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研究生:陳明男
論文名稱:缺口式薄盤超音波馬達之設計與分析
論文名稱(外文):Design and Analysis of Notched Thin-disk Ultrasonic Motor
指導教授:歐陽敏盛歐陽敏盛引用關係
學位類別:碩士
校院名稱:國立清華大學
系所名稱:工程與系統科學系
學門:工程學門
學類:核子工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:76
中文關鍵詞:缺口式薄盤超音波馬達三缺口110°-120°-130° 雙片挾持振動片驅動模態有限元素分析碳粉顯影
外文關鍵詞:notched type thin-disk ultrasonic motorthree notches 110°-120°-130° double plates’ vibratordriving modefinite element analysis methodcarbon power lithography
相關次數:
  • 被引用被引用:7
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本研究主要是針對出平面作動方向的新型缺口式薄盤超音波馬達設計其定子部振動片的結構,振動片是採用市售蜂鳴片(直徑31 mm,厚度0.2 mm)在其金屬背板施以幾何不對稱的缺口設計,使位於背板中心處的驅動螺釘可被激發產生出平面的橢圓位移運動,直接驅動軸心為2 mm的轉子高速轉動。同時利用結構導向的設計使驅動模態的頻率落在壓電材料的主機電共振區內,提升其工作性能。
所設計的振動片中以三缺口、缺口分佈角度為110°-120°-130° 及具雙片挾持的結構,其驅動頻率可與壓電材料的主機電共振區匹配,性能最佳。主要設計方法有:(a)以缺口取代螺釘固定,解除振動片周界的束縛,使能量集中於中心處的驅動螺釘,增加能量傳輸;(b)缺口分佈角度110°-120°-130° 的設計,可加強螺釘扭動的力量;(c)振動子底部結合另一較小薄盤的雙片夾持設計,使轉子運轉穩定且預壓範圍增大。利用有限元素分析法來模擬振動片的波動情形與驅動螺釘處橢圓位移運動的現象,確認所設計振動片之功能。同時以HP4194及實際驅動掃頻進行振動子的阻抗分析,檢驗此結構的驅動頻率是否落在壓電材料的主機電共振區內。並利用碳粉顯影與自製的測試平台進行振動片的性能測試,來驗證馬達的性能。
實驗結果顯示由所設計的三缺口110°-120°-130° 雙片挾持振動片製成的超音波馬達其性能與三相軸推超音波馬達[13]相較,前者耗電量減少33.3 % (1.5 W降至1 W),轉速增加約76.6 % (3000 rpm升至5300 rpm),轉矩加大約156 % (0.5 mN-m升至1.28 mN-m),且定子幾乎無溫升效應,整體性能大幅提升。本研究所開發的薄型馬達適合應用於薄型化的產品中,極具市場競爭潛力。
This study aims at developing an out-off-plane mode ultrasonic motor with notched thin-disk vibrator. The vibrator made of a piezo buzzer (diameter is 31 mm, thickness is 0.2 mm) with asymmetric notched design can be excited by electric to produce an out-off-plane elliptical displacement motion to directly actuate a rotor with 2 mm axis high-speed rotating above a driving screw located at vibrator’s center. Structure-oriented design of the vibrator can let the driving frequency located in the main electric-mechanical coupling area of piezo material and thus promote the motor’s performance significantly.
A thin disk with three notches distributed as an unequal triangle 110°-120°-130° and with another smaller plate below it composed together is proposed as best vibrator’s structural among many designs in this study. The design measures are: (a) take notches in place of fixed bolts to release vibrator’s boundary and concentrate energy on driving screw, (b) unequal triangle 110°-120°-130° notched design can promote the torque of driving screw, (c) combine another smaller plate under the vibrator can stabilize the operating direction and extend the preload range. Elliptical displacement motion on driving screw of the proposed vibrator is verified via numerical simulation by finite element analysis method. The mode frequency of proposed structure whether locates in the main electric-mechanical coupling area of piezo material is also checked by impedance analysis scanning with HP4194 and power amplifier. Finally, carbon powder lithography and experiment on performance of proposed motors are conducted to verify the design and simulation results.
Experiences show that the performance enhances outstandingly for the three notches 110°-120°-130° double plates’ ultrasonic motor proposed in this study as compared to those three phases out-off-plane mode ultrasonic motor proposed by Ouyang [13], for example the power consumption decreases from 1.5 W to 1 W (saving about 33.3 %), the rotating speed promotes from 3000 rpm to 5300 rpm (increasing about 76.6 %), and the torque enhances from 0.5 mN-m to 1.28 mN-m (promoting about 156 %). The developed motor with thin structure is suitable for applying to slender 3C products and has advantage of cost.
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