………25
3-2-1 BaPbO3 溶液之製作………………………………………25
3-2-2 BaPbO3 薄膜旋鍍…………………………………………26
3-2-3 BaPbO3 薄膜的熱處理……………………………………26
3-3 Pb(Zr,Ti)O3薄膜的製備…………………………………….…….27
3-3-1 Pb1.05(Zr0.53Ti0.47)O3 溶液之製作…………………………27
3-3-2 Pb1.05(Zr0.53Ti0.47)O3 薄膜旋鍍及熱處理…………………28
3-3-3 白金上電極之製作……………………………………….28
3-4 薄膜的性質量測………………………………………………….28
3-4-1 X-ray繞射分析……………………………………………28
3-4-2 SEM微觀結構及膜厚量測……………………………….28
3-4-3 ESCA(electron spectroscopy for chemical analysis)表面元素分析………………………………………………………..29
3-4-4 歐傑電子能譜儀分析…………………………………….29
3-4-5 電阻率分析……………………………………………….30
3-4-6 P-E 電滯曲線……………………………………………31
3-4-7 介電常數及散逸因子…………………………………......31
3-4-8 疲勞特性………………………………….……………….31
第四章 結果與討論…………………………………………….……..37
4-1 決定BaPbO3的烘烤溫度…………………………………….…..37
4-2 BaPbO3薄膜於不同基板上的高溫穩定性………………….….39
4-3 BaPbO3薄膜於不同基板上的表面微結構分析…………….….42
4-4 鉛過量對BaPbO3薄膜的影響……………………………….…..45
4-5 摻雜Zn對BaPbO3薄膜的影響…………………………….……48
4-6 添加Bi對BaPbO3薄膜的影響…………………………….…....49
4-7 BaPbO3薄膜電阻率………………………………………….….49
4-8 BaPbO3薄膜經過重複旋鍍的穩定性…………………….….....50
4-9 PZT薄膜以BaPbO3為底電極之應用…….……………….…...51
結論……………………………………………………………….……56
參考資料……………………………………………………….………58
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