參考文獻
【1】郭佳儱, “微放電加工技術於MEMS之應用”,機械月刊,第二十五卷,第十一期,pp.304-313,1999.【2】Masuzawa, T., Fujino, M., and Kobayashi, K., “Wire Electro-Discharge Grinding for Micro-Machining,” Annals of the CIRP, Vol. 34, No. 1, pp. 431-434, 1985.
【3】Tu, Z.Y., Masuzawa, T., Fujino, M., “Micro-EDM for Three-Dimensional Cavities-Development of Uniform Wear Method,” Annals of the CIRP, Vol. 47, No. 1, pp. 169-172, 1998.
【4】Egashira, K., Masuzawa, T., “Microultrasonic Machining by the Application of Workpiece Vibration,” Annals of the CIRP, Vol. 48, No. 1, pp. 131-134, 1999.
【5】Xi-Oing Sun, Masuzawa, T., Fujino, M., “Micro Ultrasonic Machining and Self-Aligned Multilayer Machining/Assembly Technologies for 3D Micromachines,” Proceedings of IEEE Micro Electro Mechanical Systems, pp. 312-317, 1996.
【6】Masuzawa, T., “ Micro-EDM,” ISEM, Vo1.1, No. 1, pp. 3-19, 2001
【7】黃俊德、郭佳龍,整合微放電加工與雷射焊接製程進行微精密元件組裝,雲林科技大學博士論文,2002.
【8】許 東亞,增沢隆久,電極供給の自動化に関する研究,電気加工学会全国大会,1999,Vol.36,No.81,pp.7-14
【9】Yong-Li., Min-Guo., Zhaoying, Zhou., Min-Hu., “Micro electro discharge machine with an inchworm type of micro feed mechanism,” Precision Engineering, pp. 7-14, 2002.
【10】Min-Hu., Zhaoying, Zhou Yong Li., Hejun-Du., “Development of a linear electrostrictive servo motor,” Precision Engineering, pp. 316-320, 2001.
【11】和田紀彥,正木 健,マイクロ放電加工の開發,型技術,2002/3,第12卷、第3號,p30-34
【12】Ken''ichi T., Yogesh B. G., “Batch Mode Micro-Discharge Machining,” IEEE Microelectromechanical Systems, VOL.11, NO.2, pp.102-110, 2002.
【13】南 久,增景清德,李 瑞埈,塚原秀和,荻野秀樹,梅本真悟,亞鉛電極による微細加工,電気加工学会全国大会講演論文集,2002,pp.65-66
【14】Fujimoto R., “The multi-circuit system electric discharge machining process,” J Jpn Soc Electrical Machining Eng, 3(6):1, 1969.
【15】Mohri, N., Saito, N., Takawashi, T., Kobayashi, K., “Mirror-like finishing by EDM,” Proceedings of the 25th Machine Tool Design and Research Conference, p 329, 1985.
【16】齋藤長男 監修,小林和彥、仙北谷英次 著,ワイヤカツト放電加工技術,日刊工業新聞社,1983
【17】真鍋明、葉實雄一郎,機械加工現場診斷シリ-ズ5 形雕放電加工,日刊工業新聞社,1997
【18】Kunieda, M., Muto, H., “Development of multi-spark EDM,” Ann CIRP, 49(1), p119, 2000.
【19】Fuzhu, Han., Masanori Kunieda., “Development of parallel spark electrical discharge machining,” Precision Engineering, pp. 65-72, 2004.
【20】Seong.S.Choi , Jung , D.W.Kim , M.A.Yakshin , J.Y.Park , .Kuk ,“Frabrication and microelectron gun arrays using laser micromachining” , Microelectronic Engineering , 41/42 ,pp.l67-170, 1998.
【21】D. M. Allen, A. Lecheheb . “Micro electro-doscharge machining of ink jet nozzles : optimum selection of material and machining parameters” , Journal of Materials Processing Technology , 58 , pp. 53-66, 1996.
【22】T., Masuzawa, J., Tsukamoto, and M., Fujino, “Drilling of Deep Microholes by EDM,” Annals of the CIRP, Vol. 38, No. 1, pp. 195-198, 1989 .
【23】K.Kagaya , Y.Oishi.K.Yada , “Micro-electrodischarge machining Using Water as a working Fluid-2: Narrow Slit Fabrication”, Precision Engineering , 12, 4, pp.213-217 , 1990.
【24】W. Ehrfeld and H. Lehr , “ Deep X-Ray Lithography for the production of three-dimensional microstructures from metals, polymers and ceramics” , Radiat .Phys.Chem Vol.45 No.3, pp.349-365 , 1995.
【25】Domoiniek Reynaerts,Paul-Herni’s Heeren ,Hendrik Van Bmssel,“Microstructuring of silicon by elelctro - discharge machining(EDM) Part I: theory”, Sensors and actuators,A60,pp212-218,1997.
【26】郭佳儱, “微精密機械生產製造系統發展簡介”,科儀新知,第十八卷,第三期,pp.59-67,1996.【27】吳清沂 , 鍾震桂 , “微機電系統技術簡介”, 科儀新知 , 第十八卷 , 第三期,pp.26-40 , December , 1996.【28】竹內芳美, “マイクロ3次元切削加工”,型技術,第十七卷,第3號,pp.18-23,3月號,2002.
【29】早乙女康典,秦誠一, “超塑性複合加工によるマイクロ2段齒車の創成”,塑性と加工,40,pp.49,2000.
【30】大森整,片平和俊,林偉民,上原嘉宏,鈴木享,小茂鳥潤, “ナノレベル表面機能を実現する超精密金型のマイクロ研削技術”, 型技術,第十七卷,第3號,pp.24-28,3月號,2002.
【31】L.Kuo and T.Masuzawa, “A Micro – Pipe Fabrication Process”,Proc. Of IEEE MEMS’91,pp.80-85,1991.
【32】A.C.Wang, B.H.Yan , X.T.Li , F.Y.Huang , Use of micro ultrasonic vibration lapping to enhance the precision of microholes drllled by micro electro – discharge machining , International Journal of Machine Tools and Manufacture,Vo1.42 , pp.915-923 , 2002.
【33】C.T.Yang, S.S.Ho and B.H.Yan, Micro Hole Machining of Borosilicate Glass though Electrochemical Discharge Machining, Key Engineering Materials,Vol.196,pp.149-166,2001.
【34】T.MASUAZWA ,1Masatoshi FUFINO, Masaki YAMANOTO and, “Micro Punch System as an application of WEDG”,生產研究所39卷6號,P277-P280,東京大學生產研究所,1987.
【35】T.Masuzawa,“An Approach to Micromachnining through Machine
Tool Technology”,Annals of the CIRP,34,1,pp.419-425,1985.
【36】山本真嗣,宇野義幸,窪田真一郎, “YAG レ-ザを併用した超硬合金への微細深穴放電加工-併用加工における加工能率の向上に関する研究”,電気加工学会全国大会講演論文集,pp.57-60,2001.