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研究生:洪智成
研究生(外文):Chin-Cheng Hung
論文名稱:利用非平衡磁控濺鍍氮化鋯(ZrN)薄膜於AZ31B鎂合金上顏色及附著性之研究
論文名稱(外文):A study of color and adhesion for ZrN coating on AZ31B magnesium alloys by unbalanced magnetron PVD
指導教授:傅兆章傅兆章引用關係
指導教授(外文):Tsow-Chang Fu
學位類別:碩士
校院名稱:國立高雄第一科技大學
系所名稱:機械與自動化工程所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2005
畢業學年度:93
語文別:中文
論文頁數:75
中文關鍵詞:AZ31B 鎂合金濺鍍氮化鋯顏色田口品質
外文關鍵詞:Taguchi-methodColorZrN(Zirconium nitride)SputteringAZ31B Magnesium alloy
相關次數:
  • 被引用被引用:12
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  • 收藏至我的研究室書目清單書目收藏:1
鎂合金具有輕量化、散熱性佳、可防電磁干擾、高強度、可塑性高及高可回
收性等優點,所以被廣泛用於高科技工業產品之手機殼件、液晶投影機殼件、筆
記型電腦外殼、汽車零組件等應用。但因鎂合金的電極電位低(-2.34V),化學性甚
強,所以必須經由適當的表面處理達到耐蝕、耐磨及同時具有表面美觀等性質,
因此鎂合金鍛造製品選用適當表面處理實為當務之急。
本研究主要是於鍛造用鎂合金AZ31B 上進行ZrN 鍍膜之被覆,其目的為在鎂
合金上鍍出不同顏色之鍍膜做為鎂合金製品之綠色發色製程及增加鍍膜與鎂合金
基材之附著力。本計畫試驗時,利用田口品質法採L9 進行附著力最佳製程參數設
計,主要因子為氮氣、氬氣、偏壓及濺鍍時間。 在針對最佳附著力參數時則改變
單一因子(氮氣流量),觀察薄膜表面顏色變化的情形。
實驗結果顯示,氮化鋯(ZrN)隨氮氣流量4sccm 逐漸增加至30sccm 時,其鍍膜顏色從淡銀黃色變成金黃色再變成褐色再變成灰褐色最後變成灰色,且其硬度可達HV1400~HV2600。因此被覆ZrN除可提供鎂合金製品發色功能外,可提升鎂合金製品之美觀性、耐磨耗性、耐腐蝕性及其表面硬度,進而提高鎂合金製品之附加價值。
Magnesium alloy has lightweight, good thermal conduction, EMI resistance, highstrength weight ratio, high formability, high reusing ability and etc., so it can be used widely on variety products in high technology industries, such as the shells of mobile phones; overhead projectors of liquid crystal; notebooks and the different parts of transportation industry. Besides magnesium alloy has low electrode potential value (-2,34V) so that chemical reaction is very active, it must adopt the suitable surface treatment to promote its corrosion resistance as well as wear resistance. Therefore, it is urgent to find out a suitable surface treatment on magnesium alloy products for industrial application.
In this study, we deposited ZrN films on AZ31B magnesium alloys by unbalanced magnetron PVD, the purpose is to produce the different colors on Magnesium alloy and to promote the coating adhesion. In our experiments, we used Taguchi-method trying to find out the best processing parameters for adhesion. Nitrogen flow, argon flow, bias and sputtering time are the major process factors.
By the experiments , we find the following results such as increasing nitrogen flow from 4sccm to 30sccm gradually, The color of ZrN coatings varied from light silver-yellow to gold-like, to brown, to gray-brown and finally to gray. The coated film can be reach hardness between Hv1400~ Hv2600.By those characteristics, ZrN coating have the coating different colors which can improve surface appearance. Due to its high surface hardness, it also can be applied in wear resistance.
目 錄
中文摘要...........................................................................................................................I
ABSTRACT ................................................................................................................... II
致謝................................................................................................................................III
目 錄............................................................................................................................IV
圖目錄............................................................................................................................VI
表目錄.........................................................................................................................VIII
第一章 緒論.................................................................................................................... 1
1.1 前言........................................................................................................................ 1
1.2 研究動機與目的.................................................................................................... 2
第二章 文獻回顧............................................................................................................ 3
2.1 濺鍍技術................................................................................................................ 3
2.1.1 濺鍍的原理..................................................................................................... 3
2.1.2 濺鍍技術種類................................................................................................. 6
2.1.3 封閉式非平衡磁控濺鍍............................................................................... 10
2.2 ZRN 薄膜的性質................................................................................................... 12
2.3 硬度測試.............................................................................................................. 20
2.4 刮痕試驗(SCRATCH TEST) ..................................................................................... 22
2.5 田口實驗計畫法.................................................................................................. 23
第三章 實驗設計與配置.............................................................................................. 25
3.1 實驗設計與目的.................................................................................................. 25
3.2 實驗步驟與流程.................................................................................................. 26
3.3 實驗基材與設備.................................................................................................. 29
3.4 鍍膜性質分析...................................................................................................... 30
3.4.1 鍍膜厚度檢測............................................................................................... 30
3.4.2 鍍膜硬度檢測............................................................................................... 30
3.4.3 刮痕試驗....................................................................................................... 30
3.4.4 鍍膜顏色檢測............................................................................................... 30
3.4.5 X-ray 繞射分析.............................................................................................. 31
3.4.6 SEM 顯微結構觀察與成份分析................................................................... 31
3.4.7 GDS 鍍層成份分佈分析............................................................................... 31
第四章 結果與討論...................................................................................................... 32
4.1 田口實驗結果...................................................................................................... 32
4.2 單一因素實驗...................................................................................................... 34
4.3 鍍膜硬度檢測結果分析...................................................................................... 35
v
4.4 鍍膜厚度檢測結果分析...................................................................................... 36
4.5 鍍膜顏色分析...................................................................................................... 39
4.6 刮痕試驗結果分析.............................................................................................. 42
4.7 薄膜之X-RAY 繞射分析結果分析...................................................................... 43
4.8 SEM 顯微結構觀察.............................................................................................. 50
4.9 GDS 鍍層成分分析.............................................................................................. 51
第五章 結論.................................................................................................................. 57
第六章 未來研究方向與建議...................................................................................... 58
第七章 參考文獻.......................................................................................................... 59
附錄一............................................................................................................................ 61
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