臺灣博碩士論文加值系統

中文摘要
本實驗以Pt/Ta/SiO2/Si為基板，利用 MOD法製備BTO鐵電薄膜。分別在鈦酸鉍(Bi4Ti3O12)薄膜中摻雜製備(Bi3.25Sm0.75Ti3)O12、(Bi3.25Sm0.75Ti2Zr1)O12、( Bi3.25Sm0.75Ti1.5Zr1.5)O12 三種鐵電薄膜。試著探討不同含量的摻雜、不同的退火溫度，對 Bi4Ti3O12薄膜的鐵電性質漏電流之影響。當未摻雜Zr時，操作電壓在2V時漏電流保持在10-9左右，而摻雜Ti2Zr1時，操作電壓在2V漏電流保持在10-9左右，當摻雜Ti1.5Zr1.5時，操作電壓在2V漏電流保持在10-6左右。因為摻雜使結晶溫度提高，退火溫度越高表面晶粒越大越粗糙使漏電流增加。在未摻雜Zr時，退火溫度在650 ℃有最大的2Pr (23.5 uC /cm2)。當摻雜Ti2 Zr1時，退火溫度750 ℃有最大的2Pr (11.1 uC /cm2)，因為退火溫度過高導致薄膜交互擴散，失去了鐵電的特性。

Abstract
In this study, (Bi4Ti3O12) thin films on Pt/TA/SiO2/Si substrate by metal-organic deposition methods (MOD).Zr substituted BTO films were also investigated in this work. The thicknesses of these thin films were about 2300Å.The crystal structure and surface morphology were analyzed by X- Ray and SEM measurement. LCR meter and HP4194 measured the dielectric constant and leakage current of the films.
Additions of Zr to the BTO films enhance to up crystal temperature . For Ti2/Zr1 substituted BTO films, the leakage current below 2V keep on 10-9.For Ti1.5/Zr1.5 substituted BTO films, the leakage current below 2V keep on 10-6.The 2Pr decreased with the Zr concentration because adding Zr into Bi4Ti3O12 could cause less structure distortion.

目錄
頁次
中文摘要.......................................................................................................I
英文摘要......................................................................................................II
目錄.............................................................................................................III
圖目錄.......................................................................................................VII
表目錄........................................................................................................XI
第一章 緒論...............................................................................................11
1-1 前言................................................................................................11
1-2 研究目的與動機............................................................................12
第二章 文獻回顧.......................................................................................14
2-1 鐵電材料原理.................................................................................14
2-2 電性機制.........................................................................................17
2-2-1 介電性....................................................................................17
2-2-2 極化機制................................................................................18
2-2-3 漏電流機制............................................................................19
2-2-4 依時性介電崩潰....................................................................21
III
2-2-5 介電強度....................................................................................22
2-2-6 介電損失....................................................................................22
2-3 薄膜製作技術..................................................................................23
2-3-1 濺鍍法(Sputtering).....................................................................24
2-3-2 雷射剝鍍法(Laser ablation).......................................................25
2-3-3 離子束濺鍍................................................................................25
2-3-4 有機金屬化學氣相沉積法(MOCVD)......................................26
2-3-5 有機金屬分解法與溶膠凝膠法................................................26
2-3-6 溶膠凝膠法（sol-gel method）................................................27
2-3-6-1 溶膠凝膠法基本原理.............................................................27
2-3-6-2 溶膠凝膠製程主要步驟.........................................................28
2-4 鍍膜方式........................................................................…................29
2-5 低溫焦化（Pyrolysis）熱處理......................................…...............30
2-6 高溫結晶與緻密化熱處理..............................................…..............31
2-7 組成對SBT薄膜性質之影響...........................................................32
2-7-1 W和Mo的取代添加與BTO性質..........................................32
2-7-2 Nd的取代添加與BTO性質…................................................32
2-7-3 La和V的取代添加與BTO性質.............................................32
2-7-4 Sm的取代添加與BTO性質................................................33
2-7-5 La和Zr的取代添加與BTO性質.......................................33
參考文獻...........................................................................................34
圖目錄
頁次
圖2-1 鐵電材料的遲滯曲線圖..............................................................39
圖2-2 鋇鈦礦結構圖..............................................................................40
圖2-3 鋇鈦礦結構鈦離子偏移..............................................................40
圖2-4 鐵電薄膜在元件上之應用..........................................................41
圖2-5 材料的四種極化機構簡圖.........................................................42
圖2-6 單靶及多靶濺鍍法之示意圖.......................................................43
圖2-7 雷射剝鍍法之示意圖...................................................................43
圖2-8 離子束濺鍍示意圖.......................................................................44
圖2-9 有機金屬化學氣相沉積設備示意圖...........................................44
圖2-10 薄膜浸鍍過程.............................................................................45
圖2-11 薄膜旋鍍過程.............................................................................45
圖2-12 W和Mo共摻雜的2Pr與2Ec....................................................46
圖2-13 W和Mo分別共摻雜5%時的抗疲勞特性...............................47
圖2-14 W和Mo分別共摻雜5%時的漏電流關係圖...........................47
圖2-15 Pt/BNdT/Pt 的介電係數與介電損失......................................48
VII
圖2-16 Pt/BNdT/Pt 的漏電流關係圖...................................................48
圖2-17 BIT , BLT , BTV , BLTV的Pr與Ec關係圖................................49
圖2-18 Ir/TiO2/SiO2/Si 的2Pr與2Ec關係圖..........................................50
圖2-19 BSmT 的X-RD變化圖................................................................51
圖2-20 BSmT 的2Pr與2Ec關係圖..........................................................51
圖2-21 BSmT 的抗疲勞特性....................................................................52
圖2-22 BLT,BTZ,BLTZ 的Pr與Ec關係圖..............................................53
圖2-23 BLT , BTZ , BLTZ 的抗疲勞特性................................................53
表目錄
頁次
表2-1 氣相鍍膜與化學液相鍍膜之比較.................................................54
表2-2 常見陶瓷薄膜製程之比較.............................................................54

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