臺灣博碩士論文加值系統

摘要

本研究提出了一種推動流體的方法和控制系統，藉由此系統成功的控制且推動微流體。
本研究以簡化微流道製程為發展重心，以簡單的黃光製程製作檢測晶片，並以ICP製作母模、PDMS來翻模，以期達到大量生產的目的，更進一步結合其他功能，如電泳及PCR，以達到晶片實驗室(Lab on chip)的目標。
實驗中設計以電阻加熱使空氣產生膨脹，進而推動微流道中的流體，以達到定量並控制位置的效果，搭配各種不同設計的止流閥，再結合以Lab view控制溫度使流體不但能夠被推進定量，也可以後退和順序控制。
在電泳實驗上，採以光纖導引雷射並聚焦打擊在流道上，已經能成功的改善收光效果。

Abstract

The study provides control methods , control systems and control software for microfluidic devices that operate by moving discrete microdroplets.

The major purpose for this research is to simplify micro channel fabrication.In this research we use ICP(Inductively coupled plasma etcher) and PDMS (Polydimethy lsiloxane) to manufacture microchip which to reach production on large scale. For this purpose to reach Lab on chip we combine another function such as Electrophoresis and PCR even.

We design electrics resistance to drive microfluid. we also design various valve to quantitatively
determine. At last, we use commercial computer program Lab view 6.1 to control the location of microfluid.

The experiment of Electrophoresis, we use optical fiber to transmit laser and succeed improve the problem of receive fluorescence signal.

目錄
摘要
英文摘要
致謝
目錄
圖目錄
第一章緒論
1-1 前言 1

1-2 微製造技術 2

1-3 研究動機 3

1-4 文獻回顧 4
1-4-1電毛細管現象 5
1-4-2熱毛細管現象 6
1-4-3改變微管道的幾何形狀 6
1-4-4犧牲層製造與運用 8
1-4-5 PDMS翻模應用 9
1-4-6 去除犧牲層 10
1-4-7 SAM方法作為脫模法 11
1-4-8 微電阻加熱推動流體 12
1-4-9 整合多功能晶片 13
1-4-10 電泳檢測 14

第二章理論與設計分析
2-1 微流體物理論 17
2-1-1表面張力 17
2-1-2接觸角親水性及疏水性 18
2-1-3微流道幾何形狀 19
2-1-4電泳理論 20

2-2 微流道設計 22
2-2-1運用疏水及親水性質控制流體 23
2-2-2運用止流閥幾何形狀控制流體 24
2-2-3微流道系統設計分析 25
2-2-4排氣孔設計 27
2-2-5電阻設計 27
2-2-5晶片上光纖軌道的設計 28

2-3 微流道系統的製作與分析 29
2-3-1應用犧牲層製作流道 29
2-3-2犧牲層材料之種類 31
2-3-3溫度控制的重要性 32
第三章微流道系統製程
3-1 微機電製程介紹 35
3-1-1光罩之設計與製作 35
3-1-2去水烘烤 36
3-1-3光阻塗佈 37
3-1-4曝光 38
3-1-5曝後烤 39
3-1-6顯影 40

3-2 微系統製造其他製程 41
3-2-1感應耦合電漿蝕刻 41
3-2-2電阻 44
3-2-3PDMS 46

3-3電泳檢測系統 49
3-3-1電泳原理概述 49
3-3-2螢光檢測系統 50


第四章測試與結果討論
4-1 流道的製程演進 53
4-1-1SU-8開放流道製作 53
4-1-2 犧牲層製作流道 59
4-1-3 ICP製作母模 63
4-2 ICP深度與流道精確度的關係 67

4-3 楔型邊緣造成疏水現象 69

4-4檢測螢光的實驗 70

第五章未來展望 74

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