臺灣博碩士論文加值系統

本文主要探討壓電致動器驅動的微定位器的追蹤控制問題，壓電致動器表現顯著的非線性遲滯效應，必須在控制回路加以補償，才能達到理想的追蹤控制性能。
追蹤低頻的輸入訊號時，遲滯效應的成份大部份集中在低頻區域，有名的”零相位誤差追蹤控制器”(zero phase error tracking controller)結合”干擾觀測器”(disturbance observer)的控制架構可有效補償遲滯效應的低頻成份，達到良好的追蹤控制性能，但在追蹤高頻的輸入訊號時，遲滯效應含有不可忽略的高頻成份，若設計遲滯觀測器以精確估測遲滯效應，並補償遲滯的高頻成份，則能改進追蹤高頻輸入訊號的性能。
由於先前設計的遲滯觀測器對外部干擾有不具強健性的缺點，對此本文設計一個對低頻外部干擾具強健性的觀測器，稱為”高頻遲滯觀測器”，在低頻外部干擾影響下亦可精確估測遲滯的高頻成份，提出的控制架構運用”高頻遲滯觀測器”來補償遲滯的高頻成份，而遲滯的低頻成份和低頻的外部干擾則由”干擾觀測器”予以補償，本文設計的追蹤控制器的性能以模擬和實驗來加以驗證。

This thesis is intended to investigate the tracking control of a nano-positioner driving by a piezo-actuator. It is well known that piezo-electric actuators exhibit significant nonlinear hysteresis effect. The hysteresis effect has to be compensated in the control loop for achieving better performance.
In tracking low frequency reference signals, it is observed that most of the hysteresis energy is at low frequency regions. The well known zero phase error tracking controller with the disturbance observer control scheme is effective for compensating the lower frequency components of hysteresis and achieves excellent tracking performance. However, in tracking high frequency reference signals, there are notable portions of hysteresis energy at high frequency regions, which degrades the tracking performance. By using a previously designed observer called ‘hysteresis observer’, the high frequency components of hysteresis can be estimated and compensated for improving the performance in tracking high frequency reference signals.
A major shortcoming of the ‘hysteresis observer’ is that it is not robust to external disturbances. In this thesis, an observer called ‘high frequency hysteresis observer’ is designed, which estimates the high frequency components of hysteresis more accurately under low frequency disturbances. In the proposed control scheme, the ‘high frequency hysteresis observer’ is applied to compensate for the high frequency components of hysteresis while the low frequency components of hysteresis and the low frequency disturbances are compensated by the disturbance observer. The effectiveness of the proposed controller is verified through simulations and experiments.

中文摘要………………………………………………………………………………i
英文摘要………………………………………………………………………………ii
目錄……………………………………………………………………………………iii
圖目錄…………………………………………………………………………………v
第一章 緒論……………………………………………………………………………1
1.1 前言…………………………………………………………………………1
1.2 文獻回顧……………………………………………………………………1
1.3 研究動機……………………………………………………………………2
第二章 遲滯模式和遲滯觀測器………………………………………………………4
2.1壓電微定位平台式.………………………………………………………………4
2.2模式離散化………………………………………………………………………7
2.3 ZPETC和干擾觀測器追蹤控制架構……………………………………………8
2.4遲滯觀測器控制架構……………………………………………………………12
第三章 高頻遲滯觀測器……………………………………………………………14
3.1遲滯觀測器設計…………………………………………………………15
3.2高頻遲滯觀測器設計……………………………………………………18
3.3 模擬結果…………………………………………………………………23
3.3.1 高頻遲滯觀測器之實現……………………………………………23
3.3.2 弦波模擬結果………………………………………………………24
3.4實驗結果…………………………………………………………………26
3.4.1 實驗架構……………………………………………………………………27
3.4.2 弦波實驗結果………………………………………………………………27
3.4.2.1實驗數據表 ………………………………………………………………34
3.4.3 三角波實驗結果……………………………………………………………35
3.4.2.1實驗數據表 ………………………………………………………………41
第四章 帶拒濾波器與前饋控制器設計……………………………………………42
4.1帶拒濾波的遲滯補償………………………………………………………42
4.1.1帶拒濾波器…………………………………………………………42
4.1.2 帶拒濾波的遲滯補償追蹤控制……………………………………43
4.1.3實驗結果……………………………………………………………45
4.2前饋控制器的遲滯補償……………………………………………………53
4.2.1前饋控制系統…………………………………………………………53
4.2.2實驗結果………………………………………………………………55
4.3實驗數據表 …………………………………………………………………59
第五章 結論…………………………………………………………………………60
參考文獻………………………………………………………………………………62

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