臺灣博碩士論文加值系統

隨著科技的發展，各種消費性電子產品普遍為人類所使用，如何讓這些產品體積更小、重量更輕成為產品成功與否的關鍵之一。在各類產品之中，微小化機械產品的需求也逐漸增加。如各種相機產品，其對焦、變焦系統更是仰賴各類如線圈馬達等致動器做為鏡片移動的重要原件。但是傳統馬達的各種缺點成為相機小型化的一大障礙。因此，利用超音波馬達高速、設計多變的優點利用在相機對焦、變焦系統中成為超音波馬達的一個新的應用。本研究的研究目標便是研發一種體積小、重量輕、製造與設備成本低的新超音波馬達。
本研究利用雙層壓電振動片作為雙層壓電式超音波馬達的主要結構，配合氧化鋁的耐磨特性作為雙層壓電式超音波馬達的接觸點與被驅動表面的摩擦材質。並利用ANSYS作有限元素法模態來模擬與驗證其操作模態。在一系列量測其最大驅動速度、可承受的最大負載與能量轉換效率的研究後，完成了體積小、重量輕、設計簡單、生產與設備簡單的高效能超音波馬達。其外型最大尺寸僅為9 mm * 3 mm * 2.3 mm，最大速度高達255 mm/s，最大可承受負載高達20.5 g。其各項效能對體積標準化後與文獻中的各種超音波達作比較，可以發現雙層壓電式超音波馬達擁有十分優異的效能。未來應用層面廣泛。

With the advance of technology, many kinds of consuming electronic products are broadly used in lives. How to make these products smaller and lighter is crucial to the success of these products. The demand of miniaturized mechanisms is gradually increasing. In all kinds of cameras, the focusing and zooming systems rely heavily on coil motors that move the lenses. However, the insufficiencies of coil motors have been an obstacle in the miniaturization of cameras. Therefore, it is a new application to use ultrasonic motors in focusing and zooming systems. The purpose of this research is to design a small-sized, light-weighted and mass-producible ultrasonic motor with low-cost operating equipments.
This research uses bimorph as the main structure of Bimorph Ultrasonic Motor (BUSM) with alumina as contact point material and driven surface material which take advantage of the wear-resistant ability. The operating modes are simulated and verified with ANSYS. After measuring of the maximum velocity, the maximum mechanical load which can be endured by BUSM and the energy transducing efficiency, BUSM has proved it is a small-sized, light-weighted, simply-designed and mass-producible ultrasonic motor with simple operating equipments. The maximum size of the shape is only 9 mm * 3 mm * 2.3 mm, and the maximum driving velocity and output force is 255 mm/s and 20.8 g. The volume-standardized performances of BUSM are outstanding in comparison with other ultrasonic motors. In the future, we are confident that the application of BUSM will be broad.

中文摘要 I
英文摘要 II
目錄 III
圖例目錄 VII
表格目錄 XV
第1章 緒論 1-1
1.1 研究背景與動機 1-1
1.2壓電的基本性質 1-3
1.2.1 壓電材料的組成律 1-3
1.2.2 機電轉換係數 1-5
1.2.3 壓電致動 1-6
1.2超音波馬達基本原理 1-7
1.3 文獻回顧 1-8
1.3.1 駐波式超音波馬達 1-8
1.3.2 行波式超音波馬達 1-17
1.3.3 表面波式超音波馬達 1-18
1.4 研究目標 1-20
第2章 超音波馬達之設計與模擬 2-1
2.1 雙層壓電式超音波馬達之設計 2-1
2.2有限元素法模型建立 2-4
2.3 模擬分析結果與驗證 2-6
2.3.1 正向驅動模態之模擬與驗證 2-9
2.3.2 反向驅動模態之模擬與驗證 2-11
2.4 雙層壓電式超音波馬達工作原理 2-13
2.4.1 正向驅動原理 2-13
2.4.2 反向驅動原理 2-17
第3章 系統架設與實驗設備 3-1
3.1 量測系統架設 3-3
3.1.1 頻譜分析量測系統 3-3
3.1.2 模態量測系統 3-4
3.1.3 負載、速度、輸入電能量測系統 3-5
3.2 夾具設計 3-7
3.3 實驗設備 3-14
第4章 實驗數據與結果 4-1
4.1 暫態分析 4-1
4.1.1 正向驅動暫態分析 4-1
4.1.2 反向驅動暫態分析 4-6
4.2 頻率響應分析 4-9
4.3 接觸角對性能影響 4-11
4.3.1 接觸角對操作頻率的影響 4-11
4.3.2 接觸角對最大負載的影響 4-13
4.3.3 接觸角對最大速度的影響 4-15
4.3.4 最佳接觸角 4-17
4.4 輸入電壓對性能影響 4-18
4.4.1 輸入電壓對操作頻率的影響 4-18
4.4.2 輸入電壓對最大負載的影響 4-20
4.4.3 輸入電壓對最大速度的影響 4-22
4.4.4 最佳輸入電壓討論 4-24
4.5能量轉換效率 4-25
4.5.1 正向驅動電壓10 Vp0 4-26
4.5.2 正向驅動電壓20 Vp0 4-27
4.5.3 正向驅動電壓30 Vp0 4-30
4.5.4 反向驅動電壓10 Vp0 4-36
4.5.5 反向驅動電壓20 Vp0 4-40
4.5.6 反向驅動電壓30 Vp0 4-43
4.5.7 最大效率 4-50
4.6 最佳效率設定 4-52
4.7 結果與討論 4-55
第5章 未來與展望 5-1
R. 參考文獻 R-1
附錄A 大型雙層壓電式超音波馬達 A-1
A.1 超音波馬達之設計與模擬 A-1
A.2 夾具設計與量測系統 A-4
A.3 接觸角對最大負載影響 A-9
A.4 摩擦材質對效能影響 A-10
A.5 能量轉換效率 A-13
A.5.1 rubber-1 2mm之能量轉換效率 A-13
A.5.2 rubber-2 2mm之能量轉換效率 A-15
A.5.3 最大效率 A-18
A.6 結果與討論 A-20
附錄B 夾具設計圖 B-1
附錄C 模態量測原始圖 C-1
C.1 正向驅動模態量測原始圖 C-2
C.2 反向驅動模態量測原始圖 C-10

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