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研究生:蔡嘉文
研究生(外文):Chia-Wen Tasi
論文名稱:TFT-LCD面版蝕刻電晶體之自動化檢測
論文名稱(外文):Automatic Inspection of Etching Transistors in TFT-LCD Panel
指導教授:林宸生林宸生引用關係
指導教授(外文):Chern-Sheng Lin
學位類別:碩士
校院名稱:逢甲大學
系所名稱:自動控制工程所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2005
畢業學年度:93
語文別:中文
論文頁數:85
中文關鍵詞:圖像識別液晶顯示器梯度方向編碼影像處理線上量測自動化檢測薄膜電晶體
外文關鍵詞:thin-film transistorTFT-LCDgradient orientation codemeasurementliquid crystal displaypattern recognitionautomatic inspectionimage processing
相關次數:
  • 被引用被引用:12
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  • 下載下載:105
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本論文研究方向主要是針對TFL-LCD (薄膜電晶體液晶顯示器, thin-film transistor liquid-crystal display)面版上的蝕刻電晶體,進行自動化線上檢測及相關量測之應用。
透過圖像識別比對技術,去追蹤待測面版上的目標薄膜電晶體影像,並與系統資料庫作一匹配,判斷該目標電晶體為何類別樣式,找出電晶體中心位置,同時,將控制訊息遞交伺服機構,對其檢測流程作一正規化處理,進行線寬線距等量測相關動作。
在進行圖像搜尋、解析及辨識過程中,由於影像的匹配處理具有運算資料龐大的特性,也因而比對時間耗費的縮短和能否精確找到目標影像,便是著手此類研究所關心的重點。
樣版比對方法在圖像辨識與搜尋中,為一簡單而強力的工具。本文也在此提出一個樣版比對方法的改善,能有效率地對辨識目標作一描述,使得能在圖像比對辨識的過程中,在不失精準度的前提下,大量縮短比對時間,並同時針對光源中心偏移、光源分佈不均之情形與多目標偵測,以梯度方向編碼轉換後,亦能穩定對其目標圖像作一追蹤辨識與定位。
當對蝕刻電晶體進行補償定位後,進行後續的相關量測作業,如線寬、線距、水平距離、垂直距離、斜邊距離、圓形幾何諸元和圖形重疊等。
In this research we apply an on-line automatic inspection and measurements for the panel of etching transistors of TFL-LCD (thin-film transistor liquid-crystal display).
With pattern recognition technique, we can obtain the target pattern image of TFT etching transistors. With template match in the database of the system, the program judges the kinds of the target etching transistors, and finds out the central position of etching transistors, furthermore, puts the control message to the service mechanism, and calculates the width and distance of etching line.
On the process of searching, analyzing, and recognizing of images, a modified template matching method, using the gradient orientation code matching, is assisted as a simple and powerful tool. It could also check several items, such as the shift in the center of illumination, non-uniform distribution illumination problems. The multipurpose image-based measurement application with unsophisticated and economical equipment is confirmed in the positioning of etching transistors pattern in the LCD fabrication.
When the etching transistor was compensated to the fixed position , it carried on follow-up relevant measurement, for instance, line width、line distance、horizontal distance、vertical distance、distance of oblique line、circle and overlap, etc..
感謝
中文摘要
Abstract
目錄
圖目錄
表目錄
第一章 緒論
1.1研究背景與動機
1.2 研究目的及其重要性
1.3 文獻回顧
第二章 研究理論與方法
2.1 研究理論基礎
2.1.1液晶顯示器分類
2.1.2 TFT-LCD之構造與製程
2.2 研究設備與方法
2.2.1 光學系統的建構與畫素精度
2.2.2 特徵描述與影像辨識
a.比對資料庫種類與建構
b.改良樣版比對法之區塊影像偵測
2.2.3二元樹資料結構與二分樹搜尋
2.2.4光源照明對影像處理之影響
2.2.5 梯度方向編碼
2.2.6 後續量測作業
a.自動量測部分
b.手動量測部分
2.2.7 TFT-LCD薄膜電晶體檢測系統流程
第三章 實驗結果與效能評估
3.1 搜尋精度探討
3.2 搜尋辨識速度探討
3.3 穩定度探討
3.4 線寬和線距的量測
3.5 研究成果
第四章 結論與未來展望
4.1 結論
4.2 未來展望與問題回顧
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