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研究生:王嘉德
研究生(外文):Chai-De Wang
論文名稱:壓電音叉式原子力顯微鏡之模型建構與控制
指導教授:葉廷仁
指導教授(外文):Ting-Jen Yeh
學位類別:碩士
校院名稱:國立清華大學
系所名稱:動力機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:83
中文關鍵詞:原子力顯微鏡掃描探針顯微鏡懸臂樑壓電致動器壓電雙晶片壓電音叉壓電效應
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原子力顯微鏡(Atomic Force Microscopy,AFM)為奈米時代的一項重要量測工具。其主要的操作機制是利用光槓桿方式來量測一微小探針與樣品之間各種作用力的變化,藉以獲得高解析度的表面形貌圖。雖然此種光槓桿感測方式的靈敏度高,但是卻有調整與校正程序繁瑣的缺點,因此本研究主要的目的是利用可以同時執行致動與感測功能的壓電音叉式探針來取代光槓桿的感測方法,建立一簡便的原子力顯微鏡。在本論文中,吾人利用對壓電音叉式探針的模型建構,來探討音叉式探針的操作動態;並利用系統等效彈簧係數的改變來探討原子力的影響,最後設計具有強健性的控制器取代需要參數調整的PI控制器。
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