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研究生:楊明樺
研究生(外文):Min-Hua Yang
論文名稱:利用噴墨技術在塑膠基板上製作有機薄膜電晶體
論文名稱(外文):The Fabrication of Organic Thin Film Transistor on Plastic Substrate by Inkjet-printing Technology
指導教授:李世光李世光引用關係
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:工程科學及海洋工程學研究所
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2005
畢業學年度:93
語文別:中文
論文頁數:84
中文關鍵詞:有機薄膜電晶體噴墨塑膠基板
外文關鍵詞:organic transistorinkjet printingplastic substrate
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以有機化合物或是高分子材料在塑膠基材上製作電子電路,一直是非常重要的研究主題。在塑膠基板,以有機化合物或是高分子材料作為電晶體元件就可以非常便宜的噴墨(inkjet printing)方式大量生產大幅降低成本,而以噴墨製程製作電子原件最大的好處是設備簡單,不需要光罩或是母模,但是其缺點是解析度較差。2000年劍橋大學首先發表以改變基材上親疏水性,來改善噴墨系統的精準度問題,該此技術可製作閘極寬度僅5μm的全噴墨製程有機薄膜電晶體,而後陸續幾年內仍以噴墨技術為發展方向,在有機薄膜電晶體上仍有創新突破。
本論文研究方向,首先架設出整體之實驗流程架構裝置,再以文獻研究為基礎,希望能夠達成用噴墨製作在塑膠基板上製作全有機之薄膜電晶體。目前以PMMA作為絕緣層,P3HT為半導體層以及PEDOT/PSS作為電極,在透明塑膠片上成功的滴鑄出全有機的元件,同時無漏電流現象發生;但元件閘極電壓對通道的控制能力相當薄弱,將來會進一步改進。
Research into organic thin film transistor (OTFT) has been rapidly growing in the past few years. The use of organic semiconductor devices promises low-cost electronics over large area, using solution based deposition techniques under ambient condition. By direct printing of solution process materials provide a new route to the fabrication of organic thin film transistors. Although the natural resolution with inkjet printing system is limited, the resolution of critical dimension can be improved by surface energy patterns causing inks to be repelled and dewetting form pre-defined regions on substrate. With this technique, the critical channel length dimensions can be lowered down to sub-micrometer range. Printing sub-micron electrode spacing for organic transistors is an important step towards high performance low-cost organic plastronics. More studies will be needed to achieve the reproducibility and process stability toward this goal. The OTFT process mentioned was fabricated on glass or silicon wafer with one lithography step on patterning the channel region. Here, a new process based on hot-embossed nano-imprint was proposed to eliminate the lithography step, and the processing temperature through the whole process is confined below the temperature plastic substrates can sustained.
第一章 緒論 1
1.1. 研究背景 1
(1) 塑膠電路 1
1.2. 研究動機 2
(1) 英國劍橋研究團隊在有機薄膜電晶體之創新突破 2
1.3. 論文架構 7
第二章 文獻回顧與探討 8
2.1. 有機薄膜電晶體發展 8
(1) 有機小分子與共軛高分子系統 10
(2) 有機材料的載子遷移率( Mobility ) 12
2.2. 場效電晶體元件原理 13
(1) 金屬-半導體接面特性 13
(2) 場效電晶體操作原理 14
2.3. 軟性塑膠基板之應用 16
(1) 直接技術 16
(2) 二次轉移技術於塑膠基板上 16
第三章 實驗架構與方法 18
3.1. 有機半導體材料( Organic Semiconductor ) 18
(1) P3HT 19
(2) Pentacene 22
3.2. 介電材料( Dielectric Materials ) 24
(1) 低介電材料之極化現象 25
(2) PMMA 26
(3) PVP 27
(4) SOG 28
3.3. 導電高分子( Conductive Polymer ) 29
(1) PEDOT/PSS 30
(2) Polypyrrole 33
(3) PANI 33
3.4. 有機材料成膜性因素 34
(1) 咖啡環現象( Coffee Ring Effect) 34
(2) 溶劑揮發與蒸氣壓 36
3.5. 軟性塑膠基板材料選擇 37
(1) 阻隔水氣與氧氣的問題考量 37
(2) 低溫製程的問題考量 38
3.6. 噴墨實驗系統架設 39
(1) Drop On Demand (DOD)壓電噴頭 39
(2) 微液滴觀測系統 43
(3) 位移平台與控制介面 46
(4) 噴墨系統架設完成 47
3.7. 有機薄膜電晶體製作流程架構 47
(1) 以低阻值矽晶片作為bottom gate 48
(2) 以ITO玻璃作為bottom gate 50
(3) 直接以軟性塑膠作為基板 51
第四章 實驗結果與討論 53
4.1. 簡易檢測絕緣層品質機制 53
(1) 絕緣體與介電材料破壞 53
(2) 有機介電絕緣體材料缺陷 54
(3) 絕緣層與漏電流檢測 55
4.2. 材料試驗與量測 60
(1) 膜厚導電度量測 60
(2) 電容量測 63
4.3. 元件製作與量測 65
(1) 低阻值矽晶片為基板 65
(2) 塑膠基板上製作全有機薄膜電晶體 72
4.4. 噴墨系統整合上之瓶頸 76
(1) 噴頭阻塞與穩定性 76
(2) 第一顆液滴噴出之操控性 77
(3) 液滴在基板上的潤濕行為 78
第五章 結論 80
5.1. 結論 80
6 參考文獻 83
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[4] http://www.epson.co.jp/e/newsroom/2005/news_2005_02_09.htm
[5] H. Sirringhaus, P.J.Brown, R.H.Friend, M.M. Nielsen, in self-organised, conjugated polymer field-effect transistors”, Synthetic Metals,111-112(2000)129-132
[6] Zhenan Bao, Ananth Dodabalapur, and Andrew J.Lovinger,”Aoluble and processable regioregular poly(3-hexylthiophene) for thin film field-effect transistor applications with high mobility”, Appl. Phys. Lett. 69(26),1996
[7] Steven E. Molesa, Steven K. Volkman, David R. Redinger, Alejandro de la Fuente Vornbrock, and Vivek Subramanian, “A high-performance all-inkjetted organic transistor technology”, IEEE 2004
[8] Kevin P. Weidkamp, Ali Afzali, Rudolf M. Tromp, and Robert J. Hamers, “A Photopatternable Pentacene Precursor for Use in Organic Thin-Film Transistors”, J. AM. CHEM. SOC. 2004, 126, 12740-12741
[9] Meyoung Ju Joung, Jin Hee Ahn, Seung Youl Kang, Kyu Ha Baek, Seong Deok Ahn, Lee Mi Do, Chul Am Kim, Gi Heon Kim, In Kyu You, Sung Min Yoon, and Kyung Soo Suh, “New Soluble Pentacene Precursors for the Application of Organic Thin-Film Transistors”, Bull. Korean Chem. Soc., Vol. 24, No. 12, 2003
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[13] 工研院電子所“電子先鋒”, 2005.2
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[15] Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom, “ Imprint lithography with 25-Nanometer Resolution”, Science 1996, Vol.272, p85-87
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