臺灣博碩士論文加值系統

本研究成功利用PMMA作為幫浦結構體與PDMS薄膜蓋板製作出壓電無閥式微幫浦。因組合結構不同分別探討單壓電致動與雙壓電致動幫浦。單壓電幫浦分別探討單擴散器/噴嘴與雙擴散器/噴嘴結構；而雙壓電幫浦又依流體流動方式之不同又分別探討垂直式與平行式；雙擴散器/噴嘴幫浦分別探討擴散器角度為14.8°、19.8°和29.8°、不同有效電壓、頻率、波形(正弦波、三角波、方波)、直流偏移量、壓電震動底板、腔體深度、進出口水槽面積下對幫浦性能之影響。研究發現：擴散器角度在14.8°時所驅動的質流率較高，壓電致動器之振幅和幫浦所驅動之流量皆與供給電壓成正比。當電壓為60V，共振頻率為70Hz，訊號為正弦波時，有最佳工作流量23 ml/min。單擴散器/噴嘴幫浦較適合在低電壓時驅動流體。平行式雙壓電幫浦在電壓60V，共振頻率10Hz，訊號為正弦波時，有本研究最佳流體流量27ml/min。垂直式雙壓電幫浦在電壓30V、共振頻率800Hz時有最大空氣流量125sccm。

The combination of PMMA structure and PDMS thin film for the piezoelectric actuation valveless micropump is successfully developed. There are two actuated modes for the micropump including single piezoelectric actuation and double piezoelectric actuation according their combination structure. The single piezoelectric actuation micropump including single nozzle/diffuser micropump and double nozzle/diffuser micropump will be studied. The double piezoelectric actuation micropump includes vertical mode and horizontal mode in terms of the flowing type of fluid. The double nozzle/diffuser micropump is aimed at the nozzle/diffuser angle (including 14.8°, 19.8° and 29.8°), applied voltage, applied frequency, applied waveform (including sine wave, triangle wave and square wave), DC OFFSET, the vibration of the piezoelectric disks or the micropump, the depth of chamber and the area of inlet and outlet to find out the effect of the micropump. The single piezoelectric actuation micropump for the double nozzle/diffuser with the angle as 14.8° has the maximum fluidic flow rate, and the applied voltage has respectively the linear relationship with the amplitude of the piezoelectric disks and the flow rate. The maximum flow rate of the single piezoelectric actuation micropump for the double nozzle/diffuser with the angle as 14.8° is found as 23ml/min with the applied sine wave voltage of 60V at the frequency of 70Hz. The single nozzle/diffuser micropump is suitable for the low applied voltage while actuating the fluid. The maximum flow rate of this horizontal mode is found as 27ml/min with the applied sine wave voltage of 60V at the frequency of 10Hz. Besides, the maximum flow rate of this vertical mode for the fluid as air is found as 125sccm with the applied voltage of 30V at the frequency of 800Hz.

目錄
中文摘要 ………………………………………………………………I
英文摘要 ………………………………………………………………II
目錄……………………………………………………………………III
圖表目錄………………………………………………………………VII
符號說明………………………………………………………………XII

第一章 序論 ……………………………………………………………1
1-1 前言 …………………………………………………………1
1-2 文獻回顧 ……………………………………………………3
1-3 研究目的和方法 ……………………………………………7
1-4 內容大綱 ……………………………………………………9
第二章 理論分析………………………………………………………10
2-1 壓電材料理論…………………………………………………10
2-1-1 壓電常數 …………………………………………………13
2-1-2 虎克定律和電位移 ………………………………………14
2-1-3 蜂鳴片 ……………………………………………………16
2-2 無閥式幫浦之工作原理………………………………………20
2-2-1 無閥式微幫浦理論分析 …………………………………21
2-3 無閥式微幫浦之設計 …………………………………………27
2-4 實驗不準度分析 ………………………………………………30
第三章PDMS薄膜製程與各種不同結構之微幫浦之製程……………32
3-1 PDMS薄膜製程技術與實驗設備………………………………32
3-1-1 PDMS薄膜體製程…………………………………………32
3-1-2 PDMS薄膜製程所需實驗設備……………………………35
3-2 各種不同結構之無閥式微幫浦之製程 ………………………36
3-2-1 PDMS薄膜與PMMA結構體組成之壓電微幫浦之製程 …36
3-2-2 PMMA平板與PMMA結構體組成之壓電微幫浦之製程 …39
3-2-3 PMMA平板.PDMS薄膜與PMMA結構體配合C型夾具組合成之壓電微幫浦之製程 ……………………………………………41
3-2-4 垂直式雙壓電致動器微幫浦之製程……………………44
3-2-5 平行式雙壓電致動器微幫浦之製程……………………47
第四章 實驗系統與量測方法…………………………………………50
4-1 實驗系統 ………………………………………………………50
4-1-1 水平校正測試區 …………………………………………50
4-1-2 驅動系統設備 ……………………………………………51
4-1-3 動態影像擷取系統 ………………………………………54
4-2 實驗儀器設備 …………………………………………………54
4-2-1 電阻式溫度檢測器 ………………………………………54
4-2-2 高速攝影機 ………………………………………………55
4-2-3 照明設備 …………………………………………………56
4-2-4 微量天秤 …………………………………………………56
4-2-5 雷射位移感測器 …………………………………………57
4-2-6 精確波形產生/電壓控制器………………………………58
4-3工作流體之物理性質 ……………………………………………61
4-4實驗架構和幫浦液體操作步驟 …………………………………61
4-4-1幫浦氣體操作和量測流量之步驟 ……………………63
第五章 結果與討論 ……………………………………………………65
5-1 壓電致動器性能測試分析 ……………………………………68
5-2 使用不同結構的單壓電致動器微幫浦對流量之影響(Sample 1) ………………………………………………………………76
5-3 DC OFFSET對壓電微幫浦之影響 ………………………………82
5-4 不同進出口蓄水槽對幫浦性能之研究…………………………83
5-5不同壓電驅動底板對該幫浦流量之影響 ………………………86
5-6比較不同的腔體深度對壓電微幫浦流量之影響 ………………88
5-7平行式雙壓電致動器微幫浦之研究 ……………………………90
5-8 垂直式雙壓電致動器微幫浦之研究……………………………91
5-9 PDMS薄膜與PMMA結構體組成之壓電微幫浦(Sample 2) ……94
5-10 PDMS薄膜與PMMA結構體組成之壓電微幫浦(Sample 3) ……97
5-11單Nozzle/Diffuser幫浦之研究………………………………99
第六章 結論……………………………………………………………102
參考文獻 ………………………………………………………………104

[1] M. Koch ,A.G.R. Evans ,A. Brunnschweiler, ”The Dynamic Micropump Driven With a Screen Printed PZT Actuator”, Journal of Micromechanics and Microengineering , 8,pp.119-122,(1998)
[2] Dong Xu, Li Wang, ”Characteristics and fabrication of NiTi/Si diaphragm micropump” Sensors and Actuators A,Vol.93,pp.87-92,（2001）
[3] J. Jang, S.S. Lee, ”Theoretical and Experimental Study of MHD Micropump”, Sensors and Actuators A,Vol.80, pp.84-89,（2000）
[4] E. Meng, X.Q. Wang, H. Mak, Y.C. Tai, ”A Check-Valved
Silicon Diaphram Pump” The 13th IEEE International Conference
on Micro Electro Mechanical Systems, pp.23-27,（2000）
[5] O.C. Jeong, S.S. Yang,” Fabrication and test of a themopneumatic micropump with a corrugated p+ diaphram” Sensors and Actuators A ,Vol. 83,pp.249-255,（2000）
[6] S.H. Ahn, Y.K. Kim, “Fabrication and Experiment of A Planar Micro Ion Drag Pump”, Sensors and Actuators A ,Vol.70, pp.1-5, （1998）
[7] H.T.G. Van Lintel, ”A Piezoelectric Micropump Based on
Micromachining of silicon ” , Sensors and Actuators,
Vol.15,pp153-167,（1988）
[8] A. Olsson, G. Stemme and E. stemme, “A Valve-less Nozzle/Diffuser Based Fluid Pump”, Sensors and Actuators, Vol.39, pp.159-167,（1993）
[9] A. Olsson, G. Stemme and E. stemme, “A Valve-less Planar Fluid Pump Chambers”, Sensors and Actuators, Vol.46, pp.549-556（1995）
[10] A. Olsson, G. Stemme and E. stemme, ”Diffuser-element Design Inverstigation for Valve-less Pumps”, Sensors and Actuators, Vol.57, pp.688-695（1996）
[11] A. Olsson, G. Stemme and E. stemme, “Micromachined Flat-walled Valveless Diffuser Pumps”, Journal of microelectrmechanical Systems, Vol.6,No.2, pp.126-135（1997）
[12] A. Olsson, G. Stemme and E. stemme, ”Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps ”, Sensors and Actuators ,165-175,（2000）
[13] W. P. Mason, “Piezoelectric Crystals and Their Applicationto Ultrasonics＂, Van Nostrand, N. Y., 1950.
[14]Anders Olsson, “Valve-less Diffuser Micropumps, ” Instrumentation Laboratory Department of Signals, Sensors and Systems Royal Institute of Technology. (1998)
[15]鄭有青，”壓電無閥式微幫浦驅動系統之研製”，逢甲大學機械工程學系93 碩士班論文.
[16]劉光興，” 蠕動無閥式微幫浦之鑑別與分析”，國立清華大學動力機械工程學系86 碩士班論文.
[17]吳朗,”電子陶瓷-壓電”，(1994)
[18]F. M. White, Fluid Mechanics. New York: McGraw-Hill, 1986.
[19]J. P. Holman, Experimental Methods For Engineers. McGraw-Hill, (2001)
[20]Philip R. Bevington, D.Keith Robinson, Data Reduction and Error Analysis for The Physical Sciences.
[21] A. Olsson, G. Stemme and E. stemme,“The First Valve-less Diffuser Gas Pump. IEEE, pp.108-113 (1997)
[22] R.W. Fox, S.J. Kline ,”Flow Regime Data and Design Methods
for Curved Subsonic Diffusers” Journal of Basic Engineering,
Vol.84 ,pp.303-312（1962）
[23] 姜銀明，“ 無閥式壓電微幫浦 ”，雲林科技大學機械工程學系90 碩士論文.
[24] 楊凱祥，“ 電無閥式微幫浦之製造與量測分析“ ，雲林科技大學工程科技技術研究所92 博士論文.
[25] 洪正瀚，“無閥式壓電蜂鳴片微幫浦“ ，雲林科技大學機械工程學系92 碩士論文. [26]http://wwww.ges.cz/sheet/i/icl8038.pdf#search=''ICL%208038''