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研究生:王嘉誠
論文名稱:即時量測殘餘應力之微機電感測器
論文名稱(外文):A Real-Time Micromachined Stress Sensor for MEMS
指導教授:陳榮順陳榮順引用關係
學位類別:碩士
校院名稱:國立清華大學
系所名稱:微機電工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2005
畢業學年度:93
語文別:中文
論文頁數:58
中文關鍵詞:微機電系統殘餘應力
相關次數:
  • 被引用被引用:0
  • 點閱點閱:183
  • 評分評分:
  • 下載下載:32
  • 收藏至我的研究室書目清單書目收藏:0
在微機電系統中,量測殘餘應力是一個相當重要的課題,因為殘餘應力會影響到元件的性能。因此,一個好的感測器,必須監控並量測薄膜的殘餘應力。目前已經被研發出來的感測器有:後挫曲法、Guckle ring法以及微游標尺等方法。然而,這些量測方法在封裝後,會因為其微結構的變形不能再利用光學方法來量測。為了解決此一問題,本文提出了一個能即時讀取張應變與壓應變的感測器,而且輸出是以電壓的形式。模擬的結果顯示,此方法可以藉由設計微指針以及量測探針結構的尺寸來放大位移量,以提高解析度;也能夠利用兩結構間的距離來決定量測範圍。
目錄
摘要 I
誌謝 II
目錄 III
圖目錄 IV
表目錄 VI
第一章 緒論 1
1.1 研究動機 1
1.2 文獻回顧 2
1.3 本文大綱 7
第二章 系統架構與分析 8
2.1 微指針結構 10
2.2 量測探針結構 13
2.2.1 溫度分佈 13
2.2.2 角度與位移量 15
第三章 模擬分析結果 18
3.1 殘餘應力分析 18
3.2 量測探針機構的熱電效應分析 26
3.2.1 V型彎曲懸樑微結構的分析 27
3.2.2 量測探針整體機構的分析 31
3.3 尺寸設計分析 35
第四章 製程設計與實驗結果 38
4.1 製程設計 38
4.2 實驗結果-微指針結構 41
4.3 實驗結果-量測探針結構 46
4.4 量測系統 50
第五章 結論及未來工作 54
參考文獻 56
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