臺灣博碩士論文加值系統

本研究首次利用鋅鎳擴散式鈮酸鋰光波導，以Z切的基板製作操作於藍光波段(473nm)之直波導及馬赫任德電光調變器。由實驗結果發現，鋅鎳擴散式直波導的寬度為1.5um時導單模態；當鎳與鋅的厚度分別為100Å與500Å時，以830°C的溫度擴散60分鐘之波導具有最佳的光場侷限性，且可避免鈦擴散式光波導之鋰離子外擴散問題。操作在藍光波段下的馬赫任德電光調變器，在電極長度0.9公分時，半波電壓為6.5伏特，而訊熄比則約為7dB。

In this work, Zn-Ni:LiNbO3 single-mode waveguides and Mach-Zehnder modulators operated at blue-laser wavelength are demonstrated for the first time. To support the fundamental mode only, the largest linewidth of the Zn-Ni co-diffused waveguides should be about 1.5um, which is smaller than that of Ti-diffused waveguides, 2.5um. The optical confinement of the waveguides is optimized by diffusing at 830ºC for 60min when the thicknesses of nickel and zinc are 100Å and 500Å, respectively. Moreover, the Zn-Ni:LiNbO3 waveguides are free of lithium out-diffusion as that found in Ti:LiNbO3 waveguides. The Mach-Zehnder modulators operating at blue-laser wavelength are also demonstrated, the half voltage and the extinction ratio of the device are found to be 6.5V and 7dB, respectively.

第一章 導論 1
1-1 研究背景 1
1-2 研究動機 3
1-3 內容簡介 7
第二章 藍光鋅鎳擴散式波導之設計 8
2-1 鎳擴散式光波導簡介 8
2-2 鎳擴散式鈮酸鋰光波導簡介 10
2-3 鋅鎳擴散式鈮酸鋰光波導簡介 11
2-3.1 鋅鎳擴散式鈮酸鋰光波導 11
2-3.2 光折效應 12
2-4 藍光鋅鎳擴散式波導之光罩設計 15
第三章 藍光鋅鎳擴散式波導之製作 17
3-1 藍光鋅鎳擴散式波導之製程步驟 17
3-1.1 晶片切割及清洗 18
3-1.2 微影技術 19
3-1.3 金屬薄膜蒸鍍 19
3-1.4 高溫擴散 20
3-1.5 晶片研磨拋光 22
3-1.6 波導特性量測 23
3-2 藍光鋅鎳擴散式波導之製作結果與討論 25
3-2.1 波導寬度對模態的影響 25
3-2.2 溫度對光場分布的影響 26
第四章 藍光鋅鎳擴散式馬赫任德電光調變器之製作 28
4-1 元件原理簡介 28
4-2 元件設計與製程步驟 35
4-2.1元件設計 35
4-2.2 製程步驟 36
4-3 馬赫任德電光調變器之量測結果 40
4-3.1 量測系統架設 40
4-3.2 調變訊號之量測 40
第五章 結論與未來展望 43
5-1 結論 43
5-2 未來展望 43
參考文獻 45
中英文名詞對照表 48

[1]N. Flaherty, ”Battle of the blues,” IEE Review, Vol.50, Issue 4, pp.48-50 April, 2004.
[2]D. Fluck and P. Giinter, “Tunable blue light generation by sum-frequency mixing of AlGaAs and InGaAs laser diodes in KNbO3,” Electron. Lett, Vol.32, No.10, pp.901-903, 1996.
[3]S. Shichijyo, K. Yamada, S. Takemura, Y. Oeda, A. Ohkubo, and K. Muro, “Blue and blue-green lasers by intracavity sum-frequency generation with potassium niobate,” Lasers and Electro-Optics, CLEO ''96, pp. 465-466, 1996.
[4]M. Rottschalk, J. P. Ruske, K. Hornig, S. Steinberg, G. Hagner, and A. Rasch, ”Single mode channel waveguides and electrooptic modulators in KTiOPO4 for the short visible wavelength region,” J. Lightwave Technol., vol.13, no.10, pp.2041-2048, 1995.
[5]T. F. Wiener, “The role of blue/green laser systems in strategic submarine communications,” IEEE trans. Comm., vol.28, no.9, pp.1602-1607, 1980.
[6]D. L. Begley, “Laser cross-link systems and technology,” IEEE Communication Magazine, August, pp.126-132, 2000.
[7]S. K. Renukunta and D. H. Wells, ”optical memory and blue lasers,” IEEE Potentials, Vol.13,Issue 4, pp.14-18, 1994.
[8]D. F. Clark, A. C. G. Nutt, K. K. Wong, P. J. Laybourn, and D. L. Rue, “Characteristic of proton exchanges slab waveguide on Z-cut LiNbO3,” J. Appl. Phys., vol.40, pp.6218-6220, 1983.
[9]J. Noda, M. Fukuma, and A. Saito, “Effect of Mg diffusion on Ti-diffused LiNbO3 waveguide,” J. Appl. Phys., vol.49, no.6, pp.3150-3154, 1978.
[10]魏培坤, “金屬擴散式鈮酸鋰光波導之製造與應用,” 國立台灣大學電機工程學研究所博士論文, 1994.
[11]W. M. Young, M. M. Fejer, M. J. F. Digonnet, A. F. Marshall, and R. S. Feigelson, “Fabrication, characterization and index profile modeling of high-damage resistance Zn-diffused waveguides in congruent and MgO: lithium niobate,” J. Lightwave Technol., vol.10, no.9, pp.1238-1246, 1992.
[12]W. M. Young, R. S. Feigelson, M. M. Fejer, M. J. F. Digonnet, and H. J. Shaw, “Photorefractive-damage-resistant Zn-diffused waveguides in MgO: LiNbO3,” Opt. Lett., vol.16, no.13, pp.995-997, 1991.
[13]B. Herrerros and G. Lifante, “LiNbO3 optical waveguides by Zn diffusion from vapor phase,” Appl. Phys. Lett., vol.66, no.20, pp.1449-1451, 1995.
[14]R. Nevado and G. Lifante, “Characterization of index profiles of Zn-diffused LiNbO3 waveguides,” J. Opt. Soc. Am. A, vol.16, no.10, pp.2574-2580, 1999.
[15]F. Abdi, M. Aillerie, M. Fontana, P. Boursom, T. Volk, B. Maximov, S. Sulyanov, N. Rubinina, and M. Wohlecke, “Influence of Zn doping on electrooptical properties and structure of lithium niobate crystals,” Appl. Phys. B, vol.68, pp.795-799, 1999.
[16]F. Schiller, B. Herrerros and G. Lifante, “Optical characterization of vapor Zn-diffused waveguides in lithium niobate,” J. Opt. Soc. Am. A, vol.14, no.2, pp.425-429, 1997.
[17]涂瑞清, ”長波長鋅擴散式鈮酸鋰光波導元件之研製,” 國立台灣大學電機工程學研究所博士論文, 2000.
[18]廖裕評, “金屬擴散式極化分離器之研製,” 國立台灣大學電機工程學研究所博士論文, 1996.
[19]楊志華, “鋅鎳同步擴散式鈮酸鋰光波導之研製,” 國立台灣大學電機工程學研究所碩士論文, 1996.
[20]李峻霣, “鋅鎳擴散式鈮酸鋰光極化分離器之研製,” 國立台灣大學光電工程學研究所碩士論文, 2000.
[21]徐文浩, “鋅鎳擴散式鈮酸鋰光波導在可調式極化分離器之應用,” 國立台灣大學光電工程學研究所碩士論文, 2001.
[22]A. M. Glass, “The photorefractive effect,” Opt. Eng., vol.17, no.5, pp.470-479, 1978.
[23]G. T. Harvey, “The photorefractive effect in directional coupler and Mach-Zehnder LiNbO3 optical modulators at a wavelength of 1.3µm,” J. Lightwave Technol., vol.6, no.6, pp.872-876, June 1988.
[24]R. A. Becker and R. C. Williamson, “Photorefractive effects in LiNbO3 channel waveguides: model and experimental verification,” Appl. Phys. Lett., vol.47, no.10, pp.1024-1026, 1985.
[25]李牧家, “鈮酸鋰藍光波導元件之研製,” 國立台灣大學光電工程學研究所碩士論文,2004.
[26]W. E. Martin, “A new waveguide switch/modulator for integrated optics,” Appl. Phys. Lett., vol.26, no.10, pp.562-564, 1975.
[27]R. G. Hunsperger, “Integrated optics: theory and technology” 5th Edition, Springer-Verlag, 2002.
[28]張世軍, “鈮酸鋰電光調變器之改良研究,” 國立台灣大學電機工程學研究所博士論文, 1999.
[29]H. A. Haus, “Waves and fields in optoelectronics.” Prentice-Hall, 1985.
[30]R. Ramaswami and K. N. Sivarajan, “Optical networks: a practical perspective,” Morgan Kaufmann, 1997.