臺灣博碩士論文加值系統

　　透明導電薄膜（Transparent Conductive Oxides）簡稱TCO，其中以In2O3、SnO2與ZnO是目前最為常用的TCO材料。隨著3C產業的蓬勃發展，以LCD為首的平面顯示器（FDP）產量逐年增加，其中有以氧化銦錫簡稱ITO，已成為FDP透明電極材料。近年來，ZnO也是備受矚目的TCO材料，尤其是摻雜鋁的氧化鋅（ZnO:Al2O3，簡稱AZO），被認為最具有成為ITO代用品的潛力。由於製程的改善，本實驗室製作出的ZnO薄膜物性已經接近於ITO，且在生產成本及毒性方面，鋅則優於銦；尤其鋅的價格低廉，對於材料的普及是一大利點。利用透明導電薄膜作為透明加熱原件可用於觸控式面板、飛機玻璃、運動頭盔、甚至微小的生物晶片如PCR。本實驗利用磁控濺鍍法濺鍍AZO薄膜在玻璃基板，透過微機電技術製作不同面積微型AZO透明加熱元件以及白金薄膜作為微溫度感測器，不同電阻值的微加熱器透過不同的電壓源供應，量測加熱速率；並透過30次升溫與降溫觀察微加熱器的加熱效能、強制對流中的各種加熱效能並比較不同面積的的各種加熱性質。

　Common transparent conductive oxides (TCO) include indium tin oxide (ITO), SnO2, and ZnO. Among them, ITO thin films contain a very high concentration of indium, which is a very expensive material. On the other hand, alumina doped zinc oxide (ZAO) has attracted much attention as a transparent conductive thin film material because of its low cost for large scale applications and enhanced performance in, for example, solar cells. While many applications are found for these TCO, the use of TCO thin films as transparent resistive heaters represents an important one. Transparent resistive heaters are used for studying boiling bubble dynamics, to warm display panels, in sports helmets, in military optics, in and cell-free protein synthesis. In this paper, we report our investigation on the use of transparent AZO thin films as the heater in micro-systems for bio-analysis. AZO thin films with different material characteristics were first prepared on glass substrates using a magnetron sputter deposition technique under different conditions. Various heaters were then made from the thin films using a microfabrication technique. The temperature control for the heaters was made possible via the use of platinum thin film sensors. Temperature versus consumption power, resistive heating rate, passive cooling rate, thermal cycling, resistance to temperature conversion, temperature response, temperature distribution are reported.

摘要 I
總目錄 III
圖目錄 VI
表目錄 XI
第一章 序論 1
1-1前言 1
1-2研究目的 3
第二章 理論基礎與文獻回顧 4
2-1透明導電膜的介紹 4
表2-1透明導電膜的應用 7
2-2微加熱元件 8
2-3微型溫度感測器 9
第三章 實驗方法 13
3-1簡介 13
3-2微AZO加熱器製程簡介 13
3-2-1晶片清潔 16
3-2-2磁控濺鍍系統 17
3-2-3 AZO微加熱器製作(微影製程) 21
3-2-4金/白金(金屬剝離製程) 27
第四章 結果與討論 31
4-1 AZO薄膜製作及性質的分析 31
4-1-1沉積速率 31
4-1-2電性分析 31
4-1-3光學性質 39
4-2微機電製程 39
4-2-1微影製程 39
4-2-2金屬剝離製程（Lift-off） 43
4-2-3 AZO蝕刻 46
4-3溫度感測元件 46
4-3-1 Pt/Ti薄膜TCR值 46
4-4 微AZO加熱性質 51
4-4-1 溫度功率關係 51
4-4-2熱循環 55
4-4-3強制對流的加熱效能 61
4-4-4強制對流的熱循環 65
4-5放大2倍溫度感測元件 70
4-5-1 Pt/Ti薄膜TCR值和溫度感測結果 70
4-6放大2倍微AZO加熱性質 73
4-6-1溫度功率關係 73
4-6-2熱循環 80
4-6-3強制對流的加熱效能 85
4-6-4強制對流的熱循環 90
4-7不同面積AZO微加熱器比較 96
4-7-1加熱速度比較 96
4-7-2強制對流加熱速度比較 99
第五章 結論與未來展望 101
第六章 參考文獻 103

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