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研究生:蔡明霖
研究生(外文):Julius M. Tsai
論文名稱:利用<111>晶片製造之新型光訊衰減器
論文名稱(外文):Fabrication and Design of variable optical attenuator utilizing <111> wafer
指導教授:方維倫
指導教授(外文):Weileun Fang
學位類別:博士
校院名稱:國立清華大學
系所名稱:動力機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:169
中文關鍵詞:光訊衰減器加速規電容感測雜訊
外文關鍵詞:Optical AttenuatorAccelerometerCapacitive SensingNoise
相關次數:
  • 被引用被引用:2
  • 點閱點閱:169
  • 評分評分:
  • 下載下載:30
  • 收藏至我的研究室書目清單書目收藏:0
自從電報、電話問世之後,人類第一次能夠以幾近於光的速度互相溝通。更有甚者,當光纖問世之後,大量的取代了傳統的電纜成為主要的遠距傳輸主幹,更進一步的將傳輸往量的方面延伸。然而光纖真正所能承載的傳輸量,相較於真正的使用量卻有一段相當大的差距。儘管光纖在使用做傳輸用途上具備有極大的頻寬、低損耗、價格低廉、輕量化、積集化、抗腐蝕、對雜訊以及電磁場干擾的免疫力以及保密性等優點,卻仍不能完全取代現有的電線電纜等傳輸線路,因真正的全光網路中,必須有能對光訊號直接做調變動作的元件以達事半功倍之效,而這一類的元件又多半以機械式的為主流。但傳統機械式的元件因體積龐大、反應速度慢且無法積集化,因此近年來有許多研究致力於以微機電(MEMS)的元件加以取代。由於微機電元件具有積集化、反應速度快的潛力,有逐漸取代傳統元件的趨勢。本研究將針對其中一種必需的元件—可調變光訊衰減器進行探討。

本研究在實行上參考各種可調變光訊衰減器的文獻,選擇具有反應快、功率低、動態範圍大以及低偏極化損失等優點的遮板效應。並以此調變原理實際設計一新型的可調變光訊衰減器,模擬其機械以及光學的特性,包括電壓與位移的關係、遮擋板與位移的關係以及光纖位置對插入損失的影響。同時善用單晶矽優異的機械特性配合前人開發的BELST製程,加以變化以適應製造此一元件,並於文中詳述變化後製程的特色與製程設計的重點。本文透過(1)機械系統以及(2)光學與機械系統耦合的量測實驗驗證本元件的性能。機械系統的量測共有三個主要項目,包括施加電壓對位移的關係、槓桿在施加靜電力之後的變形、動態響應以及疲勞測試。關於光學與機械系統耦合的量測重點為插入損失、反射損失以及動態範圍。
Ever since the invention of telegram and telephone, human beings for the first time have the ability to communicate with each other with the speed of light. Even further, the invention of fiber keeps pushing the communication from not just speed but also to quantity and quality. Although the fiber has advantages such as large bandwidth, low loss, low cost, lightweight, high integrity, anti-corrosion, information security and immunity to EM disturbance, the real capacity of fiber has never been reached due to the lack of efficient devices to manipulate light. In real optical network the mechanical components have been used on switching or attenuating light signals for a long time. But those traditional mechanical components are heavy and response slowly compared to the demands of modern desires. Therefore it is imperative to develop efficient devices for that purpose, and MEMS seems to point out a way. In this research, a novel variable optical attenuator has been proposed for further studies.

In this article, we have done literature surveys for all kinds of methodologies to attenuate light signals. And we concluded shutter-based MEMS VOA has the benefits of high speed, low power, large dynamic range and low polarization loss. By using shutter-based method, a novel VOA has been proposed with detailed mechanical and optical characteristic simulations including mechanical/optical static response and insertion loss of fiber positions and shutter positions. The device is fabricated with the BELST II process and detailed description of the process is recorded. Finally the novel VOA is characterized with mechanical static measurement, mechanical dynamic measurement, fatigue test, insertion loss, optical dynamic range and back reflection loss.
第一章 網路與光纖系統…………..…………………………………....1
1-1研究動機…………………..……………..………………….…..1
1-2網際網路架構…………………………………………….……..2
1-3光纖與光纖網路架構……………..….….………….…………..3
1-3.1光纖種類………….…..…………..…………….………...4
1-3.2傳輸模態…………………..…………………….………...5
1-3.3全光網路節點架構…………..……………………………7
1-3.4重要參數定義……………..……………………………..8
1-4研究目標……………..……..……………………….……….…9
1-5全文架構……………………...…….……………………….…10

第二章 光衰減器之設計與分析………..…………………….…….…19
2-1文獻回顧………….…………..……………………..…….…...19
2-1.1遮板效應式:………………………………………………..19
2-1.2聲光效應式:………………………………………….…….21
2-1.3模態效應式:………………………………………..………22
2-1.4材料效應式:………………………………………..………24
2-2設計架構………………...……………………………………..25
2-3光學性能分析…………………………………………….……27
2-3.1光纖距離與衰減量…….…….…………………….…….27
2-3.2遮擋板位置與插入損失…….….………………………..28
2-4機械性能分析…………………………………….……………30
2-4.1垂直式梳狀致動器………………...……………………31
2-4.2尺寸與剛性……………….…….……………..…………31
2-4.3穩定性分析……………….…………………..…………32
2-5實際尺寸設計…………………………………………..……...35

第三章 製程………………………..….……………………………….52
3-1製程概要……………….…………………………...………….52
3-2製造流程…………………….………………….…...…………53
3-2.1遮罩定義…………………..………………...…………..54
3-2.2矽深蝕刻…………………..………………...…………..54
3-2.3懸浮與濺鍍……………………………..…….…………56
3-2.4結構設計要點……………….…………...………….…..56
3-2.5各遮罩層的限制………………..………….….….……..56
3-3製造結果…………………….………………..…….….………57

第四章 量測結果………………….………………….………………..79
4-1機械性質量測………………..….……….…………………….79
4-1.1機械性質靜態響應…..…..….……………………….….80
4-1.2機械性質動態響應………………..……..………………81
4-1.3可靠度測試…………………....…………….…….……..82
4-2光學性質量測…………………………..…………….…………….83

第五章 結論…………………………….…..…………..…………….87
5-1 研究成果………………….………..…….…….…………….87
5-2 未來工作………………….……..………..…….………….88
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