跳到主要內容

臺灣博碩士論文加值系統

(44.221.73.157) 您好!臺灣時間:2024/06/15 12:49
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

: 
twitterline
研究生:陳輝達
研究生(外文):Hui-Ta Chen
論文名稱:玻璃對金屬接合技術之研究
論文名稱(外文):The Study of Glass-to-metal Sealing Technology
指導教授:周長彬周長彬引用關係
指導教授(外文):Chang-Pin Chou
學位類別:碩士
校院名稱:國立交通大學
系所名稱:機械工程系所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2005
畢業學年度:93
語文別:中文
論文頁數:124
中文關鍵詞:玻璃金屬玻璃對金屬接合
外文關鍵詞:glassmetalglass-to-metalsealing
相關次數:
  • 被引用被引用:10
  • 點閱點閱:1123
  • 評分評分:
  • 下載下載:157
  • 收藏至我的研究室書目清單書目收藏:1
玻璃對金屬接合技術主要應用於高氣密性與良好絕緣的元件上,機械、光電、電信、汽車、生醫等產業都屬於此技術應用的範疇。玻璃對金屬接合上最常遇到的問題可分為玻璃與金屬的黏著性不佳與玻璃的破壞,如何精準控制金屬預氧化程度與接合界面的潤濕性,便成為玻璃對金屬接合技術中最重要的課題。本篇論文以研究玻璃對金屬接合相關的技術,包括加熱溫度及恆溫時間對Kovar合金氧化率的影響、玻璃與金屬間潤濕性的變化、玻璃與金屬接合情形的探討。實驗材料有Kovar鐵鎳鈷合金與ASF110、ASF200R及ASF700三種玻璃粉末。實驗方法採用石英管狀爐作為加熱設備,進行氧化、潤濕性與接合等三項實驗。由實驗結果發現Kovar合金以爐溫700℃維持10分鐘之操作程序,可得到最適合於玻璃對金屬密封接合用之氧化層;各類型玻璃粉於預先氧化處理的Kovar合金試片上有較佳的潤濕性,於無預先氧化處理的Kovar合金試片上的潤濕性較差;在玻璃對金屬三明治接合中,矽元素可擴散進入Kovar合金區,鐵鈷鎳元素可擴散進入玻璃區,其中以處理溫度為980℃,爐內氣氛為氬氣之實驗程序,有助於增加擴散距離形成較佳的鍵結能力。
Glass-to-metal sealing technology is usually used for the device of high hermeticity and excellent electrical insulation. The main application areas include mechanical, optoelectronics, telecommunication, automotive and biomedical industry. There are two problems in glass-to-metal sealing. One is the bad adhesion between glass and metal, and the other is the fracture of glass. For the glass-to-metal sealing technology, to control precisely metal oxide layer and wetting between glass and metal interfacial zone are two important factors. The purpose of this paper is to study the technology about glass-to-metal sealing. The first is to determine the influence of temperature and time to oxidation of Kovar alloy. The second is to study the wetting behavior between glass and metal interface. The third is to investigate the situation of glass-metal sandwich seal. Kovar Fe-Ni-Co alloy, glass powders ASF110, ASF200R and ASF700 were used in the study. Oxidation experiment, wetting experiment and sealing experiment were conducted. From the experiment results, it is found that the best preoxidation treatment for sealing is heating to 700℃ and maintaining for 10 min. Wetting on preoxidative Kovar alloy is better than Kovar alloy with no preoxidation treatment. Si can diffuse into Kovar alloy and Fe-Co-Ni can diffuse into glass in the glass-metal sandwich seal. Treatment of heating to 980℃in argon atmosphere can increase the distance of diffusion and to enhance the glass-to-metal adhesion.
[1] I. W. Donald, “Preparation, properties and chemistry of glass- and glass-ceramic-to-metal seals and coatings”, Journal of Materials Science, 28, pp.2841-2886, 1993.
[2] 陳力俊編著,「微電子材料與製程」,中國材料科學學會,民國89年。
[3] Ch. Ed. Guillaume, Compt. Rend. Acad. Sci. Paris 170, 1554, 1920.
[4] F.Y. Huang, H.M. Chow, S.L. Chen, K.A. Yan, “The machinability of KOVAR material”, Journal of Materials Processing Technology, 87, pp.112-118, 1999.
[5] ASTM, 1996 Annual book of ASTM standards:section 10:vol. 10. 04, ASTM, 1996.
[6] Arun K. Varshneya, “Stresses in Glass-to-Metal Seals”, Treatise on Materials Science and Technology, Vol. 22 Academic Press, New York. pp.241-306, 1982.
[7] Kotaro Honda, Physics and applications of invar alloys, Maruzen company, ltd., Tokyo, 1978.
[8] Glass Technical Handbook, http://www.schott.com/epackaging/english/download/
[9] 洪國欣,「7056玻璃與Kovar合金密封接合技術研究」,國立台灣科技大學,碩士論文,民國90年。
[10] 柯賢文,「腐蝕及其防制」,全華科技圖書,pp.227-230,1994。
[11] 潘金火、曾光宏、呂明賢、汪立德、楊子青,「玻璃與金屬密封接合技術簡介」,銲接與切割,第十五卷第一期,pp.19-20,中華民國94年3月。
[12] Marc Mantel, “Effect of double oxide layer on metal-glass sealing”, Journal of Non-Crystalline Solids, 273, pp.294-301, 2000.
[13] R. B. Adams and J. A. Pask, J. Am. Ceram. Soc., 44, No.9, p.430, 1961.
[14] M. P. Borom and J. A. Pask, J. Am. Ceram. Soc., 49, No.1, p.1, 1966.
[15] J. A. Pask and R. M. Fulrath, J. Am. Ceram. Soc., 45, No.12, p.592, 1962.
[16] J.A. Pask, “New Techniques in Glass-to-Metal Sealing.” Proc. of IRE., vol. 36[2], pp.286-289, 1948.
[17] Walter F. Yext, Bruce J. Shook, Wayne S. Katzenberger, Robert C. Michalek, “Improved Glass-to-Metal Sealing Through Furnace Atmosphere Composition Control,” IEEE Transaction on Components, Hybrids, and Manufacturing Technology., Vol. CHMT-6, No.4, pp.455-459, 1983.
[18] W. E. Moddeman, C. W. Merten, D. P. Kramer, Technology of glass, ceramic, or glass-ceramic to metal sealing, ASME, New York, 1987.
[19] H. L. McCollister and S. T. Reed, “glass-Ceramic Seals to Inconel”, U. S. patent 4 414 282, Nov. 8, 1983.
[20] J. A. McGurty, R. Nekkanti, E. Ross, and J. Moteff, “The Properties and Metallurgy of the High Aluminum, Low Chromium Content Super Stainless Steel Alloys”, University of Cincinnati/MSED, University of Cincinnati Report Number 1002, Sept. 14, 1984.
[21] B. W. King, H. P. Tripp, W. H. Duckworth, “Nature of Adherence of Porcelain Enamels to Metals”, J. Am. Ceram. Soc., 42(11), pp.504-525, 1959.
[22] R. M. King, J. Amer. Ceram. Soc. 16, pp.232, 1933.
[23] J. H. Healy and A. I. Andrews, ibid. 34, pp.207, 1951.
[24] W. N. Harrison, J. C. Richmond, J. W. Pitts, and S. G. Benner, ibid. 35, pp.113, 1952.
[25] H. F. Staley, ibid. 17, pp.163, 1934.
[26] A. Dietzel, Ceram. Abst. 13, pp.250, 1934.
[27] Idem. ibid. 14, pp.107, 1935.
[28] W. W. McLellan and E. B. Shand, (eds), “Glass Engineering Handbook”, 3rd Edn, McGraw-Hill, New York, 1984.
[29] H. Rawson, “Properties and Application of Glass”, Elsevier, Amsterdam, 1980.
[30] G. W. Scherer, “Relaxation in Glass and Composites”, Wiley, New York, 1986.
[31] Electronic Materials Handbook, Vol. 1, Packaging, ASM International,1989.
[32] W. H. Kohl, Handbook of Materials and Techniques for Vacuum Devices, Reinhold, 1967.
[33] J.A. Pask, J. Am. Ceram. Soc., Vol. 66, No. 11, pp.1587, 1987.
[34] V. F. Zachay, D.W. Mitchell, S.P. Mitoff, and J.A. Pask, J. Am. Ceram. Soc., Vol. 36, pp.84, 1953.
[35] R. M. Fulrath, S.P. Mitoff, and J.A. Pask, J. Am. Ceram. Soc., Vol. 40, pp.84, 1957.
[36] M. P. Borom, Glass Ind., Vol. 59, No. 4, pp.19, 1978.
[37] A. Zanchetta, P. Lefort, “Thermal Expansion and Adhesion of Ceramic to Metal Sealings : Case of Porcelain─Kovar Junction”, Journal of the European Ceramic Society., 15, pp.233-238, 1995.
[38] A. Zanchetta , P. Lortholary, P. Lefort, “Ceramic to Metal Sealings : interfacial reactions mechanism in a porcelain─kovar Junction”, Journal of Alloys and Compounds., 228, pp.86-95, 1995.
[39] 黃和悅、陳輝達、蕭永湶、周長彬、曾光宏,「Metal-Can雷射二極體組件之玻璃與金屬密封接合技術」,銲接與切割,第十五卷第一期,pp.24-28,中華民國94年3月。
[40] A. Taylor, “Ceramics joining – glass to metal seals”, http://www.twi.co.uk/.
[41] J. F. Lancaster, “Metallurgy of Welding”, Chapman & Hall, 1993.
[42] Glass-to-metal seals Technical Handbook, http://www.schott.com/epackaging/english/download/
[43] Automotive Brochure, http://www.schott.com/epackaging/english/download/
[44] Company Brochure, http://www.schott.com/epackaging/english/download/
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top