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研究生:張百裕
研究生(外文):Pai-Yu Chang
論文名稱:平面電極式微型葡萄糖感測器之研製
論文名稱(外文):Fabrication Study on the Glucose Microsensors with Planar Electrodes
指導教授:林堅楊林堅楊引用關係
指導教授(外文):Jian-Yang Lin
學位類別:碩士
校院名稱:國立雲林科技大學
系所名稱:電子與資訊工程研究所碩士班
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:196
中文關鍵詞:微機電系統平面電極微型葡萄糖感測器掀除法
外文關鍵詞:Lift-offMEMSPlanar ElectrodesMicro-Glucose Sensor
相關次數:
  • 被引用被引用:5
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  • 下載下載:139
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本研究主要探討微型電流式平面電極在葡萄糖微感測器上的應用。主要為運用半導體製程及微機電系統(MEMS)製程技術研製具平面電極之微型葡萄糖感測器。文中將探討玻璃清潔技術、增厚光阻塗佈技術以及ITO玻璃蝕刻技術,並且探討平面電極之製備及其於微型葡萄糖感測器上的應用。實驗過程中充分結合半導體及微機電製程技術的清洗、曝光、顯影、蒸鍍、濺鍍與掀除法(lift-off),在玻璃基板上製作微型葡萄糖感測器。實驗結果顯示此微型葡萄糖感測器對葡萄糖酵素有明顯的電流應答,並且氧化還原曲線對稱表示此微型平面電極的葡萄糖酵素有明顯的可逆性,驗證此微型平面電極可應用於葡萄糖感測器中。當血液樣本中的葡萄糖濃度在0至600 mg/dL之間時,此微型葡萄糖感測器的應答電流可達到0.09至0.5 μA。
This work mainly used semi-conductor technology and micro-electro- mechanical system (MEMS) technology to fabricate the micro-glucose sensors with planar electrodes on glass substrates. The cleaning techniques for the glass substrates, the thickening techniques for the spin-coated photo-resist and the etching technology of ITO glass have been developed in this work. Besides, the planar electrodes have been applied to the fabrication of the micro-glucose sensors. The substrate cleaning, photo-lithography, evaporation, sputtering and lift-off processes have been integrated to fabricate the micro-glucose sensors on the glass substrates. Our experimental results show that the micro-glucose sensors have distinct response to the glucose content in the samples. At the same time, oxidation reduction curve shows symmetrical, so we know the electrodes of glucose oxidase have reversibility. This proves that the micro planar electrodes can be applied in the micro-glucose sensors very well. The response current of the micro-glucose sensors was as high as 0.09 to 0.5 μA when the glucose concentration in the samples was in the range of 0 to 600 mg/dL.
目錄
中文摘要------------------------------------------------------------------- i
英文摘要------------------------------------------------------------------- ii
致謝----------------------------------------------------------------------- iii
目錄----------------------------------------------------------------------- iv
表目錄--------------------------------------------------------------------- vi
圖目錄--------------------------------------------------------------------- vii
一、 緒論-------------------------------------------------------------- 1
1-1 前言------------------------------------------------------------------- 2
1-2 文獻回顧--------------------------------------------------------------- 4
1-3 研究目的--------------------------------------------------------------- 8
1-4 論文研究架構----------------------------------------------------------- 9
二、 理論分析與探討---------------------------------------------------- 10
2-1 生物感測器------------------------------------------------------------- 11
2-2 酵素感測器------------------------------------------------------------- 12
2-2-1 原理與構造--------------------------------------------------------- 12
2-2-2 特徵--------------------------------------------------------------- 12
2-2-3 應用--------------------------------------------------------------- 13
2-3血糖生物感測器的基本原理------------------------------------------------ 14
2-4 電泳晶片--------------------------------------------------------------- 17
2-5製程原理與技術---------------------------------------------------------- 18
2-5-1半導體與微機電製程-------------------------------------------------- 18
2-5-2微影 --------------------------------------------------------------- 21
2-5-3蒸鍍---------------------------------------------------------------- 21
2-5-4濺鍍---------------------------------------------------------------- 22
2-5-5掀除舉離技術-------------------------------------------------------- 23
三、 實驗方法---------------------------------------------------------- 24
3-1 製程設備與材料--------------------------------------------------------- 25
3-1-1 製程設備介紹------------------------------------------------------- 25
3-1-2 製程材料介紹------------------------------------------------------- 33
3-1-3 化學溶劑介紹 ------------------------------------------------------ 36
3-1-4 感測量測設備介紹--------------------------------------------------- 38
3-1-5 感測膜介紹--------------------------------------------------------- 41
3-2 平面電極式微型葡萄糖感測器製作----------------------------------------- 42
3-2-1 微型平面電極實驗步驟----------------------------------------------- 42
3-2-2 製備平面電極微型葡萄糖感測器 -------------------------------------- 44
3-2-3 封裝電極----------------------------------------------------------- 49
3-2-4 葡萄糖酵素配置與量測 ---------------------------------------------- 49
3-3 電泳晶片置備----------------------------------------------------------- 50
3-3-1 電泳晶片製程流程--------------------------------------------------- 50
3-3-2 電泳晶片製程說明--------------------------------------------------- 50
3-4 ITO玻璃基板電極製作--------------------------------------------------- 54
四、 結果與討論-------------------------------------------------------- 55
4-1 平面電極在葡萄糖上的應用----------------------------------------------- 56
4-1-1玻璃基板之清潔------------------------------------------------------ 56
4-1-2 電極形狀與大小----------------------------------------------------- 58
4-1-3 光阻轉速與膜厚的關係----------------------------------------------- 58
4-1-4 曝光、顯影時間與光阻膜厚關係--------------------------------------- 59
4-1-5 微型葡萄糖感測器之應答分析----------------------------------------- 59
4-2 電泳晶片置備----------------------------------------------------------- 61
4-2-1 光阻增厚----------------------------------------------------------- 61
4-2-2 十字微流道母模製程------------------------------------------------- 61
4-2-3 電泳晶片感測電極--------------------------------------------------- 62
4-3 ITO玻璃上電極製作------------------------------------------------------ 63
五、 結論-------------------------------------------------------------- 65
六、 未來展望---------------------------------------------------------- 66
參考文獻------------------------------------------------------------------- 67
附錄----------------------------------------------------------------------- 110
作者簡歷------------------------------------------------------------------ 181
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