臺灣博碩士論文加值系統

　　本研究成功地利用微機電製程技術，將微流體操控系統、電化學感測電極與環境監控系統等整合於單一感測晶片中，微流體操控元件係以聚二甲基矽氧烷(Polydimethylsiloxane, PDMS)材料製作氣動式微幫浦與微閥門。電化學感測電極中，以氯化銀（AgCl）當作參考電極，並使用氧化層SLBTLO (SiO2-LiO2-BaO-TiO2-La2O3)作為酸鹼值感測器與ETH 129（ N, N, N’, N’-tetracyclohexyl-3-oxa-pentane-diaminde）離子選擇性薄膜作為鈣離子感測器，搭配環境監控系統－包括溫度監控系統、流速監控系統，可以精確與即時地回報環境參數，使電化學感測結果更正確，且可監控幫浦流速，瞭解檢體使用量等功能。本檢測晶片測試結果中，包括酸鹼值感測器之靈敏度達-57.74mV/pH與鈣離子靈敏度34.7mV/decade，且檢測時間只需200秒內即可同時測量出酸鹼值與鈣離子之濃度，與傳統大型檢測系統比較，本研究晶片不但可以同時檢測多種離子，且檢測檢體需要量從原本20㏄降至100μL，成為一快速且方便的手持式檢測工具。

　This paper presents a microfluidic chip capable of automatically performing precise and continuous pH measurements. It is an electrochemical sensing system integrated with a microfluid and environmental monitoring system based on MEMS-technology. The chip’s microfluidic control devices and microchannels are made of PDMS (Polydimethylsiloxane), and its reference electrodes fabricated with AgCl. One of the two sensing electrodes is fabricated by sputtering a layer of SLBTLO (SiO2-LiO2-BaO-TiO2-La2O3) for evaluating pH value. The ion selective membrane on the second electrode is made from ETH 129（ N, N, N’, N’-tetracyclohexyl-3-oxa-pentane-diaminde）which allows for the sensing of calcium ion concentration. Temperature sensors feed back information around the sensing electrodes to immediately calibrate the electrochemical sensors. A flow sensor monitors the flow rate of the micropumps to measure the volume of sample transported. The performance of the developed sensing chip is close to that of traditional sensing systems. The sensitivity of pH value and calcium ion concentration is -57.74mV/pH and 34.7mV/decade. The chip can simultaneously detect hydrogen and calcium ion concentration within 200 seconds and the sample size needed is 100μL. Additionally, a pneumatic fluid-control device facilitates the automatic sample injection and a continuous sensing operation. The developed system can provide a convenient and portable tool in a wide range of biomedical applications.

第一章　緒論．．．．．．．．．．．．．．．．．．．．．1
1-1　前言．．．．．．．．．．．．．．．．．．．．．． 1
1-2　生物微機電技術簡介 ．．．．．．．．．．．．．．．2
1-3　研究動機與目的 ．．．．．．．．．．．．．．．．．4
1-4　研究方法 ．．．．．．．．．．．．．．．．．．．．6
1-5　文獻回顧 ．．．．．．．．．．．．．．．．．．．．8
1-5-1　微幫浦文獻回顧 ．．．．．．．．．．．．．．．． 8
1-5-2　電化學感測器文獻回顧 ．．．．．．．．．．．．．16
1-6　論文架構 ．．．．．．．．．．．．．．．．．．．．19

第二章　理論與設計．．．．．．．．．．．．．．．．．．21
2-1　微流體操控系統 ．．．．．．．．．．．．．．．．．21
2-1-1　微幫浦與微閥門的原理探討 ．．．．．．．．．．．22
2-1-2　微流管道設計考量 ．．．．．．．．．．．．．．．26
2-2　環境監控系統 ．．．．．．．．．．．．．．．．．．30
2-2-1　溫度監控系統 ．．．．．．．．．．．．．．．．．31
2-2-2　流速監控系統 ．．．．．．．．．．．．．．．．．34
2-3　電化學感測系統 ．．．．．．．．．．．．．．．．．34
2-4　晶片設計尺寸參數 ．．．．．．．．．．．．．．．．38

第三章　感測晶片製作．．．．．．．．．．．．．．．．．43
3-1　製程規劃 ．．．．．．．．．．．．．．．．．．．．43
3-2　光罩設計與製作 ．．．．．．．．．．．．．．．．．44
3-3　基本製程技術 ．．．．．．．．．．．．．．．．．．45
3-4　晶片表面清潔 ．．．．．．．．．．．．．．．．．．45
3-4-1　黃光微影製程 ．．．．．．．．．．．．．．．．．47
3-4-2　金屬薄膜沈積製程 ．．．．．．．．．．．．．．．51
3-4-3　微注模技術 ．．．．．．．．．．．．．．．．．．52
3-4-4　晶片封裝與接合技術 ．．．．．．．．．．．．．．54
3-5　晶片製作流程 ．．．．．．．．．．．．．．．．．．55
3-5-1　PDMS微流管道製程 ．．．．．．．．．．．．．．56
3-5-2　玻璃基板電極製作 ．．．．．．．．．．．．．．．60
第四章　結果與討論 ．．．．．．．．．．．．．．．．．66

4-1　多功能感測晶片動作流 ．．．．．．．．．．．．．．66
4-2　微氣動幫浦與微閥門實驗與分析 ．．．．．．．．．．68
4-2-1　實驗架設 ．．．．．．．．．．．．．．．．．．．68
4-2-2　微幫浦與微閥門測試結果 ．．．．．．．．．．．．69
4-3　環境監控系統測試實驗與分析 ．．．．．．．．．．．71
4-3-1　流速感測系統測試實驗與分析 ．．．．．．．．．．71
4-3-2　溫控監控系統測試實驗與分析 ．．．．．．．．．．73
4-4　電化學感測系統測試實驗與分析 ．．．．．．．．．．75
4-4-1　酸鹼值測試實驗之配製與架設 ．．．．．．．．．．75
4-4-2　酸鹼值測試實驗結果與分析 ．．．．．．．．．．．75
4-4-4　鈣離子感測器實驗之藥品配製與架設 ．．．．．．．80
4-4-5　鈣離子感測器實驗結果與分析 ．．．．．．．．．．81

第五章　結論與未來展望 ．．．．．．．．．．．．．．．84
5-1　結論 ．．．．．．．．．．．．．．．．．．．．．．84
5-2　未來展望 ．．．．．．．．．．．．．．．．．．．．86

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