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研究生:柯建仲
研究生(外文):Jian Zhong Ke
論文名稱:金屬電極之微間距放電現象研究
論文名稱(外文):Study of micro space electric discharging phenomenon between metal electrodes
指導教授:王培仁
指導教授(外文):Pei-Jen Wang
學位類別:碩士
校院名稱:國立清華大學
系所名稱:動力機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:83
中文關鍵詞:崩潰放電
外文關鍵詞:breakdowndischarge
相關次數:
  • 被引用被引用:1
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  • 下載下載:42
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中文摘要
隨著科技發展的日新月異,現今工業產品設計逐漸趨向微小化,尤以電力為動力源之各式產品設計中,其開關、斷路器及保險絲等基本元件,均為應用電氣接點原理所設計者;若電源高壓過高或控制電路短路故障,導致內部電崩潰現象發生時,將直接影響到開關之壽命及儀器之正常操作,甚而造成危險意外與損失。本論文根據Paschen’s Law之理論,進行探討尖形與平板形電極於數十微米間距下,使用一般金屬材料於直流高壓進行高壓崩潰放電現象;首先探討電極於微米級間距電崩潰問題,並著手規劃實驗方法與流程,裝置設備與實際進行電極微間距電崩潰實驗,藉由改變電極材料與間距等參數,探討各參數對高壓電崩潰之影響。
最終將前人實驗所得之崩潰電壓臨界值,與本論文實驗結果比較與探討誤差值與分析誤差原因,證實在電極間距5微米至35微米間,隨間距越大崩潰電壓呈逐漸升高之趨勢,故根據Paschen所提出之崩潰放電數學模型,確可預測電極之間的崩潰電壓與相關數據,達成本論文預期改善目前工業產品設計微小化趨勢下,追求高輸出效率而可能遇到介電破壞崩潰現象之目標,故能對未來產品設計上有實質參考價值及達成設計規格之效益。




關鍵辭:微米級間距、介電崩潰、放電現象。
ABSTRACT

As manufacture technology has been improved over the past few years, it is evident that the size of the components to be manufactured has been affected, and the aspiration to reduce the size of such components is going towards microcosmic. One of the problems is the electrode breakdown at electrode separations for less than a millimeter separation. At large separation, the behavior of the electrodes has been widely studied and is reasonably well understood. However, some fundamental problems have not been probably addressed such as maximum safe operating voltages and critical dimensions required at the small separations between various types of materials.

In this thesis, experimental methodology and procedures were implemented successfully, and the experimental apparatus employed for measuring the breakdown discharge data were established. The experimental results have been compared with the theoretical predictions on the breakdown voltage based upon the so-called Paschen’s Law. The law was used to derive a set of curves that display the breakdown voltage versus the pressure spacing products. Then, the breakdown phenomenon in the gap between the electrodes with various metals under DC high voltages were analyzed. A basic guide for industrial design has be developed based upon the tested model; and, the research results can be extended to exploring the safety of electric switches. Also, the results can serve as the references in the design of micro- and nanotechnology products.



Keywords: Micron-gap、Electric Breakdown、Discharge Phenomenon.
目 錄

中英文摘要 II
符號文字說明 IV
目錄 Ⅴ
表目錄 Ⅶ
圖目錄 VIII
第一章 緒論 1
1-1 研究動機 1
1-2 文獻回顧 2
1-3 研究目的 5
1-4 研究方法與步驟 6
第二章 基本理論介紹 16
2-1 崩潰放電原理 16
2-2 電漿基本原理 17
2-3 Paschen’s Law推導 20
第三章 實驗內容與規劃 29
3-1 實驗硬體架構 29
3-2 實驗內容規劃 31
第四章 實驗結果與討論 47
4-1 電極形狀設計 47
4-2 施加電壓與放電電流波形 48
4-3 崩潰電壓與電流 49
4-4 崩潰電壓與電極間距 50
4-5 實驗值與Dakin等人實驗值比較 51
第五章 結論 66
5-1 結論與討論 66
5-2 未來工作 68
參考文獻 69
附錄 71
參考文獻
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