臺灣博碩士論文加值系統

表面聲波(SAW)元件已廣泛運用於通訊與檢測機制上。其中傳統表面聲波元件不適用於液體的感測，由於當液體放置於其波之傳遞路徑上會造成高聲能的損失。而水平剪力表面聲波由於引導聲波於特定的偏極方向上，因此適用於液體的感測。因此目前釵h研究皆著重於在實驗中探討頻率飄移跟時間的關係，而無理論性的模型來預測此行為。

在本篇論文中，波動方程式整合流體中的Navier-Stoke方程式來研究由液體的重量負載與黏滯力所造成的相速度變化，並帶入耦合理論模型來估測表面聲波元件的頻率響應。因此流體中的重量負載與黏滯力所造成相位飄移可被分開。最後，水平剪力表面聲波理論與實驗的相位飄移結果會進行比較，並討論其差異。

Surface acoustic wave devices have been widely applied to the fields of communications and sensing mechanisms. Traditional surface acoustic wave devices are not suited for liquid detectors due to high acoustic energy loss as placing liquid on the propagating path of surface acoustic wave. Shear horizontal surface acoustic wave devices are suited for liquid detectors by guiding the wave in the specific direction of polarization. So far most of the research has been done on experimental investigation on the frequency shift with respect to time; no theoretical model has been developed to predict this behavior.

In this thesis, wave equations are integrated with Navier-Stoke equation to investigate the phase velocity changes due to fluid mass loading and viscosity. The phase velocity changes are substituted into coupling of modes model to estimate the frequency spectrum. The effects of phase shifts due to fluid mass loading and viscosity can be separated. Finally the theoretical and experimental results on phase shifts are compared and the behavior of the SH-SAW are discussed.

Chapter 1 Introduction 1
1-1 Introduction of SAW 1
1-2 Literature Review 1
1-3 Motivation and Objective 3
1-4 Architecture of thesis 3
Chapter 2 Modeling of SH-SAW Sensor 5
2-1 Principle of Piezoelectricity 5
2-2 Theoretical Analysis 7
2-2-1 The SH-SAW with Metal Film 8
2-2-2 The SH-SAW with Mass Loading 11
2-2-3 The SH-SAW with Viscosity Effect 12
2-3 Coupling of Modes (COM) Model 15
2-3-1 The Grating Transmission Matrix [G] 15
2-3-2 The IDT Transmission Matrix 18
2-3-3 The Delay Line Transmission Matrix 20
2-4 The SAW Sensor Structure of COM Model 20
Chapter 3 The Structure of SH-SAW Model 23
3-1 The Wave Propagation and Material Selection 23
3-2 The Influences of Metal Layer 25
3-3 The Influences of Fluid Mass Loading and Viscosity 28
3-4 The COM Model Verification 33
Chapter 4 Experimental Measurement 38
4-1 The Fabrication of SH-SAW Device 38
4-1-1 The Choice of Piezoelectric Substrate 38
4-1-2 Designate Specifications of Mask 39
4-1-3 The Processes of SAW’s Fabrication 39
4-2 The Experimental Measurement 41
4-2-1 The Introduction of Instrument 41
4-2-2 The Frequency Responses of Samples 42
4-2-3 The Effect of the Liquid Deposition 44
Chapter 5 Conclusion & Future Work 46
5-1 Conclusion 46
5-2 Future Work 46
Reference 47

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