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研究生:林耿賢
研究生(外文):Keng-Hsien Lin
論文名稱:平面磁浮平台系統模擬與控制器設計
論文名稱(外文):Simulation and Controller Design of Magnetic-levitated Platform System
指導教授:陳永耀陳永耀引用關係
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:電機工程學研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:103
中文關鍵詞:平面磁浮動態模擬複合式控制
外文關鍵詞:Magnetic-levitatedHybrid controldynamic simulation
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高科技產業持續發展,尤其是半導體製程之精密度須不斷提昇,因此IC製造場所必須保持乾淨、無干擾的狀態,使得製程設備之無塵要求亦不斷增加。本論文針對工業發展趨勢,進行平面磁浮系統之智慧型複合控制方法研究。主要之目標在以智慧型複合式控制方法達成平面磁浮精密定位之任務。
由於在磁浮系統中,任一個磁性物體在靜態磁場中都無法得到一個穩定的狀態,除非是加上適當的控制才能達到所要求的成果,因此磁浮平台系統必須根據回授控制原理,用電流產生磁場來控制其不穩定的天性。本論文藉著建立準確的磁浮動態模擬系統,嘗試各種載具及控制器的設計,以期達到控制載具懸浮和運動的目標。研究重點為:
1. 藉由動態模擬系統分析載具的運動行為和磁浮系統的特性
2. 嘗試各種載具及控制器的設計
High technology develops continuously. So the precision of semiconductor must promote continuously especially. This makes the requirement for ducting off from semiconductor foundry increases constantly. The thesis to this industrial trend has developed the intelligent hybrid control of the level magnetism float system. The goal is that using the intelligent hybrid control method to reach the task of orientation in the Magnetic-levitated system.
Because in the Magnetic-levitated system, any magnetic object is all unable to get a steady state in the static magnetic field, unless add proper control and could reach the achievement required , the Magnetic-levitated system must be according to tickling the principle of controlling that the magnetism floats, produce the magnetic field to control its unstable natural instincts with the electric current. This thesis is making use of the simulation system of the attitude of setting up accurate magnetism to float, try the designs of different carrier and the controller , is in the hope of reaching the goal with suspending and movement of carrier by control. The thesis can be summarized as:
1. Analyzes characteristic of the the Magnetic-levitated system and the dynamic behavior by the dynamic simulation system.
2. Try the designs of different carrier and controller.
第一章 緒論---------------------------------------------1
1.1 研究動機及背景------------------------------------1
1.2 文獻回顧------------------------------------------2
1.2.1 第一類型:帶有直流電磁鐵的吸力性磁浮軸承--------2
1.2.2 第二類型:帶有混成磁鐵的吸力性磁浮軸承----------3
1.2.3 第三類型:帶有直流電磁鐵的斥力型磁浮軸承--------4
1.2.4 第四類型:永久磁鐵斥力型磁浮系統----------------5
1.2.5 第五類型:帶有永久磁鐵的斥力型磁浮軸承----------7
1.3 論文架構------------------------------------------8
第二章 基本電磁理論與磁浮系統架構-----------------------9
2.1 基本磁力學理論------------------------------------9
2.1.1 馬克斯威爾方程式--------------------------------9
2.1.2 真空中的磁場-----------------------------------10
2.1.3 畢歐沙伐定律-----------------------------------10
2.1.4 勞倫茲力---------------------------------------11
2.2 永久磁鐵的基本特性-------------------------------12
2.2.1 磁化曲線---------------------------------------12
2.2.2 磁性材料---------------------------------------13
2.2.3 常見的永久磁鐵---------------------------------14
2.3 平面磁浮系統之規劃架構---------------------------15
2.3.1 平台及載具設計---------------------------------15
2.3.2 載具與平台的設計概念---------------------------19
第三章 磁浮動態模擬系統之建構--------------------------22
3.1 模擬系統建立的目的及原理-------------------------22
3.2 磁場的模擬與分析---------------------------------23
3.2.1 單一電磁鐵線圈影響範圍-------------------------24
3.2.2 電磁鐵線圈加成性的討論-------------------------26
3.2.3 磁路分析的討論---------------------------------29
3.3 以曲線擬合求電磁鐵線圈的數學模型-----------------31
3.3.1 以基因演算法搜尋不同基底-----------------------33
3.3.2 永久磁鐵所受磁力與激磁電流之關係---------------39
3.3.3 以多個磁偶極矩模擬一個永久磁鐵-----------------40
3.3.4 驗證作用力的準確性-----------------------------41
3.4 完成平台的動態模擬系統---------------------------44
第四章 平面磁浮平台的動態模擬及分析--------------------46
4.1 模擬載具在磁浮平台中的靜態作用力-----------------46
4.1.1 載具x方向偏移與作用力關係----------------------46
4.1.2 載具45度方向偏移與作用力關係-------------------48
4.1.3 載具對y軸偏轉與作用力關係----------------------50
4.1.4 載具對z軸偏轉與作用力關係----------------------52
4.1.5 載具高度位置與作用力的關係---------------------54
4.1.6 激磁電流大小與作用力的關係---------------------56
4.2 模擬載具在磁浮平台中的動態行為-------------------56
4.2.1 載具移動偏移測試-------------------------------56
4.2.2 載具45度方向偏移測試---------------------------60
4.2.3 載具對y軸偏轉測試------------------------------62
4.3 載具無法自然穩定的因素---------------------------66
第五章 平面磁浮系統之控制器設計與模擬結果--------------69
5.1 PID控制器的設計----------------------------------69
5.1.1 平台與載具設計---------------------------------69
5.1.2 控制器的設計概念-------------------------------70
5.2 模擬結果-----------------------------------------72
第六章 結論與未來工作----------------------------------83
參考文獻------------------------------------------------84
附錄A---------------------------------------------------87
附錄B--------------------------------------------------101
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