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研究生:洪正翰
研究生(外文):Zheng-Han Hong
論文名稱:無閥式壓電蜂鳴片微幫浦
論文名稱(外文):A Valve-less Type of Piezoelectric Buzzer Micropump
指導教授:黃順發黃順發引用關係
指導教授(外文):Shun-Fa Hwang
學位類別:碩士
校院名稱:國立雲林科技大學
系所名稱:機械工程系碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:92
語文別:中文
論文頁數:105
中文關鍵詞:CFDRCSU-8厚膜光阻壓電蜂鳴片致動薄膜
外文關鍵詞:diaphragmSU-8 photoresistpiezoelectric buzzer materialCFDRC
相關次數:
  • 被引用被引用:8
  • 點閱點閱:209
  • 評分評分:
  • 下載下載:47
  • 收藏至我的研究室書目清單書目收藏:0
微幫浦系統主要功能是獲得微小流量的精準控制,本文所製作的微幫浦屬於無閥式壓電蜂鳴片微幫浦;在致動器方面,為了配合價格便宜、致動量高的壓電蜂鳴片取代致動量較低壓電材料;在微流道之結構是使用SU-8厚膜光阻並搭配UV-LIGA製程來製作,使用簡易式膠片式光罩,可製作出厚度為150µm,最小線寬為80µm。並且使用CFDRC軟體來模擬分析,壓電蜂鳴片微幫浦的耦合分析,和實驗製程驗証和比較。

在壓電蜂鳴片材料的量測,將給予電壓以及低頻率,可獲得較大的變形量;在致動薄膜的選擇上,以蜂鳴片直接代替致動薄膜,減小薄膜的阻力,因會有較大之垂直位移量;微結構有單層壓電蜂鳴片微幫浦和雙層壓電蜂鳴片微幫浦,而雙層蜂鳴片微幫浦是利用蜂鳴片雙向雙振的原理,提高微幫浦的振動位移,增進微幫浦的流量,對於微幫浦也是一大貢獻。最後進行微幫浦的組裝測試,量測體積流率,並和CFDRC軟體來比較結果,討論需要改進的缺點,希望能對後續研究者提供一個可以參考的依據。

關鍵字:壓電蜂鳴片、SU-8厚膜光阻、CFDRC、致動薄膜
The main function of a micropump system is to control minute flow rate exactly. In this study, valve-less type of piezoelectric buzzer micropumps are designed and manufactured. In the Actuator, piezoelectric buzzer material is cheap and of high deflection such that it could replace piezoelectric material of low deflection.
The micro-channel is fabricated by employing UV exposure and film mask on SU-8 photoresist. The result shows that the thickness of the micro-channel is 150 µm and the bottom width is 80 µm. CFD-RC is used to simulate the coupling effects of piezoelectric buzzer micropump. Its results are compares with experimental data.

The higher vertical deflection of piezo-electric buzzer material could be obtained when high voltage and low frequency are input. To keep the high vertical deflection, the usual diaphragm is replaced by the buzzer. Single layer and double layers of piezoelectric buzzer are also invested in the micropumps. The double-layer piezoelectric buzzer micropump is to superpose the vibration of the buzzers and to increase the flow rate of the micropump. After the manufacture of the micropumps, their volume flow rates are measured as well as compared with the results from CFDRC, and the possible suggestions are discussed. Hope that this study can be considered as a reference for the latter researchers.

Keywords:piezoelectric buzzer material,SU-8 photoresist, CFDRC, diaphragm
中文摘要 …………………………………………………………… i
英文摘要 ………………………………………………….............. ii
致謝 ……………………………………………………………. iii
目錄 …………………………………………………………… iv
表目錄 …………………………………………………………… vi
圖目錄 …………………………………………………………… ix
符號說明 …………………………………………………………… xi
一、 緒論…….………………………………………………… 1
1.1 前言………………………………………..……………… 1
1.2 現存微幫浦之介紹………………………………………… 2
1.2.1 文獻回顧…………………………………………………… 6
1.3 研究目的和方法……………………………………………….. 8
二、 相關理論探討……………………………………………… 10
2.1 無閥式微幫浦理論………………………………………… 10
2.1.1 閥門……................………………………………………… 10
2.1.2 擴散口和噴嘴的設計理論…………………………………… 11
2.2 CFDRC分析理論…………………………………… 13
2.2.1 CFDRC軟體使用流程………………………………………… 15
2.3 蜂鳴片………………………………………………………….. 16
2.4 微影製程………………………………………………….. 20
2.5 SU-8 厚膜光阻……………………………………………. 22
三、 實驗過程………………………………………………… 23
3.1 論文架構……………………………..………………… 23
3.2 微幫浦的分析…………………………………………… 24
3.3 微流道之製作……………………………………………… 25
3.3.1 微幫浦之設計………………………………………………….. 25
3.3.2 微流道之製作………………………………………………….. 26
 3.4 蜂鳴片之性質量測…………………………………………….. 29
3.5 微幫浦之封裝………………………………………………….. 30
3.5.1 PDMS罩子製作………………….............................................. 30
3.5.2 PDMS罩子和水管的封裝…………………………………….. 30
3.53 微幫浦之封裝………………………………………………….. 31
四、 結果與討論…………………………………..………………. 33
4.1 蜂鳴片量測結果…….……………………………………… 33
4.2 微幫浦的模擬分析結果….………………………………… 36
4.3 微幫浦的製程結果……………………………………… 40
4.3.1 熱應力探討………………………………………………… 45
4.4 壓電蜂鳴片微幫浦的組裝………………………………… 45
4.5 微幫浦運作之探討….……………………………………… 46
4.5.1 微幫浦封裝後蜂鳴片位移…………………………………...... 46
4.5.2 微幫浦運作之探討…………………………………………… 48
五、 結論…………………………………………… 86
參考文獻 …………………………………………………………… 87
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