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研究生:張錦標
研究生(外文):CHANG, CHIN-PIAO
論文名稱:結合十六個Fabry-Perotetalons與PIN光偵測器之矽微光譜儀
論文名稱(外文):A 16-Channel Array-Type Microspectrometer Using Integrated Fabry-Perot Etalons and Lateral PIN Photodetectors
指導教授:黃瑞星黃瑞星引用關係
指導教授(外文):Huang, Ruey-Shing
學位類別:博士
校院名稱:國立清華大學
系所名稱:電機工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:79
中文關鍵詞:微光譜儀法羅里-佩洛光偵測器
外文關鍵詞:microspectrometerFabry-PerotPhotodetector
相關次數:
  • 被引用被引用:1
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  • 下載下載:32
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在本論文中描述矽微光譜儀的設計、製作及量測,光譜儀不論在科學、工業及消費性產品上都被廣泛地應用,而本論文的目的即是利用微機電系統的技術來開發積體化的微光譜儀,如此便可利用已成熟的半導體製程的優點:批次量產、微小化、低成本。
矽微光譜儀利用十六組不同共振腔長度的Fabry-Perot etalons(FPE),來達到過濾十六個波道的可見光,並配合Lateral PIN Photodetector來達成直接將光訊號轉換成電訊號;而在FPE的結構上是採用空氣為共振腔,並以銀分別為二個部份穿透的鏡面,而為了達到不同長度的共振腔,本論文利用二氧化矽薄膜為材質的微橋式結構會有出平面變形的特性,設計十六個不同長度的微橋式結構來達到不同高度的出平面變形,進而帶動低應力氧化矽薄膜與銀組成的鏡面,再與鍍上銀反射面的光偵測器組成FPE;完成的矽微光譜儀的面積為8.8mm×8.8mm,操作範圍為400nm至700nm。
In this paper, we describe a novel integrated array type microspectrometer based on Fabry-Perot etalons. The spectral analysis of visible light is achieved by an array of Fabry-Perot etalons with different resonance gaps. Each resonance gap is determined by the central deflection of prebuckled bridge when it is in the down position. In this design, the microspectrometer has 16-channels, each channel only allows one single peak of narrow wavelength band to pass. The fabrication of 16-channel can be done with only one lithography process without N subsequent etching steps. An array of photodetectors is also integrated beneath the Fabry-Perot etalons to form the microspectrometer.
目次

第一章 簡介-----------------------------------------------------------------------1
1.1 微機電系統(MEMS,Micro-Electro-Mechanical-Systems)-----------1
1.2 微機電式Fabry-Perot filter-------------------------------------------------1
1.3 新型矽微光譜儀-------------------------------------------------------------5
第二章 機械與光學理論--------------------------------------------------------7
2.1簡介-----------------------------------------------------------------------------7
2.2薄膜應力-----------------------------------------------------------------------7
2.3光學理論---------------------------------------------------------------------10
2.3.1簡介-------------------------------------------------------------------------10
2.3.2利用矩陣法計算多層膜之反射與透射光譜-------------------------11
2.3.3 操作於可見光波段的Fabry-Perot etalons及其各項參數--------15
2.3.4 反射鏡---------------------------------------------------------------------17
2.4 矽微光譜儀之數值模擬--------------------------------------------------18
第三章 微機電製造技術------------------------------------------------------23
3.1 矽微加工技術--------------------------------------------------------------23
3.2 BOE阻擋層-----------------------------------------------------------------24
3.3 PECVD TEOS oxide特性之研究----------------------------------------26
3.3.1 應力與沈積速率---------------------------------------------------------28
(a) TEOS流量的影響(樣品編號 19-23)------------------------------------29
(b) TMP流量的影響(樣品編號 28-32)-------------------------------------29
(c) 摻雜CF4的影響(樣品編號 33-38)--------------------------------------30
(d) 電漿功率的影響(樣品編號 24-27)-------------------------------------31
(e) 退火的影響(樣品編號19-27)--------------------------------------------32
(f) TEOS oxide薄膜在BOE與N2H4溶液中的蝕刻速率---------------34
第四章 矽微光譜儀之製作---------------------------------------------------38
4.1 簡介--------------------------------------------------------------------------38
4.2 光偵測器之製作-----------------------------------------------------------38
4.3 微橋式結構變形之測試--------------------------------------------------40
4.4 十六個不同出平面位移的氮化矽薄膜之製作-----------------------42
4.5 晶片黏合製程--------------------------------------------------------------48
4.6 打線與封裝-----------------------------------------------------------------51
第五章 矽微光譜儀之量測與討論------------------------------------------53
5.1 簡介--------------------------------------------------------------------------53
5.2 微橋式結構變形之測試--------------------------------------------------53
5.3光偵測器之量測------------------------------------------------------------55
5.4 十六個二氧化矽微橋式結構與低應力氮化矽薄膜之量測--------56
5.5 矽微光譜儀之量測--------------------------------------------------------59
5.5.1 量測儀器設置------------------------------------------------------------59
5.5.2 單光儀光譜之量測------------------------------------------------------62
5.5.3 微光譜儀元件量測------------------------------------------------------63
5.6 討論--------------------------------------------------------------------------73
第六章 結論與未來研究之建議---------------------------------------------79
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