本論文針對結合以奈米孔洞模板製造奈米尺寸材料的技術，以及使用含矽高分子為原料來製做中空奈米管，並對所形成的材料進行結構與成份分析，用以與現有之奈米碳管比較。本論文也對所形成的奈米管進行場發射性質量測，以了解其應用於真空電子元件的潛力。
使用0.2 m孔隙直徑的多孔性氧化鋁碟片為模板，將聚碳矽烷溶液注入模板內，再以真空熱分解方式成功的獲得奈米管狀物。奈米管狀物的尺寸決定於模板的孔隙尺寸，且其長度可以達到與多孔性氧化鋁模板相當為60 m。
使用聚碳矽烷為原料所形成的奈米管的結構與成份分別依據電子繞射，以及X光能量分散光譜分析，所得到的結構接近於現存的奈米碳管，而其成份則為具有20%至40%的矽。論文的實驗流程與材料組合雖然沒有形成碳化矽奈米管，然而所形成含矽的奈米碳管預期將有新穎的性質可供使用。
本論文所製得的奈米管陣列可於小於2.8~3.1 V/m的turn-on電場強度發射電子，與一般奈米碳管相當，其飽和電流密度約為10-4 A/cm2。建議未來進行場發射元件製造時宜以較薄的模板來形成奈米管，提高其場發射性質。

This thesis investigated the process regarding the fabrication of self-organized nanotubes, composing of carbon and silicon, by the pyrolysis of polycarbosilane in anodic alumina nanoholes. The nanotube arrays prepared here is well aligned with high density and uniformity.
We could contain the nanotubes of 0.2μm in diameter and nearly 60μm in length. This is because both the diameter and the length of nanotubes are controllable by using the template and also the Al2O3 template provides a perfect isolation of nanotube from each other.
At pyrolysis temperatures in the rang of 900℃ and higher, the PCS can form CNTs containing 20~40% Si. These nanotubes are good property of field-emission compare with common carbon-nanotube. The field-emission is turn on at a working voltage electron up less than 2.8~3.1 V/μm and the saturated an electric current of 10-4A/cm2.
The nanotube growth is controllable by using the nanotemplate. It opened a pathway toward nanoelectronic device fabrication. We suggest to use thin slice of the AAO template to grow CNT for field-emissin devices in the future.

中文摘要……………………………………………………………………………..Ⅰ
英文摘要………………………………………………...…………………………...Ⅱ
誌謝………………….…………………………………………………………….…Ⅲ
目錄……………………………….………………………….………………………Ⅳ
圖索引………………..……………………….………………………………………V
第一章　緒論……………….…………………………………………….…………..1
1-1 前言 ..…..…………………………………..……………………………….1
1-2 奈米碳管合成回顧……………………………………………………..…...4
1-2-1氣相反應合成奈米碳管……..……………………………..…………...4
1-2-2固相反應合成奈米碳管………………………………………………...6
1-3 聚碳矽烷製程碳化矽回顧……………………………………………….…7
1-3-1聚碳矽烷熱分解形成碳化矽過程……………….……………………..7
1-3-2聚碳矽烷於氫氣氣氛下的熱分解反應…………………………..….…8
1-3-3真空氣氛下的熱分解反應………………………..……………..…….10
1-4 聚碳矽烷加觸媒成長奈米碳管………………………………………..….14
　　　1-4-1 A-tyep PCS生長奈米碳管…………………………………………….14
　　　1-4-2 L-type PCS生長奈米碳管…………………………………………….15
1-5 陽極處理氧化鋁模板回顧………………………………………………...17
1-6 以氧化鋁模板製作奈米管回顧…………………………………………...19
1-7 研究目的…………………………………………………………………...20
第二章　實驗方法…………………………………………………...……………...21
2-1 使用原料………………………………………..……….…………………21
2-2 分析及試片製作………………………………………..……….…………22
2-3 儀器設備………………………………...…………………………………23
2-4 實驗流程Ⅰ…………………………………..…………………………….28
2-5 實驗流程Ⅱ(浸泡式)……………………………………………..………..30
2-6 實驗流程Ⅲ (粉末熱融)………………………..…………………………34
2-7 實驗流程Ⅳ (機械馬達)……………………..……………………………36
2-8 實驗流程Ⅴ（成份與結構分析）………………………………………….38
第三章　　結果與討論……………………………………………………….…….40
3-1 陽極氧化鋁模板製程………………………………………..…………….40
3-2 將AAO浸泡於聚碳矽烷溶液中的充填反應改善……………………….41
3-3 浸泡式控制管徑大小…………………………………………..………….44
3-4 熱融方式控制管徑大小…………………………………………………...47
3-5 使用機械馬達抽氣的方式控制管徑大小………………………………...50
3-6 成分與結構………………………………………………………………...58
3-7 結構模型…………………………………………………………………...64
3-8 場發射性質量測…………………………………………………………...65
第四章 結論……………………………………………………………………..69
參考文獻……………………………………………………………………………..70

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