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研究生:洪裕峰
論文名稱:鍺銻碲三元合金與鈦化鎢二元合金之附著性研究
指導教授:周麗新
學位類別:碩士
校院名稱:國立清華大學
系所名稱:材料科學工程學系
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2004
畢業學年度:93
語文別:中文
論文頁數:96
中文關鍵詞:鍺銻碲鈦化鎢附著性
外文關鍵詞:GeSbTeTiWadhesion
相關次數:
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  • 點閱點閱:178
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  本研究主要探討不同微結構狀態的記憶層與金屬電極層間的附著性,研究結果發現初鍍膜表面最平坦,FCC相次之,HCP相最粗糙,而實驗所得的吸附力是初鍍膜最佳,FCC相次之,HCP相最差,而隨著不同微結構的轉變,利用AFM也可以明確觀察到膜層厚度(體積)隨微結構的改變,轉變為FCC相膜厚相對於初鍍膜減少7%,轉變成HCP相膜厚相對於初鍍膜會減少9.1%,在記憶層和電極雙層初鍍膜中發現到有明顯的Te原子擴散入電極的現象,當溫度上升到600℃,會有Si原子擴散進入TiW層中,而Si基板中的Ge原子含量也明顯增加。
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