本研究的目的是設計並分析應用於切換不同衛星導航標準之微機電可調式微波濾波器。為了要能夠精準的在兩個頻段間切換，我們研究相關的濾波器設計原理與轉換技巧，並整理成一套適合微機電可調濾波器之設計流程。在比較各種濾波器的形式的優劣之後之後，我們決定採用薄膜製程、集總式的元件來製作可調式濾波器。我們分析了微機電元件的機械特性與微波特性以進行元件的設計。最後，我們實際製作出以微機電元件操作的可變頻濾波器，並且進行了相關的量測與分析。相關元件的電性模型也經由量測以及參數萃取的步驟一起完成。

This research addresses the design and the analysis of MEMS based tunable microwave filters for switching between different satellite navigation standards. In order to precisely switch between these two bands, theories and techniques for filter design are studied and organized. Thin-film lumped realization is our choice for constructing our tunable filter after considering pros and cons of all possible topologies. Mechanical and electrical behaviors of MEMS components are described and analyzed. MEMS switches equipped tunable filters are fabricated, measured, and analyzed. Measurement-based models for MEMS and other passive components are also built.

Abstract (English) i
Abstract (Chinese) i
Acknowledgments ii
Table of Contents iii
List of Tables v
List of Figures vii
Chapter 1 Introduction 1-1
1.1 MEMS FOR RF AND MICROWAVE APPLICATIONS 1-1
1.2 DEVELOPMENT OF RF MEMS 1-4
1.3 TUNABLE DEVICES FOR MULTI-BAND COMMUNICATION SYSTEMS 1-5
1.4 MOTIVATION 1-7
1.5 LITERATURE SURVEY 1-10
1.6 ORGANIZATION OF THIS WORK 1-13
Chapter 2 Theory of Filter Design 2-1
2.1 PRELIMINARY STUDY 2-2
2.2 DESIGN FILTERS FROM LOW-PASS PROTOTYPES 2-7
2.2.1 Impedance Scaling 2-8
2.2.2 Frequency Transformation 2-9
2.3 OBTAIN LPF PROTOTYPE BY INSERTION LOSS METHOD 2-13
2.4 FILTER DESIGN WITH IMPEDANCE INVERTERS 2-19
2.4.1 Circuit Transformation by Impedance Inverters 2-20
2.4.2 Scale The Circuit by A Pair of Impedance Inverters 2-26
2.5 PREDISTORTION TECHNIQUE FOR FILTER DESIGN 2-30
2.6 EVALUATION OF INDUCTORS 2-35
Chapter 3 Realization of Planar Thin-Film Filters 3-1
3.1 TOPOLOGIES FOR MEMS TUNABLE FILTERS 3-1
3.2 PHYSICAL LIMITATION OF PLANAR STRUCTURES 3-6
3.3 IMEC MCM-D TECHNOLOGY 3-11
3.4 MEASUREMENT AND ANALYSIS OF MCM-D TRIAL RUN 3-23
Chapter 4 Realization of MEMS Tunable Filters 4-1
4.1 DESIGN OF MEMS TUNABLE COMPONENTS 4-1
4.1.1 Electromagnetic modeling of MEMS components 4-1
4.1.2 Mechanical behavior of MEMS components 4-12
4.1.2.1 Static Analysis 4-15
4.1.2.2 Dynamic Analysis 4-17
4.1.2.3 Switching Time 4-19
4.2 MEDINA PROCESS FOR RF-MEMS DEVICES 4-22
4.3 MEASUREMENT AND ANALYSIS OF MEMS TUNABLE FILTERS 4-35
4.4 MEMS TUNABLE FILTERS BASED ON HYBRID CONSTRUCTION 4-49
Chapter 5 Conclusion 5-1
5.1 SUMMARY OF ACHIEVEMENT 5-1
5.2 FUTURE WORK AND APPLICATIONS 5-2
Reference R-1

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